811
Specifications
Item
Measurement flow rate range
Response
Output signal
Operating temperature range
Storage temperature range
Operating and storage humidity range
Operating pressure range
Proof pressure
Output voltage accuracy
Repeatability
Pressure characteristics
Temperature characteristics
Power supply voltage
Allowable voltage fluctuation range
Output stabilization time
Consumption current
Dielectric strength
Insulation resistance
Connection method
Material
Mounting direction
Mounting conditions
Straight piping length
Vibration resistance
Mass
Electrical connection
(special connectors)
FS-R05
Air/nitrogen. However, the detection media cannot contain chlorine, sulfur, acid, or other corrosive substances. Gas must also be dry.
Gas must be clean gas devoid of dust and mist (oil mist).
−
500
〜＋
500 m
R
/min [
−
30.5
〜
30.5 in.
3
/min.]
Converted volume flow rate at 20°C [68°F], 1 atm [14.7 psi.]
5 ms or less (95% response to stepped changes in flow rate)
DC1
〜
5V (nonlinear characteristics), Allowable load resistance 10 k
Ω
or more
0
〜
50°C [32
〜
122°F] (for both ambient temperature and measured media temperature)
−
10
〜
60°C [14
〜
140°F]
10
〜
80%RH (no condensation)
−
100
〜＋
200 kPa [
−
14.5
〜
29.0 psi.] (Pressure characteristic warranty range is
−
70
〜＋
200 kPa [
−
10.2
〜
29.0 psi.])
300 kPa [43.5 psi.]
±
5%FS MAX.
0.0
R
/min [0.000 ft.
3
/min.]: 3.00
±
0.20V
0.1
R
/min [0.004 ft.
3
/min.]: 3.77
±
0.20V
0.3
R
/min [0.011 ft.
3
/min.]: 4.53
±
0.20V
0.5
R
/min [0.018 ft.
3
/min.]: 5.00
±
0.20V
±
2%FS MAX.
Assuming the same temperature and pressure conditions at time of measurement
±
0.01%FS/kPa
In
−
70
〜＋
200 kPa [
−
10.2
〜
29.0 psi.] pressure range
0.0
R
/min [0.000 ft.
3
/min.]:
±
0.1%FS/°C
0.3
R
/min [0.011 ft.
3
/min.]:
±
0.15%FS/°C
DC24V (supplied from sensor controller)
In the DC21.6
〜
26.4V range,
±
2%FS or less in relation to output value at DC24V
Note 2
Time required to come within
±
5%FS of final attained voltage (flow rate): Instantaneous
Time required to come within
±
1%FS of final attained voltage (flow rate): Within 10 sec.
12 mA MAX.
Between all external connector terminals and body: AC500V for 1 min., or AC600V for 1 sec.
Between all external connector terminals and body: 50 M
Ω
(at DC500V megger)
M5 female thread (brass insertion), tightening torque at 2.5 N·m [1.84 ft·lbf] or less
Gas contact part: PPS plastic (flow path body), ceramic (substrate), brass (connections)
Cover part: PC plastic (polycarbonate)
Any direction except where cover part faces downward
When using the mounting holes on this device, use M3 screws and a tightening torque of 0.6 N·m [5.3in·lbf] or less.
In addition, install a filter upstream from the device that is capable of collecting dust and mist particles of 10
μ
m or larger.
Unnecessary either upstream or downstream from the device
10
〜
55 Hz, total amplitude 1.5 mm [0.059 in.], XYZ directions each two hours
9 g [0.32 oz.]
Cable with dedicated connector
Flow rate sensor heads side: SM03B-SRSS-G-TB made by JST Mfg. Co., Ltd.
Mating side: SHR-03V-S-B (housing), SSH-003GA-P0.2 (contact) made by JST Mfg Co., Ltd.
FS-10
0
〜＋
10
R
/min [0
〜
0.35 ft.
3
/min.]
±
5%FS MAX.
0.0
R
/min [0.000 ft.
3
/min.]: 1.00
±
0.20V
3.0
R
/min [0.106 ft.
3
/min.]: 3.89
±
0.15V
5.0
R
/min [0.177 ft.
3
/min.]: 4.46
±
0.15V
10.0
R
/min [0.353 ft.
3
/min.]: 5.00
±
0.20V
±
6%FS MAX.
±
0.01%FS/kPa (0
〜＋
200 kPa [0
〜
29.0 psi.])
±
0.03%FS/kPa (
−
70
〜
0 kPa [
−
10.2
〜
0 psi.])
0.0
R
/min [0.000 ft.
3
/min.]:
±
0.1%FS/°C
5.0
R
/min [0.177 ft.
3
/min.]:
±
0.2%FS/°C
Model
●
Flow rate sensor heads
Notes: 1. The %FS in the table assumes full-scale output voltage of 4V (1
〜
5V).
2. Near the upper limit of the measurement flow rate range, output fluctuation after flow rate stabilization can be generated up to a maximum of
±
1%FS
(amount of drift 500 seconds after flow rate stabilization).
FS-R3
−
3
〜＋
3
R
/min [
−
0.11
〜
0.11 ft.
3
/min.]
±
5%FS MAX.
0.0
R
/min [0.000 ft.
3
/min.]: 3.00
±
0.15V
0.5
R
/min [0.018 ft.
3
/min.]: 3.88
±
0.15V
1.5
R
/min [0.053 ft.
3
/min.]: 4.49
±
0.15V
3.0
R
/min [0.106 ft.
3
/min.]: 5.00
±
0.20V
±
3.5%FS MAX.
±
0.01%FS/kPa
0.0
R
/min [0.000 ft.
3
/min.]:
±
0.1%FS/°C
1.5
R
/min [0.053 ft.
3
/min.]:
±
0.15%FS/°C
Gases targeted for
measurement
Standard flow rate
characteristics
