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Kobold MAS Series, Инструкция по эксплуатации

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MAS Instruction Manual

to be used is 

FKM

.

 

Page 43

Actual Gas

Chemical

Ref.

KFactor

KFactor

Cp

Density

Elastomer

Symbol

Gas

Rel. to

Relative

(Cal/g)

(g/  l )

O-Ring*

Valve

Ref. Gas

N2

@ 0

°

C

Seat

Acetylene

C

2

H

2

N

2

.58

.4036 1.162

Air

N

2

1.00

.240

1.293

Allene (Propadiene)

C

3

H

4

N

2

..43

.352

1.787

KR

Ammonia

NH

3

N

2

.73

.492

.760

NEO

NEO

Argon

Ar

Ar

1.000

1.45

.1244 1.782

Arsine

AsH

3

N

2

.67

.1167 3.478

KR

Boron Trichloride

BCl

3

N

2

.41

.1279 5.227

KR

KR

Boron Trifluoride

BF

3

N

2

.51

.1778 3.025

KR

Bromine

Br

2

N

2

.81

.0539 7.130

Boron Tribromide

Br

3

N

2

.38

.0647 11.18

KR

Bromine Pentafluoride

BrF

5

N

2

.26

.1369 7.803

KR

Bromine Trifluoride

BrF

3

N

2

.38

.1161 6.108

KR

Bromotrifloromethane

CBrF

3

N

2

.37

.1113 6.644

(Freon-13 B1)
1,3-Butadiene

C

4

H

6

N

2

.32

.3514 2.413

Butane

C

4

H

10

N

2

.26

.4007 2.593

NEO

KR

1-Butane

C

4

H

8

N

2

.30

.3648 .2.503

NEO

KR

2-Butane

C

4

H

8

 CIS

N

2

.324

.336

2.503

NEO

KR

2-Butane

C

4

H

8

 TRANS

N

2

.291

.374

2.503

Carbon Dioxide

CO

2

N

2

.74

.2016 1.964

Carbon Disulfide

CS

2

N

2

.60

.1428 3.397

Carbon Monoxide

CO

N

2

1.00

.2488 1.250

Carbon Tetrachloride

CCl

4

N

2

.31

.1655 6.860

KR

Carbon Tetrafluoride

CF

4

N

2

.42

.1654 3.926

KR

(Freon-14)
Carbonyl Fluoride

COF

2

N

2

.54

.1710 2.945

Carbonyl Sulfide

COS

N

2

.66

.1651 2.680

Chlorine

CL

2

N

2

.86

.114

3.163

KR

Chlorine Trifluoride

CIF

3

N

2

.40

.1650 4.125

KR

Chlorodifluoromethane

CHClF

2

N

2

.46

.1544 3.858

KR

(Freon-22)
Chloroform

CHCI

3

N

2

.39

.1309 5.326

KR

Chloropentafluoroethane

C

2

CIF

5

N

2

.24

.164

6.892

KR

(Freon-115)
Chlorotrifluromethane

CCIF

3

N

2

.38

.153

4.660

KR

(Freon-13)
Cyanogen

C

2

N

2

N

2

.61

.2613 2.322

Cyanogen Chloride

CICN

N

2

.61

.1739 2.742

KR

Cychlopropane

C

3

H

5

N

2

.46

.3177 1.877

KR

Deuterium

D

2

N

2

1.00

.1722 1.799

Diborane

B

2

H

6

N

2

.44

.508

1.235

KR

Dibromodifluoromethane

CBr

2

F

2

N

2

.19

.15

9.362

KR

Dibromethane

N

2

.47

.075

7.76

KR

Dichlorodifluoromethane

CCI

2

F

2

N

2

.35

.1432 5.395

KR

(Freon-12)
Dichlorofluoromethane

CHCl

2

F

N

2

.42

.140

4.952

KR

(Freon-21)
Dichloromethylsilane

(CH3)

2

SiCl

2

N

2

.25

.1882 5.758

KR

Dichlorosilane

SiH

2

Cl

2

N

2

.40

.150

4.506

KR

Dichlorotetrafluoroethane

C

2

Cl

2

F

4

N

2

.22

.1604 7.626

KR

(Freon-114)
1,1-Difluoroethylene

C

2

H

2

F

2

N

2

.43

.224

2.857

KR

(Freon-1132A)
Dimethylamine

(CH

3

)

2

NH

N

2

.37

.366

2.011

KR

DRAWING NO.

REV.

SHEET

99-0224

D

1 of 3

12/95

*NOTE: If no O-Ring is

specified then O-Ring

Содержание MAS Series

Страница 1: ...KOBOLD MAS Series Thermal Mass Flowmeters March1997 r2_12 13 PartNumber IM 82 KOBOLDInstrumentsInc 1801ParkwayViewDrive Pittsburgh PA15205 412 788 2830 800 998 1020 Fax 412 788 4890...

Страница 2: ...delMAS 2100Flowmeterwithaluminumbodyandnodisplay KoboldInstruments MASSeriesFlowmeters measurethemass flowrateofgasesinrangesfrom0 10standardcubiccentimeters perminute SCCM to0 500standardliterspermin...

Страница 3: ...tingorcooling No temperatureorpressurecorrectionsarerequired asinthecaseof mostotherflowmonitoringdeviceslikerotameters turbinemeters andorificeplates Figure 1 2 MAS Operation and Features Direct Moni...

Страница 4: ...ompressioninlet outletfittings withorwithoutthedigitaldisplay ortheoptionalpowersupply GasenterstheMASflowbodyanddividesintotwoflowpaths Mostoftheflowgoesthroughthelaminarflowbypass Thiscreates apress...

Страница 5: ...assSetand cutawaythe gate s leadingtotherightcombinationoflaminar flowpathsinoneofthetwobypasses Thisprocedurerequires propercalibrationfacilitiesandminimalskillinelectronics FLOW RANGES _____________...

Страница 6: ...eper C orbetter PRESSURE COEFFICIENT 0 01 offullscaleperpsi 0 07kg cm2 orbetter RESPONSE TIME 800mstimeconstant 2seconds typical towithin 2 offinal valueover25to100 offullscale PRESSURE DROP _________...

Страница 7: ...68 169 67 1 4 SWAGELOCK ALL DIMENSIONS IN INCHES 0 58 14 73 1 16 29 46 0 56 14 22 6 32 X 0 15 DP SELF TAPPING 0 75 19 05 0 38 9 65 0 13 3 30 2 75 69 85 3 00 76 20 0 125 DIA THRU PANEL 2 PLACES FOR TW...

Страница 8: ...ength T2 1 5ChannelPowerSupply inNEMABox 115VAC T4 1 5ChannelPowerSupply inNEMABox 230VAC T5 PowerSupply foronechannel 110VAC T6 PowerSupply foronechannel 230VAC UV Upstreamvalve DV Downstreamvalve MS...

Страница 9: ...rtages pleasecontact CustomerServiceattheabovephonenumber ortheymaybe contactedinwritingattheaddresslistedinthenextsection PleasedonotreturnanyequipmentwithoutaReturnMaterial Authorization whichisobta...

Страница 10: ...Be sure the arrow on the side of the transducer CAUTION Be sure the arrow on the side of the transducer CAUTION Be sure the arrow on the side of the transducer CAUTION Be sure the arrow on the side o...

Страница 11: ...tallation testthefittingsonly Donotuse Tocheckyourinstallation testthefittingsonly Donotuse Tocheckyourinstallation testthefittingsonly Donotuse liquid leak detectors such as Snoop to search for leaks...

Страница 12: ...DB9 connector jack Do not plug power connector into DB9 connector jack Do not plug power connector into DB9 connector jack Do not plug power connector into DB9 connector jack Do not plug power connect...

Страница 13: ...n N A 9 4to20mAOutput N A ____________________________________________________________ NOTE thenumbersontheconnectorplugmaynotagreewiththe numberingsystemasitappearsonourFigure2 2 onprevious page Itis...

Страница 14: ...AL CONNECTIONS 3 VerycarefullyunsolderthefourshortleadsfromthePCBtothe display 4 Gainaccesstothedisplaycircuitboardbyremovingthetwo snaprings No 36 andopeningthe clamshell displayenclo sure Removethef...

Страница 15: ...asexcessive forcewillbreakthedelicatewireconnections Carefullymove thedisplayassemblytoexposethetwoscrewssecuringthe displaybase No 35 Donotexertexcessiveforceonthedisplay whilerotatingasdoingsocouldc...

Страница 16: ...e 1 5 offullscaleaccuracymeansthe0 5VDCoutputsignalisaccurate towithin 0 1VDC andthe4 20mAoutputisaccuratetowithin 0 4mA Thismeans forexample thattheoutputsignalforzero flowcanbeasmuchas 0 1VDCor 0 4m...

Страница 17: ...indicatenegativenumbers itisnecessary toadjustdownfromaslightlypositivereading Slowlyrotatethe zeropotclockwiseuntilapositivereadingisindicated Tocomplete thezeroadjustment slowlyturnthepotcountercloc...

Страница 18: ...MAS Instruction Manual Page 17 Figure 3 2 Multiple Installation 4 20 Hookup Figure 3 1 Single Unit 4 20 Hookup...

Страница 19: ...RROSIVE GASES ARE GAS LINE WHEN TOXIC OR CORROSIVE GASES ARE GAS LINE WHEN TOXIC OR CORROSIVE GASES ARE USED NEVER RETURN AN MAS TO KOBOLD USED NEVER RETURN AN MAS TO KOBOLD USED NEVER RETURN AN MAS T...

Страница 20: ...seofyourMAS Koboldhasdesigned thesensortubewiththinwalls Therefore when cleaning be Therefore when cleaning be Therefore when cleaning be Therefore when cleaning be Therefore when cleaning be extremel...

Страница 21: ...PS1through3 STEP1 WARM UP PlugintheMAStobecalibratedandallowat least15minuteswarm uptimebeforeattemptinganyadjustments STEP2 ZEROADJUST Slideopenthezeroandspanaccessportson thesideofyourMAS Becarefult...

Страница 22: ...R27 75 J3 0 0 0 J3 XXXXX 0 AdjustR29 100 LinearizerJumperArray JumpersInstalled _________________________________________________________________ STEP6CALIBRATE 25 Usethecalibrationstandardtosetaflow...

Страница 23: ...standard forKoboldInstruments AppendixCishelpfulinthisregard You mustthenusetheK factortablesinAppendixD ThenextstepistoprocurefromKoboldInstrumentstheModelEL Laminar Flow Bypass Set This set of two p...

Страница 24: ...____________________________________________________ Nooutput Nopower Pluginpowersupply Cloggedsensor Cleanorreplacesensor PCBdefective RepairorreplacePCB Inletfilter Cleanorreplace screenclogged Will...

Страница 25: ...oqualifiedrepairpersonnel PleasecallCustomerService Department TechnicalAssistance 412 788 2830 Fax 412 788 4890 EuropeancustomerscancontactKoboldMessringGmbHfor customerserviceandtechnicalassistancea...

Страница 26: ...ishtohaveKoboldcalibratewithadifferentflowrange and orgas pleasetakenoteofthefollowing NOTE 1 FLOW RANGE ThestandardflowrangesgiveninSection1 3 SPECIFICATIONS are fornitrogenatstandardconditionsof1atm...

Страница 27: ...MAS Instruction Manual Page 26 APPENDIX A Exploded View of MAS Transducers and Parts Lists...

Страница 28: ...MAS Instruction Manual Page 27 Aluminum Assembly High Flow MAS 1100 2100 M82 0022...

Страница 29: ...tM82 0017 X ITEM PIN DESCRIPTION 1 41 0175 Body 820 Hi Flow Al 2 41 0176 Cap End 820 HighFlow 3 40 0037 Holder LFE Mod820 4 35 0084 Washer Split 06 5 35 0326 Nut Hex 6 32 SS 6 35 0174 Rod Threaded 6 3...

Страница 30: ...MAS Instruction Manual Page 29 MAS Assembly MAS 1000 2000 M82 0023...

Страница 31: ...PartsListM82 0018 X PartsListM82 0018 X PartsListM82 0018 X ITEM PIN DESCRIPTION 1 42 0053 2 40 0043 3 31 0001 906 4 42 0105 5 40 0042 6 42 0041 7 31 0001 908 Body 820 Black Screen Mod820 for 10SLPMF...

Страница 32: ...MAS Instruction Manual Page 31 Electronics Enclosure Sub Assembly MAS M82 0019 XXXX B...

Страница 33: ...C 4 42 0038 Bracket PCB 820 5 42 0044 Slides Zero Span 6 35 0346 Scr FLH Phl 4x0 500 L SLFTPG Zinc 7 42 0052 Cover Top Mod820 8 40 0038 Bracket Adapter 820Displayto830Body 9 35 0288 Scr FLH Phl 4 40X0...

Страница 34: ...MAS Instruction Manual Page 33 Sensor Compartment Assembly MAS M82 0020 X B...

Страница 35: ...173 HeatSink DieCast 3 43 0037 01 Sensor FlowCapillary 4 41 0171 Bushing SensorO Ring DieCast 5 41 0170 Plate SensorRing 820 DieCast 6 35 0130 Scr Flh Phl 4 40X0 250 L 7 35 0092 Scr Pnh Phl 4X0 562 L...

Страница 36: ...MAS Instruction Manual Page 35 Tables 1 4 O D Tube Fitting Type VCO VCR 9 16 18 Thd Comp male male Dim L 4 8 5 0 4 8 Bottom View Outlet End View Stainless Steel Low Flow Dimensional Drawing Side View...

Страница 37: ...Flow Range 0 706 1 06 1 77 SCFM Tube O D 3 8 3 8 3 8 Inches Fitting Type 1 4 1 4 VCO 1 4 VCR 9 16 18 Thd Comp male male Dim L 6 27 6 01 6 13 Fitting Type 3 8 3 8 VCO 3 8 VCR 9 16 18 Thd Comp male male...

Страница 38: ...100 0 200 0 300 SLM Tube O D 3 8 1 2 3 8 1 2 1 2 Inches Flow Range 3 53 7 06 10 6 SCFM Tube O D 1 2 1 2 1 2 Inches Fitting Type 3 8 3 8 VCO 3 8 VCR 3 4 16 Thd Comp male male Dim L 11 36 11 81 11 93 F...

Страница 39: ...itions SCCMorSLM S means standard ACCMorALM A means actual P Absolutepressure kg cm2orpsia and T Absolute temperature D or R K C 273 R F 460 EXAMPLE 1 CHANGING STANDARD CONDITIONS If your MAS has a fl...

Страница 40: ...ual gas and 2 Referstothe reference gas TheK factorisderivedfromthefirstlawofthermodynamics appliedtothesensortube asdescribedinSection1 2 PRINCIPLEOF OPERATION H m C T N P 2 where H Theconstantamount...

Страница 41: ...ttheconstantbcancelsout Equation 6 isthe fundamentalrelationshipusedintheaccompanyingtables For convenience thetablesgive relative K factors whicharethe ratiosK1 K2 insteadoftheK factorsthemselves Int...

Страница 42: ...100 70 3 or Q SCCM N 0 2 PleasenotethattheK factorsrelativetonitrogenmustbeusedin eachcase EXAMPLE 3 We want a MAS to be calibrated for use with dichlorosilane SiH2 CL2 at a 100 SCCM full scale flow...

Страница 43: ...ORTANT NOTE ABOUT K FACTORS IMPORTANT NOTE ABOUT K FACTORS Pleasenotethatifyouhaveamassflowmetercalibratedforagas suchasmethaneandwishtousetheK factorstomeasureagas suchasair thattheinaccuracyofthemea...

Страница 44: ...arbon Tetrachloride CCl4 N2 31 1655 6 860 KR Carbon Tetrafluoride CF4 N2 42 1654 3 926 KR Freon 14 Carbonyl Fluoride COF2 N2 54 1710 2 945 Carbonyl Sulfide COS N2 66 1651 2 680 Chlorine CL2 N2 86 114...

Страница 45: ...3 418 Germanium Tetrachloride GeCL4 N2 27 1071 9 565 KR Helium He He 1 000 1 454 1 241 1786 Hexafluoroethane C2F6 N2 24 1834 6 157 KR Freon 116 Hexane C6H14 N2 18 3968 3 845 KR Hydrogen H2 H2 1 000 1...

Страница 46: ...ne C3H8 N2 36 3885 1 967 KR Propylene C3H6 N2 41 3541 1 877 KR Silane SiH4 N2 60 3189 1 433 KR Silicon Tetrachloride SiCl4 N2 28 1270 7 580 KR Silicon Tetrafluoride SiF4 N2 35 1691 4 643 KR Sulfur Dio...

Страница 47: ...MAS Instruction Manual Page 46...

Страница 48: ...ectricalConnections 14 2 5 4 UsingKobold sSingle Dual andFlo Box Electronics 14 3 OPERATION 15 3 1 QuickOperatingInstructions 15 3 2 NotestoOperatingInstructions 15 4 MAINTENANCE 18 4 1 GeneralStateme...

Страница 49: ...icsEnclosureSub Assembly MAS 31 32 SensorCompartmentAssembly MAS 33 34 StainlessSteelLowFlowDimensionalDrawing 35 StainlessSteelMediumFlowDimensionalDrawing 36 StainlessSteelHighFlowDimensionalDrawing...

Страница 50: ...amagetoelectronicswillresult The D connectorpinout Damagetoelectronicswillresult The D connectorpinout is in Section 2 5 1 is in Section 2 5 1 is in Section 2 5 1 is in Section 2 5 1 is in Section 2 5...

Страница 51: ...eed150psig 10kg cm2 gauge or150 F 65 556 C 2 ApplypowertoyourMAS IfyouareusingtheKoboldMAS 5000powersupply plugthepowersupplyintolinepowerand theconnectorintotheinputpowerjackonthesideofyourMAS Refer...

Страница 52: ...le and4 00mAisforzeroflow 6 TheMASwithIntegralorRemoteDisplay The31 2 digitLCD displayreadsdirectlyinengineeringunitsorpercentoffull scale Thefullscalerangeandgasareshownonthefrontlabel ofyourMAS Thed...

Страница 53: ...oxygen service The customer must clean Kobold s Mass Flow Meters or Controllers to the degree that the customer requires for his oxygen flow applications COPYRIGHT KOBOLD INSTRUMENTS INC 1997 No part...

Страница 54: ...MAS Instruction Manual Page 54...

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