Kobold MAS Series, Инструкция по эксплуатации

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MAS Instruction Manual
Page 22
The procedure for calibrating your MAS over a different flow range
and/or gas is identical to that described in Section 5.2, R
ECALIBRATION
O
VER THE
S
AME
F
LOW
R
ANGE
, except that the range of the laminar
flow element (LFE) may need changing.
The first step is to determine the equivalent nitrogen flow rate. To
do so, you must first determine your “standard” gas conditions.
21
°
C (or 70
°
F) and 760 mm of mercury (1 atmosphere) is standard
for Kobold Instruments. Appendix C is helpful in this regard. You
must then use the K-factor tables in Appendix D.
The next step is to procure from Kobold Instruments the Model EL
Laminar Flow Bypass Set. This set of two patented Model EL
LFE’s covers all ranges from 0-10 SCCM to 0-40 SLM, when the
proper combination of “gates” to the individual laminar flow
channels have been opened (see Section 1.2, P
RINCIPLE OF
O
PERATION
).
The instruction manual for the Model EL LFE’s describes this
procedure in detail.
NOTE: Potentiometer R15 shown in Appendix B is for speed of
response and does not require any adjustment.
5.3
Flow Calibration
Over a Different Flow
Range and/or Gas