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Applications

3-5

3.3

Semiconductor test matrix

Two important advantages of a matrix switching system are
the ability to connect a variety of instruments to the device or
devices under test, as well as the ability to connect any
instrument terminal to any device test node. The following
paragraphs discuss a typical semiconductor matrix test sys-
tem and how to use that system to perform a typical test:
common-source characteristic testing of a typical JFET.

3.3.1 System configuration

Figure 3-5 shows the configuration for a typical multi-
purpose semiconductor test matrix. Instruments in the
system perform the following functions.

Model 617 Electrometer/Source:

Measures current, and

also could be used to measure voltages up to ±200VDC. The
DC voltage source can supply a maximum of ±100V at cur-
rents up to 2mA.

Model 230 Voltage Source:

Sources DC voltages up to

±101V at a maximum current of 100mA.

Model 590 CV Analyzer:

Adds CV sweep measurement

capability to the system.

Model 220 Current Source:

Used to source currents up to a

maximum of 101mA with a maximum compliance voltage
of 105V.

Model 196 DMM:

Measure DC voltages in the range of

100nV to 300V. The Model 196 could also be used to mea-
sure resistance in certain applications.

Device Under Test:

A three-terminal picture for testing such

devices as bipolar transistors and FETs. Additional connec-
tions could easily be added to test more complex devices, as
required.

11

1 2 3 4 5 6 7 8 9 10

12

A

C

B

D

E

F

G

H

G

S G S G

S G S G

SG SG SG SG S G

G

G

G

G

G

G

S

S

S

S

S

S

HI

G

LO

LO

LO

617

I Measure

HI

HI

V Source

590

CV

HI

HI

HI LO

LO

LO

220

Current

Source

196

DMM

V Measure

230

V Source

Device Under Test

Source

Gate

Drain

7174A Matrix Card

707A Switching Matrix

Figure 3-5

Semiconductor test matrix

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Содержание 7174A

Страница 1: ...cess underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Dem...

Страница 2: ...n Manual Contains Operating and Servicing Information Model 7174A 8 12 Low Current Matrix Card 7174A 901 01 Rev A 9 98 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www art...

Страница 3: ...SOLE AND EXCLUSIVE REMEDIES NEITHER KEITHLEY INSTRUMENTS INC NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT INDI RECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS...

Страница 4: ...truction Manual 1998 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A First Printing September 1998 Document Number 7174A 901 01 Rev A Artisan Technology Group Quality Instrumentation...

Страница 5: ...num bered sequentially When a new Revision is created all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual Each new Revision includes a...

Страница 6: ...t before measuring Users of this product must be protected from electric shock at all times The responsible body must ensure that users are prevented access and or insulated from every connection poin...

Страница 7: ...d the associated infor mation very carefully before performing the indicated procedure The CAUTION heading in a manual explains hazards that could damage the instrument Such damage may invalidate the...

Страница 8: ...AGE Pin to Ground 0 01pA V Pin to Pin 0 005pA V INSULATION RESISTANCE 6 7 1013 minimum CAPACITANCE Guard Driven Path to Ground 10pF Path to Path 1pF typical ACCESSORY SUPPLIED Instruction manual and e...

Страница 9: ...mmended cables and adapters 2 3 2 5 3 Triax banana plug adapter 2 4 2 5 4 General instrument connections 2 5 2 5 5 Keithley instrument connections 2 11 2 5 6 Typical test fixture connections 2 17 2 6...

Страница 10: ...ng precautions 4 1 4 3 Principles of operation 4 2 4 3 1 Block diagram 4 2 4 3 2 ID data circuits 4 2 4 3 3 Relay control 4 3 4 3 4 Power on sequence 4 3 4 3 5 Isolator relays 4 4 4 4 Troubleshooting...

Страница 11: ...ector locations 2 21 Figure 2 17 Two cards in daisy chain configuration 2 22 Figure 2 18 Power line ground loops 2 23 Figure 2 19 Eliminating ground loops 2 23 Figure 2 20 Shielded and guarded 2 24 Fi...

Страница 12: ...for path isolation verification 4 7 Figure 4 5 Triaxial cable preparation 4 8 Figure 4 6 Connections for path resistance verification 4 9 Figure 4 7 Shorting measurement paths using triax tee adapter...

Страница 13: ...3 2 Crosspoint summary for resistivity measurements 3 9 4 Service Information Table 4 1 Recommended troubleshooting equipment 4 4 Table 4 2 Troubleshooting procedure 4 4 Table 4 3 Recommended verific...

Страница 14: ...s 1 6 Specifications 1 7 Unpacking and inspection 1 8 Packing for shipment 1 9 Optional accessories 1 2 Features Key features of the Model 7174A Low Current Matrix Card include Eight row by twelve col...

Страница 15: ...e Report any such damage to the shipping agent immediately Save the original packing carton for possible future reshipment 1 7 2 Shipment contents The following items are included with every Model 717...

Страница 16: ...with cap Use this connector for custom applica tions and interface connections such as test fixtures Model 7078 TRX T 3 slot male to dual 3 lug female triax tee adapter Model 237 BAN 3 3 slot male tri...

Страница 17: ...t considerations Reviews a number of considerations when making low level current and capacitance measurements 2 8 Coaxial jumper access Provides information on jumper removal 2 2 Handling precautions...

Страница 18: ...until it is properly seated in the edge connectors at the back of the slot Once the card is properly seated secure it to the main frame by finger tightening the spring loaded screws WARNING The mount...

Страница 19: ...e measure ments made See paragraph 2 7 for a discussion of measure ment considerations Table 2 1 Recommended cables and adapters Model Description 7078 TRX x 237 BAN 3 237 ALG 2 7078 TRX BNC 7078 TRX...

Страница 20: ...of a triaxial cable with inner shield shorted to center conductor 1 Using a knife cut and strip back the jacket about 1 1 2 inches 2 Remove the outer insulation then cut away the outer shield as far a...

Страница 21: ...through G The unguarded volts connections in D show the HI signal path routed through one jack and the LO path goes through the other connector Both GUARD pathways are connected to electrometer LO For...

Страница 22: ...his configuration only for non critical measurements Warning Hazardous voltage from guard sources may be present on LO B DMM Common LO Rows Columns Rows Columns 7174A 7174A Figure 2 5 General instrume...

Страница 23: ...e HI Sense LO C DMM 4 Wire Rows Columns HI LO Electrometer Signal Guard Signal Guard DUT D Electrometer Unguarded Volts Rows Columns 7174A 7174A Figure 2 5 General instrument connections cont Artisan...

Страница 24: ...Guard Signal Guard DUT F Electrometer Fast Current Rows Columns Rows Columns HI LO Electrometer Signal Guard Signal Guard DUT Guard G Electrometer Resistance Guarded 7174A 7174A 7174A Figure 2 5 Gene...

Страница 25: ...d Signal Guard DUT I Current Source Unguarded HI LO Current Source Signal Guard Signal Guard DUT J Current Source Guarded Guard Rows Columns Signal 7174A 7174A 7174A Figure 2 5 General instrument conn...

Страница 26: ...uard Note DUT shielding guarding not shown See Figures 2 20 and 2 21 Force I or V Source Measure Unit Rows Columns Signal Signal Guard Signal Guard 7174A Figure 2 5 General instrument connections cont...

Страница 27: ...7174A 8 x 12 LOW CURRE NT MATRIX COLUMNS ROWS S IGNAL GUARD 200V PK 200V PK 200V PK WARNING TIGHTE N MOUNTING S CRE WS TO E NS URE PROPE R CHAS S IS GROUND 6172 2 slot to 3 lug Triax Adapter 237 BAN...

Страница 28: ...nect the inner shield of the HI cable to VOLT OHMS LO to minimize noise 196 DMM Connect inner shield to LO for low level measurements Modify the cable of Figure 2 4 HI LO 1 2 3 4 5 6 7 8 9 10 11 12 A...

Страница 29: ...V PK 200V PK WARNING TIGHTE N MOUNTING S CRE WS TO E NS URE PROPE R CHAS S IS GROUND 237 BAN 3 or Special Triax Note See paragraph 2 5 3 and Figure 2 4 for special triax to banana cable 237 BAN 3 Comm...

Страница 30: ...8 x 12 LOW CURRE NT MATRIX COLUMNS ROWS S IGNAL GUARD 200V PK 200V PK 200V PK WARNING TIGHTE N MOUNTING S CRE WS TO E NS URE PROPE R CHAS S IS GROUND 7174A Matrix Card Figure 2 9 Model 590 CV analyzer...

Страница 31: ...adapter and the desired row of the Model 7174A 3 Connect the Model 220 GUARD output to GUARD INPUT terminal of the adapter 4 Connect the triax end of a triax banana cable to the desired row on the Mo...

Страница 32: ...ONLY 100VA MAX ADDRESS ENTERED VIA FRONT PANEL PROGRAM IEEE 488 INTERFACE CAL ENABLE INTERLOCK 1 2 LINE VOLTAGE SELECTED LINE FUSE SLOWBLOW TRIGGER OUT IN 200V MAX OUTPUT LO SENSE LO OUTPUT LO SENSE...

Страница 33: ...nect internally recommended for specified performance 1 2 3 4 5 6 7 8 9 10 11 12 A B C D E F G H KEITHLE Y 7174A 8 x 12 LOW CU RRE NT MATRIX COLUMNS ROWS S IGNAL GUARD 200V PK 200V PK 200V PK WARNING...

Страница 34: ...closed and open automatically when all crosspoints on the path are opened 2 6 Matrix configuration This section describes the matrix configuration of the Model 7174A It also explains ways to expand t...

Страница 35: ...2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 H G C H G C H G C H G C H G C H G C H G C H G C H G C H G C H G C Rows Note For schematic refer to Section 5 Columns User connec...

Страница 36: ...305 317 329 341 353 6 18 30 42 54 66 78 90 102 114 126 138 150 162 174 186 198 210 222 234 2446 258 270 282 294 306 318 330 342 354 7 19 31 43 55 67 79 91 103 115 127 139 151 163 175 187 199 211 223 2...

Страница 37: ...for each row allowing daisy chaining of card rows These connectors can be reached by lifting the access door on the top of the mainframe do not remove cards to install the jumpers This expansion is sh...

Страница 38: ...However it is still possible for sensitive signals to be affected by external sources In these instances special precautions may be required in the test setup Sources of EMI include Radio and TV broa...

Страница 39: ...to dry for several hours in a low humidity environ ment before use or they can be dried more quickly using dry nitrogen 2 7 5 Noise currents caused by cable flexing Noise currents can be generated by...

Страница 40: ...path of the matrix card should be connected to the guard output of the sourcing or measuring instrument Figure 2 20 shows typical connections Guard should be properly carried through the inner shield...

Страница 41: ...2 8 Coaxial jumper access To gain access to jumpers lift jumper across cover Figure 2 22 Figure 2 22 Coaxial jumper access Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www...

Страница 42: ...ch as doping profile band bending and mobile ion concentration 3 2 1 Stand alone system configuration The stand alone system shown in Figure 3 1 can be used to make CV measurements without the aid of...

Страница 43: ...alone CV system configuration 11 1 2 3 4 5 6 7 8 9 10 12 A C B D E F G H 1 2 3 4 5 6 S G S G S G S G Devices Under Test Triax Cables 4801 Low Noise Cables Model 595 Quasistatic CV Meter Meter Input V...

Страница 44: ...ble corrected separately Also for best quasistatic CV results the corrected capaci tance feature of the Model 595 should be used Corrected capacitance compensates for any leakage currents present in t...

Страница 45: ...1 20 1 12 1 05 0 97 0 90 0 82 0 75 Capacitance Farad X 10 09 4 99 3 99 2 99 1 99 0 99 0 00 1 00 1 99 2 99 3 99 4 99 Bias Volt X 10 00 Keithley 590 00 00 10 500 100KHz X1 Filter Parallel Figure 3 4 Typ...

Страница 46: ...Voltage Source Sources DC voltages up to 101V at a maximum current of 100mA Model 590 CV Analyzer Adds CV sweep measurement capability to the system Model 220 Current Source Used to source currents u...

Страница 47: ...ncrements of 0 25V At each VGS value the drain source voltage VDS is stepped across the desired range and the drain current ID is measured at each value of VDS Once all data are compiled it is a simpl...

Страница 48: ...ke van der Pauw resistivity measurements four terminals of a sample of arbitrary shape are measured A current from the Model 220 is applied to two terminals while the voltage is measured by the Model...

Страница 49: ...2 4 3 B V3 I 1 2 4 3 C D V4 I 2 4 3 V5 I 1 2 4 3 V6 I 1 2 4 3 E F V8 I 1 2 4 3 G H V7 I 2 4 3 1 1 Figure 3 9 Resistivity measurement conventions Artisan Technology Group Quality Instrumentation Guara...

Страница 50: ...B 1 1331 f BtS V6 V8 V5 V7 I AVG A B 2 3 5 Semiconductor IV characterization A source measure unit such as the Model 236 237 or 238 is used to test and characterize many types of devices One of these...

Страница 51: ...D E F G H Columns Crosspoint Switching for all Rows Signal Guard Signal Guard 7174A Matrix Card 7174A Matrix Card 7078 TRX Cables Source Measure Units Note Do not connect guards to the DUT or short t...

Страница 52: ...cks 4 2 Handling and cleaning precautions Because of the high impedance circuits on the Model 7174A care should be taken when handling or servicing the card to prevent possible contamination The follo...

Страница 53: ...to Serial Converter Relay Drivers Power On Safeguard Output Enable Relays Rows A H Columns 1 12 Figure 4 1 Model 7174A block diagram ID Data is contained within an on card ROM U406 In order to read t...

Страница 54: ...9 4 3 3 Relay control The relays are controlled by serial data transmitted via the RELAY DATA line A total of 16 bytes for each card are shifted in serial fashion into latches located in the 16 relay...

Страница 55: ...igura tion jumper in the EXTEND position See the documentation supplied with the Model 7070 for complete details on using the card NOTE Do not use the Model 7070 for performing verification tests beca...

Страница 56: ...ation measurements except for path isolation and offset current should be made at an ambient temperature of 21 C 25 C and a relative humidity of less than 0 R H Path isolation and offset current verif...

Страница 57: ...ect the instrument and then select autoranging 4 Connect the Model 617 to row A of the Model 7174A as shown in Figure 4 4 5 Close crosspoint A1 by using the Model 707A front panel controls 6 Disable z...

Страница 58: ...d the center conductor are to be connected to the banana plug as shown COM and LO terminal of the electrometer voltage source must be connected together as shown Also the ground link between COM and c...

Страница 59: ...output 6 Close crosspointsA1 and B2 by using the switching ma trix front panel controls 7 With the Model 617 in amps enable suppress after the reading has settled 8 Turn on the Model 617 voltage sour...

Страница 60: ...onductor Recommended equipment Model 196 DMM 7078 TRX T triax tee adapters 3 237 BAN 3 triax to banana cables 4 Connections Figure 4 6 shows the connections for the path resistance tests The Model 196...

Страница 61: ...he Model 7174A see Figure 4 6 8 Close crosspoint A1 and allow the reading to settle 9 Verify that the resistance reading is 1 5 10 Open the crosspoint and disconnect the triax adapter from column 1 Co...

Страница 62: ...8 Reinstall any reed packs that may have been removed when the cross point interconnect board was removed 9 Reinstall the cross point interconnect board Be sure that it is properly seated 10 Reinstal...

Страница 63: ...Cross point Interconnect Board Cover TP1 Bobbin Crosspoint Relay Reed Pack Clear Yellow Note When inserting reed pack make sure long leads are inserted into bobbin Figure 4 8 Cross point relays Artisa...

Страница 64: ...ack Red Isolator Relay Reed Pack Pathway Interconnect Board Clear Red Black Bobbin Yellow Note When inserting reed pack make sure long leads are inserted into bobbin Figure 4 9 Isolator relays Artisan...

Страница 65: ...applicable 5 Keithley part number 5 4 Factory service If the matrix card is to be returned to Keithley Instruments for repair perform the following 1 Call the Repair Department at 1 800 552 1115 for...

Страница 66: ...LM RES 10K 5 1 4W COMPOSITION OR FILM RES 47K 5 1 4W COMPOSITION OR FILM RES 200 5 1 4W COMPOSITION OR FILM RES 680 5 1 4W COMPOSITION OR FILM RES 120K 5 1 4W COMPOSITION OR FILM RES 11K 5 1 4W COMPOS...

Страница 67: ...UBE LID GUARD TUBE BASE GUARD TUBE LID HANDLE LOCKNUT REL BD TO FASTENERS BRKT TO BD LUG ON SC 83 SC 120 4 LUG ON SC 120 4 REAR PANEL ASSEMBLY SOCKET SOLDERED ON SC 83 AND SC 120 4 SOCKET I C 28 PIN F...

Страница 68: ...M 1 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 69: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 70: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 71: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 72: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 73: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 74: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 75: ...ement considerations 2 22 N Noise currents caused by cable flexing 2 23 O Offset current verification 4 6 Operation 2 1 Optimizing CV measurement accuracy 3 3 Optional accessories 1 2 Ordering informa...

Страница 76: ...ing procedure 4 4 Typical CV curves 3 3 Typical test fixture connections 2 17 U Unpacking and inspection 1 2 W Warranty information 1 1 i 2 Artisan Technology Group Quality Instrumentation Guaranteed...

Страница 77: ...libration only Certificate of calibration required Data required attach any additional sheets as necessary Show a block diagram of your measurement system including all instruments connected whether p...

Страница 78: ...Keithley Instruments Inc 28775 Aurora Road Cleveland Ohio 44139 Printed in the U S A Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 79: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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