COULOMBS
ACCURACY
TEMPERATURE
(1 Year)
1,2
COEFFICIENT
5
½
DIGIT
18
°
–28
°
C
0
°
–18
°
C & 28
°
–50
°
C
RANGE
RESOLUTION
±
(%rdg+counts)
±
(%rdg+counts)/
°
C
2 nC
10 fC
0.4 + 5
0.04 + 3
20 nC
100 fC
0.4 + 5
0.04 + 1
200 nC
1 pC
0.4 + 5
0.04 + 1
2
µ
C
10 pC
0.4 + 5
0.04 + 1
Note:
1
Charge acquisition time must be <1000s, derate 1% for each
additional 10,000s.
2
When properly zeroed, 5
½
digit, 1 PLC (power line cycle), median
filter on, digital filter = 10 readings.
INPUT BIAS CURRENT:
<4fA at T
CAL
. Temperature coefficient = 0.5fA/
°
C.
OHMS: Normal Method
TEMPERATURE
COEFFICIENT
ACCURACY
1
(10–100% Range)
5
½
DIGIT
(10–100% Range)
0
°
–18
°
C &
RESO-
18
°
–28
°
C (1 Yr.)
28
°
–50
°
C
TEST
AMPS
RANGE LUTION
±
(% rdg+counts)
±
(% rdg+counts) VOLTS RANGE
2 M
Ω
10
Ω
0.125 + 1
0.01 + 1
40 V
200
µ
A
20 M
Ω
100
Ω
0.125 + 1
0.01 + 1
40 V
20
µ
A
200 M
Ω
1 k
Ω
0.15 + 1
0.015 + 1
40 V
2
µ
A
2 G
Ω
10 k
Ω
0.225 + 1
0.035 + 1
40 V
200 nA
20 G
Ω
100 k
Ω
0.225 + 1
0.035 + 1
40 V
20 nA
200 G
Ω
1 M
Ω
0.35 + 1
0.110 + 1
40 V
2 nA
2 T
Ω
10 M
Ω
0.35 + 1
0.110 + 1
400 V
2 nA
20 T
Ω
100 M
Ω
1.025 + 1
0.105 + 1
400 V
200 pA
200 T
Ω
1 G
Ω
1.15 + 1
0.125 + 1
400 V
20 pA
Note:
1
Specifications are for auto V-source ohms, when properly zeroed, 5
½
digit, 1 PLC, median filter on, digital filter = 10
readings. If user selectable voltage is required, use manual mode. Manual mode displays resistance (up to 10
18
Ω
) calculated
from measured current. Accuracy is equal to accuracy of V-source plus accuracy of selected Amps range.
PREAMP SETTLING TIME:
Add voltage source settling time to preamp settling time in Amps specification.
OHMS: Alternating Polarity Method
Using Keithley 8002A or 8009 fixture
REPEATABILITY:
∆
I
BG
* R/V
ALT
+ 0.1% (1
σ
) (instrument temp. constant
±
1
°
C).
ACCURACY: (V
SRC
Err + I
MEAS
Err * R)/V
ALT
where:
∆
I
BG
is a measured, typical background current noise from the sample and fixture over the measurement time
programmed, under normal measurement conditions
(1 PLC, same range, filters off, etc.)
V
ALT
is the alternating polarity voltage used
V
SRC
Err is the accuracy (in volts) of the voltage source using V
ALT
as the setting
I
MEAS
Err is the accuracy (in amps) of the ammeter using V
ALT
/R as the rdg
With conditions:
∆
I
BG
* R/V
ALT
< 10%; capacitance of sample <10nF in parallel with measured R
Note that the measured resistance is affected by the series and parallel resistance of the test fixture.
Specifications 4-3
COULOMBS
Содержание 6517A
Страница 12: ...1 FrontPanelOperation...
Страница 36: ...2 MeasurementOptions...
Страница 67: ...3 RemoteOperation...
Страница 96: ...4 SpecsandAccessories...
