7. Technical specifications
7.1
Specifications
All specifications listed in the following table unless otherwise noted apply for calibration conditions
at 20°C and 101.325 kPa absolute pressure with air. The product is horizontally mounted at the time
of calibration.
Value
Unit
Full-scale flow range
See table 6.1
SLPM
Accuracy
±(1.5+0.20FS)
%
Repeatability
0.5
%
Turn-down ratio
100:1
Working temperature
-20 ~ 60
°C
Maximum pressure
1.5
MPa
Humidity
<95, no condensation
%RH
Power supply
12 ~ 24 (50 mA)
Vdc
Output*
RS485 Modbus half-duplex / 4 ~ 20 mA
MENU access
3 key
–
front face keyboard/digital
Display
Instant flow rate,
Accumulated or totalized flow rate
Mechanical connection
NPT or customized
Hazardous rating
Ex ia IIC T4 Gb /
Class I, Div. 1, zone 0, Group A, T4
Protection
IP66
Storage temperature
-20 ~ 70
°C
Reference conditions
20°C, 101.325 kPa, air
Fluid compatibility
Non-corrosive
CE
EN61326-1; -2; -3
MF5003
MF5006
MF5008
MF5012
MF5019
Maximum overflow
30
120
200
450
1200
SLPM
Maximum flow change
4
15
30
60
150
SLPM/sec
Note:
For other features or specifications not listed, please contact the manufacturer.
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MF5000 User Manual