9.
Specimen tilting is limited by working distance and specimen diameter.
The IR
chamber-scope must be used for sample tilting and Z adjustment to verify that safe
clearance with detectors, etc. is maintained.
Safe clearance is at least 5mm distance
on LCD monitor. The following table shows the typical Allowable Tilt Range for
samples up to 32 mm diameter. Larger samples are more restricted. This assumes no
part of sample is higher than indicated Working Distance.
Working Distance
Allowable Tilt Range
10 mm
0 to 15 degrees
15 mm
-10 to 15 degrees
20 mm
-10 to 35 degrees
40 mm
-10 to 65 degrees
48 mm (max W.D.)
-10 to 70 degrees
Note: The Backscatter detector and SE detector are very delicate and will be
damaged by any contact with a sample (>$3000 to repair). You must be extremely
careful not to contact these when observing your sample!!!
10.
Turn on the IR chamber-scope, if off, using the switch (button) on the control box and
a switch on CRT monitor and adjust illumination as needed.
Always use chamber-
scope for tilt and Z adjustment of sample during operation. Note: The chamber-
scope illumination does not interfere with SEI but must be turned off for BEIW
modes and EDS operation.
11.
Carefully (slowly) slide the stage drawer closed, while verifying safe clearance of
sample on chamber-scope.
Press
EVAC
button on the Specimen exchange dialog
box. Hold the door closed until pumping starts (it takes a few seconds).
12.
In about 1.5 minutes, the HT icon turns to
HT ready
.
Wait at least 2 more additional minutes!!
13.
Select the desired accelerating voltage (up to 30 kV)
.
Double click on new value to change setting.
14.
Set the working distance (similar to previous step). Just select the working distance
you preset the sample for (usually 10 mm).
SE
detector
Conical
objective lens
Backscatter
detector