- 8 -
- 8 -
■
PDA-20, 40, 80W
O-ring
PDA-20W
S-135
PDA-40W
172
×
3
PDA-80W
194.5
×
2
*
No
Name
Q'ty
Material
Remarks
16
Slider pin
1
SUS304
17
O-ring
2
FKM
*
18
Cap nut
4
SS
Fluor coat
19
Plate washer
4
SS
Fluor coat
20
O-ring
1
FKM
S-10
21
Stopper
1
SUS304
22
Spacer A
1
PVC
23
Electrode holder
2
SUS304
24
O-ring
2
FKM
P-3
25
Hex screw
2
SS
M3
×
12
28
Hex bolt
6
SS
29
Spring washer
6
SS
M4
26
Bellows plate
1
SUS304
27
Bellows flange
2
SUS304
No
Name
Q'ty
Material
Remarks
1
Bellows unit
1
PTFE, PFA
2
Cylinder
1
A6063
Fluor coat
3
Plate
1
A5052
Fluor coat
4
OUT guide
1
SUS304
5
Slider
1
PPS
6
Stud bolt
4
SUS304
PTFE coat
7
Valve A
2
SUS304
8
Pin nut
1
SUS304
9
Pin
1
SUS304
10
Spring A
1
SUS304WPB
11
Spring B
2
SUS304WPB
12
Cover
1
A5052
Fluor coat
13
Spacer
1
PVC
14
IN guide
1
SUS304
15
Valve seat
2
FKM
6. Structure and names of parts