Instrutech CVM211 Скачать руководство пользователя страница 17

 

 

Instruction Manual 

InstruTech CVM-211 "

Stinger

" Convection Vacuum Gauge Module

 

 

 

 

 

InstruTech, Inc 

 page 17  

 

 

 

 

Table 3 - Displayed Pressure Readings vs Pressure, for Selected Gases 

 

N2

Ar

He

O2

CO2

Kr

Freon12 Freon22

D2

Ne

CH4

0

mTorr

0.0

0.0

0.0

0.0

0.0

0.0

0.0

0.0

0.0

0.0

0.0

0.1

mTorr

0.1

0.1

0.1

0.1

0.1

0.1

0.1

0.1

0.1

0.1

0.1

0.2

mTorr

0.2

0.2

0.2

0.2

0.2

0.2

0.2

0.2

0.2

0.2

0.2

0.5

mTorr

0.5

0.5

0.5

0.5

0.5

0.3

0.5

0.5

0.5

0.5

0.5

1

mTorr

1.0

0.7

0.8

1.0

1.1

0.4

1.5

1.5

1.3

0.7

1.7

2

mTorr

2.0

1.4

1.6

2.0

2.3

1.0

3.1

3.1

2.4

1.5

3.3

5

mTorr

5.0

3.3

4.0

5.0

4.4

2.3

7.6

7.0

6.0

3.5

7.7

10

mTorr

10.0

6.6

8.1

9.7

11.0

4.8

14.7

13.5

12.1

7.1

15.3

20

mTorr

20.0

13.1

16.1

19.8

22.2

9.5

29.9

27.2

24.3

14.1

30.4

50

mTorr

50.0

32.4

40.5

49.2

54.9

23.5

72.5

69.0

60.0

34.8

77.2

100

mTorr

100

64.3

82.0

97.2

107

46.8

143

136

121

70.0

159

200

mTorr

200

126

165

194

210

91.1

275

262

250

141

315

500

mTorr

500

312

435

486

489

217

611

594

687

359

781

1

Torr

1.00

600

940

970

950

400

1.05

1.04

1.55

745

1.60

2

Torr

2.00

1.14

2.22

1.94

1.71

700

1.62

1.66

4.13

1.59

3.33

5

Torr

5.00

2.45

13.5

4.98

3.34

1.28

2.45

2.62

246

5.24

7.53

10

Torr

10.0

4.00

OP

10.3

4.97

1.78

2.96

3.39

OP

21.5

27.9

20

Torr

20.0

5.80

OP

22.3

6.59

2.29

3.32

3.72

OP

584

355

50

Torr

50.0

7.85

OP

77.6

8.22

2.57

3.79

4.14

OP

OP

842

100

Torr

100

8.83

OP

209

9.25

2.74

4.68

4.91

OP

OP

OP

200

Torr

200

9.79

OP

295

12.3

3.32

5.99

6.42

OP

OP

OP

300

Torr

300

11.3

OP

380

16.9

3.59

6.89

7.52

OP

OP

OP

400

Torr

400

13.5

OP

485

22.4

3.94

7.63

8.42

OP

OP

OP

500

Torr

500

16.1

OP

604

28.7

4.21

8.28

9.21

OP

OP

OP

600

Torr

600

18.8

OP

730

36.4

4.44

8.86

9.95

OP

OP

OP

700

Torr

700

21.8

OP

859

46.1

4.65

9.42

10.7

OP

OP

OP

760

Torr

760

23.7

OP

941

53.9

4.75

9.76

11.1

OP

OP

OP

800

Torr

800

25.1

OP

997

59.4

4.84

9.95

11.4

OP

OP

OP

900

Torr

900

28.5

OP

OP

79.5

4.99

10.5

12.0

OP

OP

OP

1000

Torr

1000

32.5

OP

OP

111

5.08

11.1

12.7

OP

OP

OP

Notes:
1)  OP = overpressure
2)  Display auto-ranges between Torr and mTorr at 1Torr
      Readings in normal font are in Torr.  

Readings in blue italics are in mTorr

.

True Total 

Pressure

 

 
 
 
 
 
 
 
 
 
 
 
 
 

Содержание CVM211

Страница 1: ...11 S ST TI IN NG GE ER R Convection Vacuum Gauge Module User s Manual Revision 1 05 Sept 25 2007 1475 S Fordham St Longmont CO 80503 Phone 303 651 0551 Fax 303 678 1754 E mail info instrutechinc com w...

Страница 2: ...4 Gases other than N2 5 Flammable Explosive Gases 5 Installation Mechanical 5 Position 5 Vibrations 5 Fittings 5 Electrical 6 Connector Pinouts 6 Setup Operation User Interface Basics 7 Setting up th...

Страница 3: ...Torr to 1 0 mTorr 1 digit LED from 0 9 mTorr to 0 1 mTorr materials exposed to gases gold plated tungsten 304 316 stainless steel glass nickel Teflon internal volume 26 cm3 1 589 in 3 internal surface...

Страница 4: ...parts are specified by Instrutech Inc Unauthorized substitutions or non qualified parts may result in fire electric shock or other hazards To reduce the risk of fire or electric shock do not expose t...

Страница 5: ...ure difference error between your process and the gauge and cause a delay in response to pressure changes Mounting the CVM too close to a gas source will also cause errors in the readings Don t mount...

Страница 6: ...practice is to remove power from any cable prior to connecting or disconnecting it The InstruTech CVM 211 will directly replace GP Mini Convectron modules that have a 9 pin D connector and you can us...

Страница 7: ...to save and go to the next step 6 The readout will display 000 to indicate the unit is in the zero adjust mode To properly set zero the gauge must be evacuated to a pressure below 10 4 Torr Factory de...

Страница 8: ...il due to chemical reaction are generally not salvageable Sensors that fail due to coating may possibly be restored by cleaning See Appendix C for a more complete discussion of contamination and clean...

Страница 9: ...hrough Friday at 303 651 0551 Or e mail us at info instrutechinc com If it becomes necessary to return the unit to InstruTech for service or calibration please call or e mail us for a return authoriza...

Страница 10: ...ceed to next step without changing the zero value press select Readout displays current span value Factory default 760 Torr Is system backfilled with air or N2 to some known pressure above 400 Torr Or...

Страница 11: ...of 0 375 to 5 659 VDC for 0 to 1000 Torr of N2 roughly in the shape of an S curve as shown at right GP adopted the same output curve for most of their Mini Convectron modules and controllers with non...

Страница 12: ...r as thermal conductivity goes but even these two gases will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere using N2 you may see readings ch...

Страница 13: ...essure is 100 Torr the gauge will read 100 Torr If the gas is Ar when the true pressure is 100 Torr the gauge will read only 10 Torr If you are backfilling your vacuum system with Ar when your system...

Страница 14: ...70 1 3150 1 2910 1 2650 1 0020 1 3920 500 mTorr 1 6833 1 3860 1 5890 1 6640 1 6680 1 1940 1 8260 1 8050 1 9140 1 4690 2 0140 1 Torr 2 2168 1 8180 2 1640 2 1950 2 1720 1 5360 2 2570 2 2470 2 6030 1 976...

Страница 15: ...288 5 233 4 845 5 210 5 220 5 616 5 201 5 522 5 0000 5 699 5 389 6 130 5 697 5 524 5 107 5 389 5 418 7 391 5 719 5 877 10 0000 6 000 5 602 8 041 6 013 5 696 5 250 5 471 5 530 8 041 6 332 6 446 20 0000...

Страница 16: ...auge Module InstruTech Inc page 16 Log Linear Analog Output Voltage vs Pressure 0 1 2 3 4 5 6 7 8 9 0 0001 0 001 0 01 0 1 1 10 100 1000 Pressure Torr Output Signal Volts This is a plot of the formulas...

Страница 17: ...87 359 781 1 Torr 1 00 600 940 970 950 400 1 05 1 04 1 55 745 1 60 2 Torr 2 00 1 14 2 22 1 94 1 71 700 1 62 1 66 4 13 1 59 3 33 5 Torr 5 00 2 45 13 5 4 98 3 34 1 28 2 45 2 62 246 5 24 7 53 10 Torr 10...

Страница 18: ...s steel or ceramic to the gases There is no material that is universally chemical resistant your choice of vacuum gauge as well as all other vacuum components should take into consideration the potent...

Страница 19: ...s such as pump oil However depending on your particular contamination you may need to use a more aggressive solvent Cleaning procedure 1 With the gauge port up pour your cleaning solution into the gau...

Страница 20: ...Furthermore the warranty does not apply to products that have been contaminated or when the product or part is damaged during the warranty period due to causes other than ordinary wear and tear to th...

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