Inficon IC6, Руководство по эксплуатации

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IC6 Operating Manual
of critical errors. Assuming the error has been remedied, the process can be
continued where it left off by pressing START. Pressing RESET will abandon
the run.
3.4.3 Pre-conditioning a Layer
It may be desirable to prepare a layer for deposition while the previous layer is in
progress. Pressing START while a layer is running will begin the pre-deposition
states of the next layer. However, there are certain restrictions and some
precautions should be taken.
1
The next layer cannot use the same source as the current layer. Pressing
START will cause a source conflict and the process will STOP. If
pre-conditioning is desired, be sure the sources defined in the two consecutive
layers are different and that Max Concurrent Layer in General/Process is set to
2 or more.
2
The next layer will enter DEPOSIT while the current layer is in DEPOSIT unless
a Soak Hold is activated. A Soak Hold will hold the pre-deposition at the chosen
Soak Power level until ready to proceed. To set up a Soak Hold, see
section
9.4, THEN Action Definitions, on page 9-16 . or enable using remote
communication, see section 10.4.33, Remote General Action, on page 10-49 .
NOTE: If a Soak Hold is not active and two layers attempt to enter DEPOSIT
using some of the same sensors, a STOP sensor conflict will occur.
3.4.4 Co-deposition
Co-deposition pertains strictly to depositing two layers at the same time and
correcting for any crosstalk due to material from one source arriving at the sensor
dedicated to the other source.
A co-deposition is defined on the Layer Definition page of the Process screen. Yes
is entered for the co-deposition parameter of the first layer to be co-deposited. This
layer is referred to as the primary layer. The primary and secondary layers must
both be defined before Yes is entered for the co-deposition parameter of the
primary layer. In co-deposition, when the primary layer reaches final thickness, the
secondary layer will also leave deposition. However, if the secondary layer reaches
final thickness first, the primary layer will continue until reaching its programmed
final thickness. There are two other parameters associated with co-deposition. The
first is ratio control. This controls the secondary layer’s rate at a percentage of the
primary layer’s desired rate. The second is cross talk, which compensates for
interference between the two depositions. See
section 6.4.1, Layer Parameters, on
page 6-3 and section 12.6, Determining Cross Talk Calibration For Co-Deposition,
on page 12-13 for details on programming these parameters.
If two layers are programmed for co-deposition, pressing START once will begin
both layers.