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Changing Specimens and/or Shutdown: 

1.

 

Click the 

HV OFF

 button in the upper left 

(Fig 16-A)

 

or on the beam control window 

(Fig 17-A)

2.

 

Click the 

AIR 

button in the upper right 

(Fig 16-B)

.  

3.

 

The Specimen Dimensions window will open 

(Fig 18)

.  

If you will be continuing, enter the dimensions of 

your next specimen.  

4.

 

If you are shutting down, Select Size=15mm and 

Height= Standard and click 

OK

.  The chamber will 

open in about 90 seconds. (you will see a 

“Processing to Air” message with stars that count 

down to opening)  

5.

 

Using gloves or forceps, remove your specimen. 

Change specimens now or leave sample holder in 

drawer away from dust if you are finished. 

6.

 

Close the Chamber door and click the 

EVAC

 button 

in the software 

(Fig 16-B) 

OR

 

at the front of the 

machine 

(Fig 20-A)

.

 

 

7.

 

When the system has fully evacuated, begin 

imaging again as before. You shouldn’t need to 

realign the machine, but you will need to re-

saturate the filament if you are continuing. 

8.

 

IF YOU ARE FINISHED: quit the PC-SEM Program. 

9.

 

If you get a request to save the stage history, say “No” 

10.

 

 Make sure that you sign out on the calendar.

 

11.

 

 Transfer your files using Dropbox 

NOT USB

 

12.

 

 Leave Computer ON and area clean

 

 

 

Figure 17. Beam Setup Window 

A- 

Figure 19. PC-SEM Shutdown 

Figure 20. PC-SEM Shutdown 

A- 

Figure 18. PC-SEM Control Buttons 

Figure 16.  

A                                                                                               B 

Содержание 3400-N

Страница 1: ...mple holder For multi holder insert with sample 1 facing blue pen mark in chamber 4 Close the chamber and hold it shut with your hand Press EVAC button on front of machine Fig 1 B Let go of chamber door when vacuum engages it Starting PC SEM 5 Click the PC SEM icon on the desktop There is no password 6 When the PC SEM finishes booting you will see the Specimen Dimensions window above Fig 2 Select ...

Страница 2: ...o use this panel to a Rotate the sample Fig 5 C b Tilt the sample Fig 5 D c Move the stage by increments to find and centre your features of interest Fig 5 E 14 For Multi Holder ONLY If you are using the multi holder click the Memory button Fig 5 F in the lower right corner of the stage tab This Pop up will appear a The 6 positions are programmed in the pop up window Fig 6 Choose Page 1 then choos...

Страница 3: ... to complete Fig 9 6 Click the AFS button Fig 8 E to auto saturate the filament so it emits a good electron flow It should deliver an emission current above 65 70uA Fig 8 F 7 Choose the Mechanical Aperture Fig 10 recommended for your sample and magnification see us You need a higher number smaller 3 4 for high magnification above 10 000 and a low number 1 2 for very low magnification below 2000 or...

Страница 4: ...efer to Align the Instrument Appendix 1 If you need to align the instrument do it first between 2000 5000x then repeat again at 2x desired magnification 5 Focusing your sample is a multi step process a Increase magnification on dial Fig 12 A slowly to desired level If the image moves it isn t properly aligned yet repeat alignment Adjust focus Fig 12 B contrast Fig 12 C and brightness Fig 12 D as n...

Страница 5: ...ge Fig 15 A 3 The Image window will display CAPT Fig 15 B in the upper left corner and the image is now frozen 4 To return to live viewing click Freeze RUN Fig 13 D and Fast again to reactivate the detector and move to a new spot Saving Images 1 Select the thumbnails of those images you wish to save see yellow Fig 15 A 2 Embed into image checkbox Fig 15 C will burn in annotations associated with i...

Страница 6: ...Change specimens now or leave sample holder in drawer away from dust if you are finished 6 Close the Chamber door and click the EVAC button in the software Fig 16 B OR at the front of the machine Fig 20 A 7 When the system has fully evacuated begin imaging again as before You shouldn t need to realign the machine but you will need to re saturate the filament if you are continuing 8 IF YOU ARE FINI...

Страница 7: ...llowing alignments Begin Beam Alignment Begin with a magnification of 1000x 5000x Once you complete the alignment at that zoom repeat this whole process a second time at twice your desired magnification Apply the KV and probe current settings desired for operation FIRST perform normal focus and stigmation operations without opening the align window The system must be relatively focused before atte...

Страница 8: ...first Fig A1 Beam Alignment Select Beam Align Tilt Fig A4 B Turn X and then Y stigmation knobs until maximum brightness is achieved Repeat on Beam Align Shift Fig A4 C Stigma Alignment If the beam has been running for awhile you may need to Degauss Fig A5 A the image before beginning for best results Stigma Align X Fig A4 C Adjust BOTH X and Y stigmation dials Fig 21 X Y to minimize rocking moveme...

Страница 9: ...to BSE mode now 5 Set vacuum to 30 50 Fig A6 Lower vacuum is more efficient at charge reduction as air molecules absorb some charge 6 NOW evacuate the chamber and switch to the test sample 7 Turn KV back ON You will need to focus on Slow 1 or Slow 2 mode Fast is too noisy to see anything 8 On the Image Tab adjust your BSE Gain setting Fig A7 to 3 or 4 until you see an image 9 COMP mode highlights ...

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