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HELIX CTI-CRYOGENICS On-Board FastRegen, Инструкция по программированию и эксплуатации, Страница: 44 / 108

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Programming and Operation

3-30 

P/N 8040406

C

HELIX  TECHNOLOGY  CORPORATION

-

TI

CRYOGENICS

Figure 3-26: On-Board Cryopump Fast Regeneration Cycle Example

START

Press REGEN

Press 1 To Start

REGEN OFF

CONFIRM START

PRESS 3

Press 3 To 

Confirm Start

The On-Board FastRegen Control Module is ready to start a Fast 
regeneration cycle.  

Regeneration is ready to start.  

DLY START 15.5 HRS.

A DELAY START has been programmed.  The On-Board 
FastRegen Control Module will wait 15.5 hours before the 
REGEN cycle begins.

WARM-UP 125K

The cryopump shuts OFF , the purge valve opens, and purging starts.  
Shows current second stage temperature (125K).  Cryopump turns 
back ON after purge gas check.  Heaters are turned ON and the 
arrays are warmed up.  Purge shuts OFF and pump sits for a short 
period of time (approximately 1 minute) to allow second stage gases to 
boil OFF.

Continued on page 3-31

Confirms the start of the Fast regeneration cycle.

NOTE: In the case of FastRegen Control Modules for Ion 
Implanters, several rough and purge cycles occur during the 
warmup phase.  These cycles help remove hydrogen gas which 
may be present in the cryopump.

Содержание CTI-CRYOGENICS On-Board FastRegen

Страница 1: ...eld Corporate Center Nine Hampshire Street Mansfield Massachusetts 02048 9171 Telephone 508 337 5000 C HELIX TECHNOLOGY CORPORATION TI CRYOGENICS On Board FastRegen Control Module Programming and Operation Instructions 8040406 Rev C 7 97 ...

Страница 2: ... written permission from CTI CRYOGENICS Helix Technology Corporation is strictly prohibited Any correspondence regarding this document should be forwarded to CTI CRYOGENICS Helix Technology Corporation Mansfield Corporate Center Engineering Services Department Nine Hampshire Street Mansfield Massachusetts 02048 9171 U S A Telephone 508 337 5000 FAX 508 337 5464 The following CTI CRYOGENICS Helix T...

Страница 3: ...ification 1 4 Section 2 System Power Before You Start 2 1 Starting the Cryopump 2 1 Shutting Down the Cryopump 2 1 Section 3 Programming and Operation Introduction 3 1 Normal Operation 3 1 MONITOR Function 3 1 Cryopump ON OFF and Second Stage Temperature 3 3 First and Second Stage Temperature and Auxiliary Thermocouple Pressure 3 3 First Stage Temperature in Kelvin 3 4 Second Stage Temperature in ...

Страница 4: ...se ROR 3 23 Rate of Rise ROR Cycles 3 24 Rough Valve Interlock 3 24 Power Failure Recovery 3 25 Power Failure Recovery Temperature 3 25 Performing a Fast or Full Regeneration Cycle 3 26 Fast Regeneration Cycle 3 26 Full Regeneration Cycle 3 26 REGEN Cycle Examples 3 27 SERVICE Function 3 32 Serial Number and Software Version 3 34 Network Identification Number 3 35 Elapsed Pump Time 3 35 Time Since...

Страница 5: ...ion 3 51 Cryopump ON OFF and Second Stage Temperature 3 51 Aux TC ON OFF and TC Pressure 3 51 Cryo TC ON OFF and TC Pressure 3 51 Rough Valve Open Closed 3 52 Purge Valve Open Closed 3 52 Relay 1 ON OFF and Auto Manual Control 3 52 Relay 2 ON OFF and Auto Manual Control 3 53 RELAYS Function 3 54 Select Relay 1 or 2 3 56 Current State of Relay ON OFF Auto Manual 3 57 Current Program for Automatic C...

Страница 6: ... D RS 232 Power Failure Recovery Messages Appendix E On Board Keypad Display Error Messages Figures Figure 1 1 On Board Keypad Display 1 2 Figure 1 2 On line Help Message Example 1 4 Figure 3 1 MONITOR Function Flowchart 3 2 Figure 3 2 ON OFF Status and Second Stage Temperature 3 3 Figure 3 3 First and Second Stage Temperature and Auxiliary Thermocouple Pressure 3 3 Figure 3 4 First Stage Temperat...

Страница 7: ... Number Screen 3 35 Figure 3 30 Elapsed Pump Time Display 3 35 Figure 3 31 Time Since Last Full Regeneration Display 3 36 Figure 3 32 Time Since Last Fast Regeneration Display 3 36 Figure 3 33 Password Screen Display 3 37 Figure 3 34 Lock Mode OFF Display 3 37 Figure 3 35 Parameter Lock ON Display 3 38 Figure 3 36 Zero Auxiliary Thermocouple Display 3 38 Figure 3 37 Zero Cryo Thermocouple Gauge Di...

Страница 8: ...igure 3 58 Delay Activation of Relay Display 3 61 Figure 4 1 On Board FastRegen Control Module Component Location 4 2 Tables Table 3 1 REGEN Function Parameters 3 12 Table 3 2 SERVICE Function Parameters 3 34 Table 3 3 CONTROL Function Parameters 3 46 Table 3 4 RELAYS Function Parameters 3 56 Table 3 5 On Board FastRegen Control Module Software Parameters 3 67 Table A 1 Customer Support Center Loc...

Страница 9: ...ing an easily learned sequence of keys Refer to Section 3 Programming and Operation for a complete description of programming and operation information of each On Board Module function Remote Operation Options A remote keypad display which mounts in a standard 19 inch electronics rack is available as an option The remote keypad display provides the same functionality of the Cryopump mounted device...

Страница 10: ...lphanumeric Display The alphanumeric display shows up to 16 alphanumeric characters of data entry Messages longer than 16 characters can be viewed by using the horizontal scroll display key Horizontal Scroll Display Keys The horizontal scroll display keys move the message to the left or right on the alphanumeric display when pressed These keys are typically used to display a message which is longe...

Страница 11: ...ming and operation Enter Command Key The enter key is used to accept numeric information which you have entered via the numeric keypad Function Keys The function keys allow you to select the software function in which programming or operation is desired Refer to Section 3 Programming and Operation for more information on software functions On line Help The on line HELP function provides you with a...

Страница 12: ...Section 3 Programming and Operation of this manual to identify the On Board Module serial number and the software version Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 TO STOP REGEN PRESS 0 THEN PRESS 2 TO CONFIRM PRESS NEXT TO MODIFY REGEN PROGRAM TO STOP REGEN NOTE After pressing the HELP key press the Next key to display the help message line by...

Страница 13: ...ig 5 Ensure that the nitrogen supply to the purge valve is between 40 80 psig Do not exceed 80 psig NOTE The On Board FastRegen Control Module comes programmed with the default values as shown in Table 3 1 6 Program the regeneration parameters to your particular values as described in Section 3 Programming and Operation or use the default regeneration values 7 Perform a Full regeneration cycle as ...

Страница 14: ... N 8040406 C HELIX TECHNOLOGY CORPORATION TI CRYOGENICS 7 Turn the On Board ON OFF switch located on the compressor to the OFF position 8 Turn the compressor ON OFF switch to the OFF position 9 Turn the roughing pump OFF ...

Страница 15: ...Make sure the gauge reading is within the specified range as discussed in the appropriate compressor manual CAUTION Refer to Appendix A and contact the local customer support center location whenever the helium supply gauge reading is not within the specified range MONITOR Function The MONITOR function allows you to observe the following On Board Cryopump system data ON OFF status of the On Board ...

Страница 16: ...3 1 MONITOR Function Flowchart MONITOR Cryopump ON OFF Second Stage Temp AUX TC Gauge Pressure ON OFF Cryo TC Gauge Pressure ON OFF Relay 1 ON OFF Auto Manual Control Relay 2 ON OFF Auto Manual Control HELP First Stage and Second Stage Temp and AUX TC Pressure First Stage Temp Second Stage Temp ...

Страница 17: ...splayed First and Second Stage Temperature and Auxiliary Thermocouple Pressure The second parameter of the MONITOR function displays the On Board Cryopump first and second stage temperature degrees Kelvin and the vacuum pressure of the auxiliary thermocouple gauge microns as shown in Figure 3 3 The display indicates pressures between 0 999 microns The display indicates OFF when the thermocouple ga...

Страница 18: ...Figure 3 4 First Stage Temperature Second Stage Temperature in Kelvin The fourth parameter of the MONITOR function displays the On Board Cryopump second stage temperature degrees Kelvin as shown in Figure 3 5 Figure 3 5 Second Stage Temperature Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 1ST STG 65K Last Next Clear MONITOR REGEN SERVICE CONTROL R...

Страница 19: ...unction displays the cryopump thermocouple gauge pressure in microns when turned ON and indicates when the gauge is turned OFF if the cryopump is equipped with a thermocouple gauge Refer to Figure 3 7 The display indicates pressures between 0 999 microns Figure 3 7 Cryo Thermocouple Gauge Pressure Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 AUX T...

Страница 20: ...nction displays the ON OFF status of Relay 2 and whether Relay 2 is in automatic or manual control Refer to Figure 3 9 Figure 3 9 Relay 2 Automatic or Manual Control Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 RLY 1 ON AUTO Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 RLY 1 ON MANUAL Last Next Cl...

Страница 21: ...ontact the local CTI CRYOGENICS customer support center if the letters SHO or OPN are displayed 2 Press the Next key The first and second stage temperatures are displayed in degrees Kelvin and the auxiliary thermocouple gauge pressure is displayed in microns 3 Press the Next key The first stage temperature is displayed in degrees Kelvin 4 Press the Next key The second stage temperature is displaye...

Страница 22: ... in less than an hour in many cases One of the key process steps in a Fast regeneration cycle is the removal of the condensed gas by means of the roughing pump It is important that the condensed gas be removed quickly as the pump warms up and that a certain minimum base pressure in the cryopump be achieved quickly Because of these requirements it is necessary that cryopumps that share a common rou...

Страница 23: ... FastRegen Control Module allows you to reprogram the settings within limits This is normally done prior to the start of a regeneration cycle The On Board FastRegen Control Module also allows you to delay that start and completion of regeneration cycle This feature is desirable for example when you want to regenerate and start up your cryopump system during a week end shutdown You can reset the RE...

Страница 24: ...TI CRYOGENICS Figure 3 10 Fast Regeneration Cycle Function Flowchart REGEN HELP REGEN Start Delay Start Warmup of Cryopump Warmup Dwell Purge OFF Fast Rough Test Repurge Rough out to Base Pressure Begin Cooldown Maintain Pump at or Below Base Pressure REGEN Complete Pass Fail ...

Страница 25: ...X TECHNOLOGY CORPORATION TI CRYOGENICS Figure 3 11 Full Regeneration Cycle Function Flowchart REGEN HELP REGEN Start Delay Start Warmup of Cryopump Extended Purge Rough out to Base Pressure Begin Cooldown REGEN Complete Rate of Rise Test ROR Pass Delay Restart Fail Delay Restart of Cryopump ON OFF ...

Страница 26: ... ON OFF Delay Start 0 0 999 9 hours X X Delay Restart 0 0 999 9 hours X Fast Rough Test sputter 150 seconds 10 999 seconds X Fast Rough Test implanter 500 seconds 10 999 seconds X Extended Purge 10 minutes 0 9999 minutes X Repurge 10 minutes 0 9999 minutes X Repurge Cycles 20 0 20 cycles X Base Pressure 50 microns 25 200 microns X X Rate of Rise ROR 10 microns minute 1 100 microns minute X ROR Cyc...

Страница 27: ...sages are shown in Figure 3 12 Figure 3 12 REGEN ON OFF Display Delay Start The second parameter of the REGEN function allows you to delay the start of either a Fast or Full regeneration cycle You simply enter the amount of delay time as shown in Figure 3 13 and the On Board Cryopump waits that amount of time before starting the regeneration cycle you selected Figure 3 13 Delay Start of Regenerati...

Страница 28: ...from the cryopump during a Fast regeneration as shown in Figure 3 15 If during the rough test the pressure does not drop below 1000 microns before the fast rough time has expired then the cryopump will automatically go into a repurge cycle NOTE In the case of implanters the pump typically will not contain liquid cryogens and therefore will not have to repurge to boil off the liquid If an implanter...

Страница 29: ... in Figure 3 16 Figure 3 16 Extended Purge Display Repurge The sixth parameter of the REGEN function allows you to establish the repurge time in the event of repurge as shown in Figure 3 17 A repurge occurs during Full regeneration when the roughing pressure fails to decrease at a rate of at least 2 per minute Figure 3 17 Repurge Display Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo...

Страница 30: ...aborted after this limit is reached Figure 3 18 Repurge Cycles Display Base Pressure The eighth parameter of the REGEN function allows you to establish the base pressure to be reached when roughing a cryopump during either a Fast or Full regeneration The Base Pressure display is shown in Figure 3 19 Figure 3 19 Base Pressure Display Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON B...

Страница 31: ...y is shown in Figure 3 20 Figure 3 20 Rate of Rise Display ROR Cycles The tenth parameter of the REGEN function allows you to establish the number of times the ROR test can be performed before the Full regeneration cycle is aborted The ROR Cycles display is shown in Figure 3 21 Figure 3 21 ROR Cycles Display Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 ...

Страница 32: ...er Fail Recovery The twelfth parameter of the REGEN function allows the On Board cryopump to automatically perform a REGEN cycle or to cool down if below the power failure recovery temperature after a power failure has occurred as shown in Figure 3 23 There are three settings available to you 0 Power Fail OFF 1 Power Fail ON 2 Power Fail Cool NOTE If Power Fail Cool is selected and the power failu...

Страница 33: ... a temperature setpoint which the On Board Cryopump uses to decide whether to cool down or to perform a Full regeneration cycle after a power failure has occurred and power is restored Refer to Figure 3 24 Figure 3 24 Power Fail Recovery Temperature Display Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 POWER FAIL ON Last Next Clear MONITOR REGEN SE...

Страница 34: ...tatus is displayed 2 Press 0 to abort a regeneration cycle 3 Press 2 to confirm the end of a regeneration cycle Delay Start 1 Press the REGEN key on the keypad display The current REGEN status is displayed 2 Press the Next key The current delay start time value is displayed in hours 3 Press the Enter key The current value is underlined and ready to accept a new value 4 Press the numeral keys for t...

Страница 35: ...you to enter the new value 5 Press the Enter key Delay restart programming is complete 6 Press the MONITOR key The On Board microprocessor will monitor system operation Fast Rough Test 1 Press the REGEN key on the keypad display The current REGEN status is displayed 2 Press the Next key until the current fast rough test value is displayed in seconds 3 Press the Enter key The current value is under...

Страница 36: ...e MONITOR key The On Board microprocessor will monitor system operation Repurge 1 Press the REGEN key on the keypad display The current REGEN status is displayed 2 Press the Next key until the repurge value is displayed in minutes 3 Press the Enter key The current value is underlined and ready to accept a new value 4 Press the numeral keys for the desired repurge time For example 1 5 and 0 for 15 ...

Страница 37: ...played in microns 3 Press the Enter key The current value is underlined and ready to accept a new value 4 Press the numeral keys for the desired base pressure For example 3 5 for 35 The range of values is 25 200 microns NOTE The Clear key may be pressed if incorrect data has been entered The On Board software allows you to enter the new value 5 Press the Enter key Base pressure programming is comp...

Страница 38: ... you to enter the new value 5 Press the Enter key ROR cycle programming is complete 6 Press the MONITOR key The On Board microprocessor will monitor system operation Rough Valve Interlock 1 Press the REGEN key on the keypad display The current REGEN status is displayed 2 Press the Next key until the current state for rough valve interlock is displayed NOTE The rough valve interlock must be OFF whe...

Страница 39: ...s is displayed 2 Press the Next key until the current power failure recovery temper ature is displayed 3 Press the Enter key The current value is underlined and ready to accept a new value 4 Press the numeral keys for the desired recovery temperature For example 2 and 5 for 25K The range of values is 10 80K NOTE The Clear key may be pressed if incorrect data has been entered The On Board software ...

Страница 40: ...unction parameters to your desired values before attempting to perform a Fast or Full regeneration cycle Fast Regeneration Cycle 1 Press the REGEN key on the keypad display The current REGEN status is displayed 2 Press 1 to initiate a regeneration cycle 3 Press 3 to confirm the start of a Fast regeneration cycle A Fast regeneration cycle has been initiated The On Board FastRegen Control Module per...

Страница 41: ...ation is ready to start DLY START 15 5 HRS A DELAY START has been programmed The On Board FastRegen Control Module will wait 15 5 hours before the REGEN cycle begins WARM UP 125K 310K EXTD PURGE 5M The cryopump shuts OFF the purge valve opens and purging begins The display shows second stage temperature 125K and the target temperature 310K Heaters are turned ON and the arrays are warmed up to 310K...

Страница 42: ...cond reading in 30 seconds On Board FastRegen Control Module calculates ROR pressure increase in µ minute If ROR is less than programmed value the ROR test passes If ROR is more than programmed value the ROR test is repeated The display indicates the number of ROR test cycles 3 current ROR value 124µ µ and the programmed ROR value 10µ µ If ROR test is repeated Rough valve opens Cryopump is roughed...

Страница 43: ...lls the cryopump with purge gas and waits the programmed DELAY RESTART time The cryopump is roughed out The ROR test is repeated The cryopump cools down REGEN COMPLETE DLY RESTART 20 5 HRS COOLDOWN 235K 17K STOP REGEN The cryopump turns ON after successful completion of the ROR test During cooldown mode the display indicates real time temperature 235K and the base temperature 17K When the cryopump...

Страница 44: ...it 15 5 hours before the REGEN cycle begins WARM UP 125K The cryopump shuts OFF the purge valve opens and purging starts Shows current second stage temperature 125K Cryopump turns back ON after purge gas check Heaters are turned ON and the arrays are warmed up Purge shuts OFF and pump sits for a short period of time approximately 1 minute to allow second stage gases to boil OFF Continued on page 3...

Страница 45: ...essure does not drop below 1000 microns before the fast rough test time has expired the pump will automatically go into a repurge phase Shows the time remaining for the purge cycle The pump returns to the purge OFF and sit phase NOTE You cannot change the repurge parameter The heaters are OFF and the rough valve is closed During cooldown the display shows real time temperature 123K and the base te...

Страница 46: ...FastRegen Control Module SERVICE function allows you to access cryopump identification information elapsed pump times and establish password protection as shown in Figure 3 27 The default and range of SERVICE function parameters are listed in Table 3 2 An explanation of each parameter is provided on the following pages ...

Страница 47: ...isplay Time Since Last Full Regeneration Display Cryopump Serial Number and Module Software Version Display System Total Operating Hours Create Password Lock Mode ON OFF Parameter Lock ON OFF Zero Auxiliary Thermocouple Zero Cryo Thermocouple First Stage Control Temperature Display Network ID Number Can only be completed if a password is created Display Time Since Last Fast Regeneration ...

Страница 48: ...egen Control Module NOTE Press the key to display the entire software version number Figure 3 28 Serial Number and Software Version Display Table 3 2 SERVICE Function Parameters SERVICE Parameter Default Value Range of Values Serial Number Software Version Net ID 0 0 9 Elapsed Pump Time Hours Time Since Last Full Regeneration Hours Time Since Last Fast Regeneration Hours Password 0 0 32 767 Lock M...

Страница 49: ...hown in Figure 3 29 indicates that the network rotary switch on the On Board FastRegen Control Module is set to position 3 Figure 3 29 Network Identification Number Screen Elapsed Pump Time The third parameter of the SERVICE function allows you to display the total number of On Board Cryopump operating hours as shown in Figure 3 30 NOTE The clock cannot be reset Figure 3 30 Elapsed Pump Time Displ...

Страница 50: ...ce Last Full Regeneration Display Time Since Last Fast Regeneration The fifth parameter of the SERVICE function allows you to display the total number of hours since the last Fast regeneration cycle was performed as shown in Figure 3 32 The clock is automatically reset to zero upon the completion of the last Fast regeneration cycle Figure 3 32 Time Since Last Fast Regeneration Display Last Next Cl...

Страница 51: ... the password is forgotten A master password can be used to clear the original password Figure 3 33 Password Screen Display Lock Mode The seventh parameter of the SERVICE function prevents an unauthorized user from accessing the REGEN CONTROL or RELAYS functions when lock mode is ON A LOCKED OUT message is displayed when the REGEN CONTROL or RELAYS keys are pressed The Lock Mode OFF screen is show...

Страница 52: ...ary Thermocouple The ninth parameter of the SERVICE function as shown in Figure 3 36 resets the auxiliary thermocouple gauge to zero The auxiliary thermocouple gauge reading is displayed until the gauge is set to zero NOTE The auxiliary thermocouple gauge must be turned ON and under a vacuum of less than 10 4 torr less than 1 micron before this parameter can be used Any attempt to zero the gauge a...

Страница 53: ...ed Any attempt to zero the gauge at a pressure above 30 microns or when the gauge is turned OFF results in a calibration failure Figure 3 37 Zero Cryo Thermocouple Gauge Display First Stage Temperature Control The eleventh and final parameter of the SERVICE function allows the first stage temperature control of the cryopump to be turned ON or OFF The first stage temperature setting is displayed as...

Страница 54: ...er and software version information are displayed 2 Press the Next key The Net ID number is displayed 3 Press the MONITOR key The On Board microprocessor will monitor system operation Elapsed Pump Time 1 Press the SERVICE key on the keypad display The serial number and software version information are displayed 2 Press the Next key until the Pump Hours are displayed 3 Press the MONITOR key The On ...

Страница 55: ...nderlined and ready to accept a new value 5 Press the numeral keys for the desired password The range of values is 0 32767 6 Press the Enter button 7 Press the MONITOR key The On Board microprocessor will monitor system operation NOTE Refer to Appendix A and contact the local customer support center if the password is forgotten A master password can be used to access the original password Lock Mod...

Страница 56: ...ro Auxiliary Thermocouple parameter cannot be accessed unless a password has been entered NOTE The auxiliary thermocouple gauge must be turned ON and under a vacuum of less than 10 4 torr less than 1 micron before this procedure can be used Any attempt to zero the gauge at a pressure above 30 microns or when the gauge is turned OFF results in a calibration failure 1 Press the SERVICE key on the ke...

Страница 57: ...e password and press Enter 4 Press the Next key until Zero Cryo TC is displayed 5 Press the Enter key The cryo thermocouple pressure is displayed until zero is reached After approximately 1 minute Complete will be displayed 6 Press the MONITOR key The On Board microprocessor will monitor system operation First Stage Temperature Control NOTE The First Stage Temperature Control parameter cannot be a...

Страница 58: ...en Control Module allows you to turn the On Board Cryopump plus selected gauges valves and relays ON or OFF These functions can be used during manual regeneration and system diagnosis The CONTROL function parameters are shown in Figure 3 39 and described on the following pages The default setting and range of CONTROL parameters are provided in Table 3 3 ...

Страница 59: ...ENICS Figure 3 39 CONTROL Function Flowchart CONTROL HELP Display Cryopump ON OFF and Second Stage Temp Display Aux TC ON OFF and TC Pressure Display Rough Valve Open Closed Display Purge Valve Open Closed Display Relay 1 ON OFF Auto Manual Control Display Relay 2 ON OFF Auto Manual Control Display Cryo TC ON OFF and TC Pressure ...

Страница 60: ... Figure 3 40 Cryopump ON OFF and Second Stage Temperature Display Table 3 3 CONTROL Function Parameters CONTROL Parameter Default Value Range of Values Cryopump ON OFF OFF ON OFF Aux TC ON OFF OFF ON OFF Cryo TC ON OFF OFF ON OFF Rough Valve Open Closed Closed Open Closed Purge Valve Open Closed Closed Open Closed Relay 1 ON OFF and Auto Manual Control OFF Manual ON OFF Auto Manual Relay 2 ON OFF ...

Страница 61: ... in Figure 3 42 NOTE The TC INTERLOCK message appears and the Cryo TC Gauge will not turn ON when the second stage temperature is above 20K The CRYO TC Gauge turns OFF automatically if the temperature goes above 20K If the temperature is above 20K the Cryo TC Gauge can only be turned ON if the purge and roughing valves have been opened for regeneration Figure 3 42 Cryo TC ON OFF and TC Pressure Di...

Страница 62: ... cryopump arrays A message is dis played on the keypad display warning you about this potential problem The fourth parameter of the CONTROL function allows you to open or close the rough valve as shown in Figure 3 43 Figure 3 43 Rough Valve Open Closed Display Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 ROUGH V OPEN Last Next Clear MONITOR REGEN ...

Страница 63: ...ays A message is displayed on the keypad display warning you about this potential problem The fifth parameter of the CONTROL function allows you to open or close the purge valve as shown in Figure 3 44 Figure 3 44 Purge Valve Open Closed Display Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 PURGE V OPEN Last Next Clear MONITOR REGEN SERVICE CONTROL...

Страница 64: ...nction allows you to turn relay 2 ON or OFF and select between automatic or manual control as shown in Figure 3 46 Manual control is typically used during system diagnosis when manual activation of relay 2 is required Automatic control is used to automatically turn relay 2 ON or OFF depending upon user specified relay programming You cannot turn relay 2 ON or OFF when it is in automatic control Fi...

Страница 65: ...F 3 Press the MONITOR key The On Board microprocessor will monitor system operation Aux TC ON OFF and TC Pressure 1 Press the CONTROL key on the keypad display The ON OFF status and the second stage temperature of the cryopump are displayed 2 Press the Next key The Aux TC pressure is displayed in microns 3 Press 1 to turn the Aux TC ON or press 0 to turn the Aux TC OFF 4 Press the MONITOR key The ...

Страница 66: ...stage temperature of the cryopump are displayed 2 Press the Next key until the current purge valve status is displayed 3 Press 1 to open the purge valve or press 0 to close the purge valve 4 Press the MONITOR key The On Board microprocessor will monitor system operation Relay 1 ON OFF and Auto Manual Control 1 Press the CONTROL key on the keypad display The ON OFF status and the second stage tempe...

Страница 67: ...play The ON OFF status and the second stage temperature of the cryopump are displayed 2 Press the Next key until the current status and mode for relay 2 are displayed 3 Press one of the following number keys for the desired relay activity 1 to turn relay 2 ON 0 to turn relay 2 OFF 7 to turn automatic mode ON 9 to turn manual mode ON 4 Press the MONITOR key The On Board microprocessor will monitor ...

Страница 68: ...ws you to program the setpoint relays to open or close when a vacuum system function occurs NOTE Relay activation deactivation is dependent upon the manner in which the relays are wired normally open or normally closed The RELAYS function parameters are shown in Figure 3 47 Relay parameters and their ranges are provided in Table 3 4 and are described on the following pages ...

Страница 69: ...rent ON OFF state and auto manual state Displays current Set first stage temperature limits Set Cryo TC pressure limits Set Aux TC pressure limits Sets relay to activate Sets relay to activate Sets relay to activate Sets relay activation user defined program for automatic control based on cryopump motor ON OFF when cryopump is in REGEN when rough valve is open or closed time delay Set second stage...

Страница 70: ... 1 or 2 Display Table 3 4 RELAYS Function Parameters RELAYS Parameter Range of Values Relay 1 or 2 1 2 Relay ON OFF Auto Manual ON OFF Auto Manual First Stage Temperature 30K 310K Second Stage Temperature 10K 310K Cryo TC Pressure 1 999 microns Aux TC Pressure 1 999 microns Cryopump ON OFF REGEN Track ON OFF Rough Valve ON OFF Time Delay 0 99 seconds Last Next Clear MONITOR REGEN SERVICE CONTROL R...

Страница 71: ...nually turn the setpoint relay ON or OFF when in automatic control Manual control is typically used during system diagnosis when manual activation of a setpoint relay is required Figure 3 49 Current State of Relay ON OFF Auto Manual Current Program for Automatic Control The third parameter of the RELAYS function displays the current user defined program which was selected for automatic control of ...

Страница 72: ...ows you to establish the upper and lower second stage temperature limits of the cryopump as shown in Figure 3 52 The upper limit is designated as UL and the lower limit is designated as LL Figure 3 52 Second Stage Temperature Limits Display Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 LL 30K UL 310K Last Next Clear MONITOR REGEN SERVICE CONTROL RE...

Страница 73: ...f the RELAYS function allows you to establish the upper and lower pressure limits of the cryopump auxiliary thermocouple gauge as shown in Figure 3 54 Figure 3 54 Auxiliary Thermocouple Pressure Limits Display Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 LL 1µ UL 999µ Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 ...

Страница 74: ...F as shown in Figure 3 55 Figure 3 55 Cryopump Display Regeneration The ninth parameter of the RELAYS function allows you to program the setpoint relay to activate when the cryopump is in regeneration mode as shown in Figure 3 56 Figure 3 56 Regeneration Display Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON BOARD Enter 1 2 3 4 5 6 7 8 9 0 CRYOPUMP Last Next Clear MONITOR REGEN SE...

Страница 75: ... 3 57 Roughing Valve Display Delay Activation of Relay The eleventh parameter of the RELAYS function allows you to establish a delay time during which your selected relay waits before operating as shown in Figure 3 58 This parameter will delay both activation and deactivation of the relays Figure 3 58 Delay Activation of Relay Display Last Next Clear MONITOR REGEN SERVICE CONTROL RELAYS HELP oo ON...

Страница 76: ...re wired normally open or normally closed Programming First Stage Temperature Limits This procedure programs relay 1 or 2 to activate deactivate when either of the cryopump first stage temperature limits are reached 1 Press the RELAYS key on the keypad display 2 Press 1 or 2 depending upon which relay is being selected The selected relay number along with the ON OFF and Auto Manual status are disp...

Страница 77: ...e 6 Press the Enter key The cursor is placed under the current upper limit UL value 7 Using the keypad enter the new upper limit value 8 Press the Enter key The limit values are programmed 9 Press the MONITOR key The On Board microprocessor will monitor system operation Programming Cryo Thermocouple Pressure Limits This procedure programs relay 1 or 2 to activate deactivate when either of the cryo...

Страница 78: ...in the display 4 Press the Enter key The cursor is placed under the current lower limit LL value NOTE If a number which is not in the proper range is entered LL µ or UL µ will be displayed Press the Clear button to continue 5 Using the keypad enter the new lower limit value 6 Press the Enter key The cursor is placed under the current upper limit UL value 7 Using the keypad enter the new upper limi...

Страница 79: ... Auto Manual status are displayed 3 Press the Next key until Regen Track appears in the display 4 Press the Enter key FNC Regen Track will be displayed The relay is programmed 5 Press the MONITOR key The On Board microprocessor will monitor system operation Rough Valve This procedure programs relay 1 or 2 to activate deactivate when the rough valve opens closes 1 Press the RELAYS key on the keypad...

Страница 80: ...d 3 Press the Next key until the current Time Delay value appears in the display 4 Press the Enter key 5 Using the keypad enter the desired amount of delay time in sec onds 6 Press the Enter key The new time delay value is programmed 7 Press the MONITOR key The On Board microprocessor will monitor system operation FastRegen Control Module Software Function Parameters Table 3 5 provides you with a ...

Страница 81: ...y Program Second Stage Temperature Fast Rough Test Time Since Last Full REGEN Rough Valve Open Closed First Stage Temperature Aux TC Gauge Pressure ON OFF Extended Purge Time Since Last Fast Regeneration Purge Valve Open Closed Second Stage Temperature Cryo TC Gauge Pressure ON OFF Repurge Password Relay 1 ON OFF and Auto Manual Control Cryo TC Pressure Relay 1 ON OFF and Auto Manual Control Repur...

Страница 82: ...tion integrity of the On Board System Module Replacement NOTE The existing On Board Module may be programmed to specific user defined process parameters The replacement module must be pro grammed to restore the user defined parameters once installed 1 Set the On Board power switch located on the compressor or compressor controller to the OFF position 2 Remove all cables from the Power In AUX TC Re...

Страница 83: ...n as shown in Figure 4 1 5 Connect the cables removed during Step 2 6 Set the On Board power switch to the ON position 7 Refer to Section 3 Programming and Operation to program the new On Board module Figure 4 1 On Board FastRegen Control Module Component Location Power In Safety Interlock Screw Setpoint Relay Connector RS 232 Computer Interface Connector Network Terminal Connectors Network Pump I...

Страница 84: ... service North American customers may call 1 800 FOR GUTS 1 800 367 4887 24 hours a day seven days a week All other customers must call their local Customer Support Center Please have the following information available when calling so that we may assist you Product Part Number Product Serial Number Product Application Specific Problem Area Hours of Operation Equipment Type Vacuum System Brand Mod...

Страница 85: ... 447 5007 Fax 408 988 6630 Dial 1 800 FOR GUTS 1 800 367 4887 24 hours a day seven days a week United States and Canada CTI CRYOGENICS 4120 Freidrich Lane Suite 600 Austin TX 78744 U S A Tel 512 912 2800 Fax 512 912 2888 Dial 1 800 FOR GUTS 1 800 367 4887 24 hours a day seven days a week Germany CTI CRYOGENICS GmbH Haasstrasse 15 D 64293 Darmstadt Germany Tel 49 6151 871377 Fax 49 6151 891635 Fran...

Страница 86: ...6 3199 Taiwan Hong Kong and China CTI CRYOGENICS Challentech International Corporation No 1 Lane 9 Pateh Road Hsin Chu 300 Taiwan R O C Tel 886 35 614211 Fax 886 35 614210 Australia New Zealand and Tasmania CTI CRYOGENICS AVT Services Pte Ltd Unit 1 12 Pioneer Avenue Thornleigh NSW 2120 Sydney Australia Tel 612 9 4810748 Fax 612 9 4810910 Singapore Malaysia Philippines and Indonesia CTI CRYOGENICS...

Страница 87: ...herefore establishes a fixed reference point to sync up data flow Whenever either receiver HOST or slave receives a character all history and status of previous partial packet data if any is aborted and lost and a packet message is started anew The data field consists of from one 1 to a maximum of fourteen 14 ASCII characters the meaning of which is defined in the Pump Command List for commands an...

Страница 88: ...e On Board Module reply with status or other parametric information The On Board Module responds to all such correctly received messages with a response message The pairing of these command response or query response message sets defines a transaction or exchange If a faulty message is received by the On Board Module due to improper production in the host or transmission media failure the message ...

Страница 89: ...ou will see will be A This reply occurs because the error messages will have been cleared by the Network Teminal or On Board Central Control software If your system utilizes a Network Teminal or On Board Central Control software you should use the lower case t command as described in Table B 1 within this appendix and Appendix E if you wish to have your system controller recognize a power failure ...

Страница 90: ...1 Hex 31 ASCII 1 Slave sends replay of AP A2 01 meaning no error pump version A2 01 Flag Data Field Checksum Terminator ASCII A P A a CR 2 0 1 Hex 24 41 50 20 41 32 2E 30 31 61 0D Checksum of hex data field Bits 76543210 Sum of 41 01000001 50 01010000 20 00100000 41 01000001 32 00110010 2E 00101110 30 00110000 31 00110001 equals 10110011 or hex B3 modulo 256 Bits 7 and 6 aligned for X0R 00000010 X...

Страница 91: ...x D 3 GND 7 25 Pin Female On Board Module IBM PCxT CAUTION The RS 232 cable should not be routed with power cables and other equipment which may generate excessive EMI conditions 2 R x D 3 T x D 9 5 Shield 9 Pin Male On Board Module T x D 3 R x D 2 GND 5 9 Pin Female IBM AT On Board Module to IBM AT On Board Module to IBM PCXT NOTE Connectors should be of a metal case type and cable lengths should...

Страница 92: ...e and provides status 0 Closes rough valve 1 Opens rough valve Provides rough valve status E 0 1 Opens or closes the purge valve and provides status 0 Closes purge valve 1 Opens purge valve Provides purge valve status H 0 320 Sets temperature control of the first stage Temperature control is turned OFF if set to 0 A reads back the current value of 0 320 J None Sends back the first stage temperatur...

Страница 93: ...s range 0 59994 1 Extended purge time minutes range 0 9999 2 Repurge cycles 0 20 3 Rough to pressure range 25 200 4 Rate of rise microns minute range 1 100 5 ROR cycles range 0 40 6 Start up temperature after power failure range 0 80 A Clear set rough valve interlock range 0 1 G Repurge time minutes range 0 9999 S Fast rough test range 10 999 Table B 1 On Board Module RS 232 Commands Continued Com...

Страница 94: ... for auto compressor power up The following applies to a Full regeneration Valid returns are 0 7 A 0 or 4 means that the pump has given the flag back The following applies to a Fast regeneration For Fast regeneration pumps an additional character is added to the response and a fixed bit 3 weight 8 is always present in the first character telling the Network Terminal or other querying agent that a ...

Страница 95: ... Pump ON 02H Rough valve ON 04H Purge valve ON 08H Cryo TC ON 10H Aux TC ON 20H A result of 0 means that there was a power failure The bit is reset to 1 after this query Status 2 01H Setpoint 1 ON 02H Setpoint 2 ON 08H First stage temperature control ON Status 3 01H Pump phase 1 check 02H Pump phase 2 check Table B 1 On Board Module RS 232 Commands Continued Command Parameter Description ...

Страница 96: ... first stage LL deg Kelvin 1 Set first stage UL 2 Set second stage LL deg Kelvin 3 Set second stage UL 4 Set Pump TC LL microns 5 Set Pump TC UL 6 Set AUX TC LL microns 7 Set AUX TC UL 8 Set time relay 0 9999 seconds A Set unconditional ON B Set unconditional OFF C Set as REGEN status tracking relay D Set as rough valve tracking relay F Set as pump motor ON OFF status tracking relay Selector meani...

Страница 97: ...ere no errors Bits are set to indicate errors The first area will be indicated by setting the LS bit second area by bit 1 and third area by bit 2 Y Read elapsed time The units are in hours and expressed as an integer The range is up to 65 000 hours Z Read the number of REGEN cycles that have been completed None Returns an identifier string indicating module type and software revision level a None ...

Страница 98: ...illegal state encountered system bug I Start of Fast regeneration not allowed pump too warm J TOO COLD TO ROUGH Pump was too cold to rough to maintain base pressure g None Requests the auto calibration of the CRYO TC gauge Returns a G or H error code if conditions are not valid to perform the auto zero calibrate such as TC not turned ON or the pres sure is too high h None Requests the auto calibra...

Страница 99: ...t count value which specifies the completion of either the pump P or AUX X TC auto zero sequence This value is used by a remote computer to tell when an initiated auto zero is complete Returns a modulo 256 0 255 numeric value which is incre mented each time the auto zero operation completes The remote unit can detect the completion of the event by a change in value s None Polls an event count modu...

Страница 100: ...e detected in regeneration 04H Heater failure detected in regeneration 08H Fast regeneration has recovered from purge gas failure 10H Fast regeneration crossed over to a full regeneration 20H True when fast regeneration has started z 0 1 Set Clear Query the user keypad access lockout state When True the user is limited to the use of the MONITOR and SERVICE functions on the keypad display B 1 2 Res...

Страница 101: ...r of the regeneration cycle status of the On Board Cryopump NOTE In some cases there are several responses which mean the same thing Regeneration Response Description Refer to Table C 1 for a complete description of the regeneration responses NOTE Regeneration responses identified with an asterisk apply to FastRegen responses Regeneration responses not identified with an asterisk apply to Full reg...

Страница 102: ...here is a problem with the purge gas when this response appears The D response means purge gas fail if the repsonse to v is equal to 8 If the response to v is 4 the heater failure message should be displayed Example PURGE GAS FAILURE WARM UP 234K 285K H S EXTENDED PURGE REPURGE CYCLE This response is used in conjunction with lowercase l and k An H response means that the pump has reached its warm ...

Страница 103: ...this is a multi pump system the pump roughing valve may be waiting to use the valve The valve use is controlled by a token pass Use the following com mand to access this information Command Q A response of 1 means the pump has the token A response of 2 means the pump needs the token L ROR Rate of Rise In this display we show how many rate of rises have been done the actual rate of rise and the rat...

Страница 104: ...by using command e The responses and descriptions are listed below No error A B WARM UP TIMEOUT Did not reach warm up temperature within 60 minutes C COOLDOWN TIMEOUT Did not cool down within 5 hours E ROR CYCLE LIMIT WAS REACHED The pump did not pass the rate of rise test within the programmed cycle limit F MANUAL ABORT Someone manually gave the command to stop regeneration G ROUGH VALVE TIMEOUT ...

Страница 105: ...ion to cooldown or regenerate Refer to Appendix D for more information Z DELAY START NOTE Applies to Full and Fast Regeneration cycles The start of regeneration will be delayed for some time To get the timer value in minutes use command k NOTE Display the time in hours to match the keypad display O ZEROING TC GAUGE The TC gauge is being zeroed at the end of regeneration f SHARE REGEN WAIT Waiting ...

Страница 106: ... of the pumps to begin roughing The Fast regeneration process and Network Terminal coor dinates the valves to rough simultaneously k PURGE GAS FAIL RECOVERING At the start of the Fast regeneration the pump failed the purge gas test The pump was still coldenough at the end of the test and is attempting to recover back to 17K l m _ r s t u v WARMUP During warmup you may also display the actual 2nd s...

Страница 107: ...essages will have been cleared by the Network Teminal or On Board Central Control software If your system utilizes a Network Teminal or On Board Central Control software you should use the lower case t command as described in Appendix B and Appendix E if you wish to have your system controller recognize a power failure signal which is recorded in the pump Table D 1 Power Failure Recovery Messages ...

Страница 108: ...lly AND the response with 01H A result means that 1 phase of power is missing Logically AND the response with 02H A result means that both phases of power are missing Heater Failure v Logically AND the response with 04H Logically AND the response with 01H Logically AND the response with 02H If TRUE a heater problem exists and the pump warm up temperature is reduced to 285K If TRUE rough valve cont...

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