LAH-80 Series Technical Document
- 6 -
4. Performance evaluation system and evaluation method
As performance evaluation of the linear actuator LAH-80 Series, characteristic evaluation that is optimal and
necessary for a high-precision positioning system actuator is performed with our proprietary evaluation system
based on JIS B6201.
4-1 Performance evaluation system
Main instruments used
Linear gauge
Heidenhain
CT60M (Precision:± 0.1
μ
m)
Indicator
Heidenhain
VRZ-210 (Resolution: 0.05
μ
m)
Dedicated controller
unit UDK5114NW2
Air
source
Linear actuator
Linear gauge
Indicator
Computer
Printer
Controller
Figure 1
