Hamamatsu ENERGETIQ LDLS EQ-400 Скачать руководство пользователя страница 1

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Model EQ-400

Laser-Driven Light Source

LDLS

Operation Manual

Revision 9, May 2022

Part Number DOC-7388

Содержание ENERGETIQ LDLS EQ-400

Страница 1: ...Model EQ 400 Laser Driven Light Source LDLS Operation Manual Revision 9 May 2022 Part Number DOC 7388...

Страница 2: ...ical information including drawings schematics and specifications contained in this document are the property of Energetiq and shall not be reproduced in whole or in part without the written consent o...

Страница 3: ......

Страница 4: ...Remote Interface 10 3 6 External interlock connection 10 4 EQ 400 Setup 10 4 1 Connections 10 4 2 Chiller Information 11 5 EQ 400 Operation 12 5 1 Startup 12 5 2 Stopping 12 5 3 Manual Reset 12 6 Serv...

Страница 5: ...Section 4 for connection details For additional information contact Energetiq Technology Technical Support Services at 1 781 939 0763 X111 or e mail EUVproductsupport Energetiq com 2 Safety instructi...

Страница 6: ...not open the enclosure of either the Lamp or the Controller Dangerous invisible infrared laser beams and hazardous voltages exist inside the Lamp Opening the chassis both voids the warranty and expose...

Страница 7: ...on 400W 1070nm pump laser under a failure mode condition where aperture is itself accessible 4 meters Required Optical Density OD for safety eyewear 6 or higher at 1070 nm These values are based on a...

Страница 8: ...and Safety Notification The following safety labels appear on the product Table 1 shows the location of each label on the EQ 400 system and Table 1 describes their meanings Figure 1 EQ 400 Safety lab...

Страница 9: ...e outlet aperture for laser radiation 4 UV Hazard warning label indicates hazardous levels of UV light are present 5 Protective housing label warns of an enclosed laser radiation hazard 6 Explanatory...

Страница 10: ...00 The shipping box should contain EQ 400 Power Supply Controller unit EQ 400 Lamp unit Accessory Box Interconnecting cable from Lamp to Power Supply Controller 9 pin D sub AC Power cable AC Power plu...

Страница 11: ...dicators are described below in Table LED Label Meaning when lit POWER OK AC power is connected to the EQ 400 PCU LAMP ON UV Light is on LASER ON Laser power is ON and laser light is being produced wi...

Страница 12: ...unctions This connector also functions as the remote interlock connector 4 RS 485 Connector 9 pin D sub Connector for optional RS 485 interface See Sections 3 and 4 for electrical details and commands...

Страница 13: ...mp 3 Control Connector 9 pin D sub Provides various power and control signals to from the Power Supply Controller No other connector or cable may be used with the EQ 400 other than the one supplied 4...

Страница 14: ...he Controller weighs 18 8 kg 41 5 lb A two person lift is recommended Use care when moving the Controller not to bend the fiber optic cable sharply Minimum bend radius is 50mm 2 Connect the Lamp unit...

Страница 15: ...rlock switch to the interlock pins of the remote I O connector functions as remote interlock connector If using remote control mode connect user s control system to the remote I O connector using a su...

Страница 16: ...conds the laser will switch to full power 5 2 Stopping The following steps explain the proper procedures stopping To turn the lamp off simply turn the OPERATE Switch to the OFF position It is recommen...

Страница 17: ...rgetiq if condition persists LAMPHOUSE OVERTEMP Lamphouse internal temperature too high 1 Check for sufficient lamphouse cooling water flow 2 Ensure that cooling water temperature is between 18 and 24...

Страница 18: ...resentative SMC PN HRS018 A 10 T PN Description EQ 400 CHILLER KIT EQ 400 Chiller with Tubing Kit Note Cooling fluid is not included and must be locally sourced 9 Warranty Energetiq Technology Inc s w...

Страница 19: ...15 EQ 400 Controller top in mm 10 1 2 Lamp Dimensional Drawings EQ 400 Side view in mm...

Страница 20: ...y non condensing 80 max for temperatures up to 31 C decreasing linearly to 50 max at 35 C Pollution Degree 2 normally only non conductive pollution occasional temporary condensation possible Installat...

Страница 21: ...n when ON LAMP MODULE FAULT 3 Pulled to digital common when OK float on FAULT CONTROLLER FAULT 4 Pulled to digital common when OK float on FAULT ISOLATED 5V SUPPLY 5 200mA maximum referenced to digita...

Страница 22: ...face Commands The RS 485 serial interface is provided for user adjustment of laser operating power to increase or decrease light output The EQ 400 is shipped with the laser power set to a factory defa...

Страница 23: ...actory default value Power XXX X B Saves present settings to flash memory This command should be issued after the settings are at their desired values If not changes will be lost if power to the EQ 40...

Страница 24: ...1 out of range 0 OK 5 Laser current source 1 fault 0 OK 6 Lamphead temperature 1 overtemperature 0 OK 7 PCU temperature 1 overtemperature 0 OK 8 Lamphead interlock 1 open 0 OK 9 External interlock 1...

Страница 25: ...21 Energetiq Technology Inc 205 Lowell St Wilmington MA 01887 Phone 1 781 939 0763 Fax 1 781 939 0769 Email info energetiq com www energetiq com DOC 7388 Rev 9 5 22...