Granville-Phillips 270001 004 Скачать руководство пользователя страница 33

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TO ELECTAOMETER

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AUTOAANGING

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EMISSION CONTROL

R38

5K 20%

·12V

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C 12 .01,IJF

AA7·5

PROCESS CONTROL

CONNECTOR IOENTIFICATION

J3 1G ACCESSORY

A57

10K

013

A37

100K

PROCESS

DELAY

K 1

2.SK

NOTES:

C13

6S,,F

·23V

R39

5K 20%

015

012

2,5K

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PROCESS CONTROL

1. ALL RESISTORS ARE IN OHMS, .5W.5l!. UNLESS OTHERWISE NOTED

2. RESISTOR ARRAYS {AA TYPES) ARE I/SW
3. 7 DENOTES SIGNAL OROVHO

4. m DEMOff'S re,t,S81S GAOIJNO

5. ◊ DENOTES TEST POfiT

FIG. 5-7 ION GAUGE PROCESS CONTROL

J3· 13&P
J3·15&S

J3· 14&R

J3· 10&L

J3· 12&N

J3·1 HIM

Содержание 270001 004

Страница 1: ...1 H S D ENGINEERING INC 10828 BANCROFT AVE OAKLAND CA 94603 SERIES 270 IONIZATION GAUGE CONTROLLER INSTRUCTION MANUAL GRANVILLE PHILLIPS G1...

Страница 2: ...on 1 3 for part number explanations 270001 004 270002 004 270003 003 270004 003 270014 003 270015 003 270016 003 270017 003 270019 003 270020 003 270021 003 270022 003 270038 002 270039 001 270043 101...

Страница 3: ...ompany will at its option repair or replace or refund the selling price of an item which proves to be defective during the warranty period provided the item is returned to Granville Phillips Company t...

Страница 4: ...for Troubleshooting 6 1 6 3 Input Power Problems 6 3 6 4 Power Supply Problems 6 3 6 5 Filament Turn on and Emission Problems 6 4 6 6 Electrometer Circuit 6 7 6 7 Autoranging Problems 6 8 6 8 Ion Gau...

Страница 5: ...d sufficient time to stabilize The thermocouple section is comprised of two independent measuring circuits and when included extend the measurement range of the controller to I Torr or I mbar Indicati...

Страница 6: ...mpedance is 2 Kohm 2 0 to 5V corresponding to IV decade of pressure Output impedance is 2 Kohms 0 to 2V corresponding to 0 to I Torr 0 to 1 33 mbar of air output impedance is 1 86 Kohms 1 up 117 FS do...

Страница 7: ...rce regulations in order to file a valid claim with the carrier Any damaged material including all containers and packing should be held for carrier inspection Contact our Customer Service Department...

Страница 8: ...t the voltage ratio is not changing with time If Voltage shunted 83 or more Voltage unshunted this should prevent the plasma from creating a dangerous voltage between these grounds If more than 10 vol...

Страница 9: ...OLLER POWER IS ON EVEN WHEN FILAMENT IS OFF THEREFORE TO ELIMINATE POSSIBILITY OF ELECTRICAL SHOCK MAKE GAUGE CONNECTIONS FIRST Gauge cable assemblies with catalog numbers 270009 270010 and 270041 are...

Страница 10: ...HALF NOT 5 IOWN 7YP PLUG SUPPLIED W TflSHELL TO B INSTALLED IN ALL UNVSED CABLE ACCESS HOLES D 0 0 TYP CABLE TIE UP TO 5 PLCS TYP CABLE REF 0 0 c CJ r l 10 FIG 3 3A CONNECTOR PICTORIAL SCREW ZPLCS NU...

Страница 11: ...lug The jumper plug is located on the main printed circuit board directly behind the ion gauge panel meter see Fig 6 1 Place the appropriate label supplied over the range units lettering on the front...

Страница 12: ...et II I recessed pot for adjusting the set point corresponding to decade and meter reading where the IG process relay II I energizes PC Set 112 recessed pot for adjusting the set point corresponding t...

Страница 13: ...he range and autoronge switches until a meter zero is obtained Check the remaining ranges to assure a zero in all ranges 1f 4 5 Ion Gauge Process Control Set Point Adjustment The IG process control fe...

Страница 14: ...wed if the system pressure is between 5 x IO 7 Torr Fig 4 3 can be used to control a process where a large pressure rise is expected once the process is initiated In the example shown the process woul...

Страница 15: ...l scale Process control is operational only when the autorange switch is on 4 During autorange operation the electrometer will always return to the 10 decade any time the filament relay de energizes 4...

Страница 16: ...d grid wire size is increased to maintain a line resistance of less than 06 ohms per lead Consult Granville Phillips for long cables Degas power of 80 watts nominal is available using a 10 foot cable...

Страница 17: ...the speed of the electron In the ion gauge tube the grid is placed at a positive voltage such that most of the electrons emitted at the filament are accelerated through the grid structure and into a d...

Страница 18: ...0 3 to 1 2 volts depending upon the setting of the emission adjust potentiometer R28 to pin 2 of IC I0 A results in a negative going output from IC I0 A This increases the output of the current source...

Страница 19: ...le is less than I x 10 3 Torr Amplifier ICI I is a low drift inverting amplifier with a DC gain of 200 Initial adjustment of the amplifier is made by adjusting R54 for an output of 2 0V de with the 27...

Страница 20: ...lorado 80303 Telephone 303 443 7660 Repairs properly made with equivalent electronic parts and rosin core solder which do not damage other portions of the unit do not represent a violation of the warr...

Страница 21: ...troller requirements Connect controIler to proper source of power or reset selector switching as shown in Fig 4 2 2 Incorrect fuse rating 3 Defective component of power supply P C board Remove gauge c...

Страница 22: ...QII Q 17 and associated components I0 Defective triac SCRI or pulse transformer TI Using an oscilloscope check for firing pulses on SCRl gate to anode I across C23 during period when light is on If p...

Страница 23: ...or J3 H I Defective relay K3 Pins 14 and 15 open I Defective emission current amplifier IC I0 B or related circuit component Fig 5 4 6 6 Electrometer Circuit Refer to Fig 5 5 and Fig 6 1 I Zero meter...

Страница 24: ...its inoperative 2 One process control circuit inoperative I Normal operation Autoranging switch is in the manual position 2 Defective delay circuit component Ql6 Ql5 R36 R37 or Cl3 Check for 23V de on...

Страница 25: ...circuit will not its associated relay 2 One P C circuit will not de energ its associated relay 3 Both P C circuits cannot be set I Defective amplifier IC13 A or B or associated component Check the vo...

Страница 26: ...C 27 I I 3 _ 4 cJ h D I cm C 31 1 c21 I U 1 3 B 5 EJ g B R47 cR33 c J 8 n 28 r G t 0 G J I R i T4 Rm r11 n R f CR3 y lJ1 jJ u uz L____ K4 I f 1 p 7 1R53 a C2B l 110 l I I CR 3 5 I r 5 QZ2 I FIG 6 2 C...

Страница 27: ...Field effect transistor Selected U235 Protector Surge Voltage RCA SGT03U13 Diodes Zener diode 12Y I OW IN4742A Zener diode 6 0Y I OW 1 Schauer SZ6 0 1 IO mA Zener modified D38W14 Signal diode IN4007 S...

Страница 28: ...carbon Resistor Array Resistor Array Resistor Array Resistor Array Resistor Array Resistor Array Resistor Array Resistor Array Pot I0 0 Kohm 20 I OW Switches Switch fil control man SPOT on x mom C K 7...

Страница 29: ...Switch power SPOT PCV sit on x on V C K 7101SAV 2Q I IC t s uq A Switch degas DPDT PCV sil on x on C K 720lSAV 2Q L t s w9Av c K I I I s t q r v i 112 Fuses Fuse 1 25 Amp 250V slow blow English Litte...

Страница 30: ...I 2 Vo ks s J vi 2 cJ _ e J c r f v l us c l J _ v r L 1 c J l l c u _ _c 1 s V V v _ 1 __ 2 OD U u J J o 0 V O P _ i2t4c J _ C ll l e c Q t _ i _ S L J 0 uc J S t1 oo __ _ _ z_...

Страница 31: ...ANGING TO AUTORANGING 7 NOTES 1 ALL RESISTORS IN OHMS SW 5 UULESS OTHERWISE NOTED 2 RESISTOR ARRAYS RA TYPES 118W 3 7 DENOTES SIGNAL GROUND 4 rnDENOTES CHASSIS GROUND 5 DENOTES TEST POINTS 12V 1 _ I C...

Страница 32: ...6 RA6 S 22K A40 1M 14 11 6 ICS 14516 UP DOWN COUNTER RESET 12voc _lC18 0 1 FD 1R42 2M Efr_ c L OVDC R41 2M 1 3 4 SEC r C 17 0 1pFD CLOCK U D COUNTER TRUTH TABCE IC4 i PIN i PIN 3 I 4 ii N 1 1 r 0 I 1...

Страница 33: ...OENTIFICATION J3 1G ACCESSORY A57 10K 013 A37 100K PROCESS DELAY K 1 2 SK NOTES C13 6S F 23V R39 5K 20 015 012 K2 2 5K PROCESS CONTROL 2 1 ALL RESISTORS ARE IN OHMS 5W 5l UNLESS OTHERWISE NOTED 2 RESI...

Страница 34: ...6 7 79 3 __ J6 8 t r 5 NOTE At L REfSt STOR S A E IN OHIVS SV t 5 C Nt ESS OTNERW t SC SPe Cl l D e Pcfi StSTOJ S IN ARRAYS RA TYPES ARE f 8 Iv 3 DEN OTCS S G NAL G 0 IN 7 DE VOTE S CHASS c RO 1 IID C...

Страница 35: ...02 FIG 5 8 THERMOCOUPLE SCHEMATIC 5 11 n 004973 103 5 12 r 11 Wl 1 r u 0 ___ __ 4 _ M ll t u a g I 1 I _ rJ t Zi I_ t t...

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