Modbus and I/O Data
312785B
31
ProMix 2KS Recipe Bits
Table 5: ProMix 2KS Recipe Bits
Recipe Bits
Number
Recipe Bits
Number
5
4
3
2
1
0
5
4
3
2
1
0
0
0
0
0
0
0
0
1
0
0
0
0
1
33
0
0
0
0
0
1
1
1
0
0
0
1
0
34
0
0
0
0
1
0
2
1
0
0
0
1
1
35
0
0
0
0
1
1
3
1
0
0
1
0
0
36
0
0
0
1
0
0
4
1
0
0
1
0
1
37
0
0
0
1
0
1
5
1
0
0
1
1
0
38
0
0
0
1
1
0
6
1
0
0
1
1
1
39
0
0
0
1
1
1
7
1
0
1
0
0
0
40
0
0
1
0
0
0
8
1
0
1
0
0
1
41
0
0
1
0
0
1
9
1
0
1
0
1
0
42
0
0
1
0
1
0
10
1
0
1
0
1
1
43
0
0
1
0
1
1
11
1
0
1
1
0
0
44
0
0
1
1
0
0
12
1
0
1
1
0
1
45
0
0
1
1
0
1
13
1
0
1
1
1
0
46
0
0
1
1
1
0
14
1
0
1
1
1
1
47
0
0
1
1
1
1
15
1
1
0
0
0
0
48
0
1
0
0
0
0
16
1
1
0
0
0
1
49
0
1
0
0
0
1
17
1
1
0
0
1
0
50
0
1
0
0
1
0
18
1
1
0
0
1
1
51
0
1
0
0
1
1
19
1
1
0
1
0
0
52
0
1
0
1
0
0
20
1
1
0
1
0
1
53
0
1
0
1
0
1
21
1
1
0
1
1
0
54
0
1
0
1
1
0
22
1
1
0
1
1
1
55
0
1
0
1
1
1
23
1
1
1
0
0
0
56
0
1
1
0
0
0
24
1
1
1
0
0
1
57
0
1
1
0
0
1
25
1
1
1
0
1
0
58
0
1
1
0
1
0
26
1
1
1
0
1
1
59
0
1
1
0
1
1
27
1
1
1
1
0
0
60
0
1
1
1
0
0
28
0
1
1
1
0
1
29
0
1
1
1
1
0
30
0
1
1
1
1
1
31
1
0
0
0
0
0
32
Содержание 15V331
Страница 80: ...Dimensions 80 312785B ...