Calibration Furnace
Calibration Procedure for Tube Furnace
67
13. Do steps 10 through 12 again for each position in
Table 9.
Note
Let the Product soak for 5 minutes after you move
TC2.
Table 9. Axial Uniformity Test
TC2 Position from Furnace Center
(mm)
-30 -10 0 10 30
TC1
TC2
Difference
14. Calculate the temperature difference relative to the
center position for each position of TC2 in Table 9. and
record it in the table.
Difference
(x)
= (TC2
(x)
– TC1
(x)
) – ( TC2
(0)
– TC1
(0)
)
15. Calculate a gradient value for the 30 and -30 positions
of TC2 with:
Gradient
(x)
= TC2
(x)
– TC1
(x)
X = TC2 Position at 30 mm and -30 mm
16. Calculate the slope value with:
Slope = Gradient
(+30)
– Gradient
(-30)
17. Calculate the SKEW value with:
SKEW
n(new)
= SKEW
n(old)
+ A x (Slope)
18. Table 10 shows the value for A at each of the
temperature setpoints.
Table 10. Skew Correction Values
Setpoint (
°
C) A
Value
300 1.02
700 1.35
1000 4.67
1200 5.30
19. Put the SKEW
n(new)
value into the Product through the
front panel or RS-232 port. Table 11 is a list of
temperature setpoints and the RS-232 command and
front-panel name for the SKEW parameters.
Table 11. SKEW Parameter
Setpoint
(
°
C)
Parameter
RS-232 Command
Front Panel
300 SOUR:SENS:CAL:SKEW1 SKEW
(300)
700 SOUR:SENS:CAL:SKEW2 SKEW
(700)
1000 SOUR:SENS:CAL:SKEW3 SKEW
(1000)
1200 SOUR:SENS:CAL:SKEW4 SKEW
(1200)
20. Let the Product soak for 60 minutes after you put in
the SKEW value.