9118A
Users Manual
72
Prepare Test Equipment and Power
On
Set setpoint
Heat On
Take As Found Data
for stability
Pass/Fail
Take As Found Data
for stability
Calculate the Axial
uniformaty
Take As Found Data for
Axial Uniformity
Calculate the Slope of
0 mm and 60 mm
Set the uniformity align
parameter
Calculate the Zone
Set the Zone align
parameter
Take As Found Data
for stability
Take As Found axial
uniformity
Finished
Calculate the accuracy
Test the stabiltiy
All
Calibration Point
Finished
Yes
Fail
Fail
Fail
Fail
Fail
Pass
No
Pass
Pass
Take As Found Data
for stability
Pass/Fail
Slope <0.1 C
Pass/Fail
Pass/Fail
Pass/Fail
Set the accuracy
align parameter
Pass/Fail
Take As Found Data
for accuracy
Pass
Pass
Fail
Pass
Yes
gxs135.eps
Figure 27. Calibration Procedure for Furnace with Thermo Block