M46 Semiconductor Inspection Microscope Assembly
5
Fein
Loosen the set screw (1), set the illumination
arm into the microscope body and secure with
the set screw (1).
To set the mechanical stage, turn the coarse
knob (1) in the direction of the arrow to
position the stage holder (2) to the lowest
position. Carefully position the stage onto the
stage holder (2), making sure the clutch (4) is
on the right hand side. Move the top layer of
the stage until the holes (3) appear. Align holes
(3) and (5) so they are superimposed. Lock
with screws. Move the top layer of the stage in
the opposite direction to reveal holes (6). Then
lock in place with screws. Check to make sure
the stage is positioned correctly and locked in
place with screws.
1
Assemble the Reflected Illuminator arm by
loosening the set screw (1) and slide the lamp
house (2) into the illumination arm (3) and
secure in place by tightening the set screw (1).
1
3
2
1
2
5
3
4
6