7
3.1.1 Description
The Model 5311 Controlled Dry Gas System consists of two (2)
basic components: a humidity sensor and a controlled solenoid
valve with adjustable flow regulator.
The standard humidity sensor is an integrated unit measuring
approximately 1”Lx.44”Wx.375”D (25x12x10mm) that plugs into a
24” (61cm) multi-conductor cable that is hard-wired to the control
module. Longer cable lengths are available as an option. A
temperature compensated capacitive sensing element where
capacitance is proportional to humidity is used to detect the relative
humidity level. This sensor is programmed at the factory to produce
a digital output around a pre-selected set point. The standard
factory setting is 5% RH. Other fixed RH set points are available as
an option. Contact ETS to order.
The sensor is mounted to the wall of the chamber using the ½” NPT
compression fitting, shown in Figure 3.1-1. Other mounting
configurations can also be used to meet the user’s specific
requirement.
Figure 3.1-1: Sensor mounted in compression fitting No 5506 Ph
The 36” (91cm) hard wired cable provides the input/output
interconnect between the Control unit and the Humidity Sensor.
The sensor end is fitted with a flat, 4-pin female receptacle with the
following pin-out configuration:
The Control/Solenoid/Flow Regulator unit is shown in Figure 3.1-2.
It will be referred to as just the Control Unit.