Energetiq LDLS EQ-9-HP, Руководство по эксплуатации, Страница: 11 / 37

DOC-8240 Rev. 3 EQ-9-HP Operation Manual 7
C h a p t e r 2
DESCRIPTION
General
The EQ-9-HP is a broad-band lamp system for use in a wide variety of applications. The lamp
produces high brightness, broad-band light from DUV wavelengths through visible and
beyond. The output is very stable, and has a long lifetime before any service is required. A
simple control interface ensures ease of use.
Some of the advantages of the EQ-9-HP include:
•
Very high brightness across complete spectrum
–
170nm through visible and beyond
•
Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
–
Simplified optical system
•
Excellent spatial stability
–
Repeatable measurements
•
Superior short and long term power stability
–
Repeatable measurements
•
Electrodeless operation for long life
–
Reduced consumable costs
–
Minimal recalibration of instrument
The EQ-9-HP system consists of a Power Supply Controller unit, Lamp House unit, and
interconnecting cable. Connection to DC power is required for operation. Connection to
nitrogen purge gas is optional, but recommended in some cases. See Chapter 3 for connection
details.