List of Tables
Table 1: Checklist of items........................................................................................................... 11
Table 2: Front panel symbols and their functionsl.......................................................................16
Table 3: Menu items.................................................................................................................... 17
Table 4: Turbo screen key actions................................................................................................19
Table 5: Gauge screen key actions...............................................................................................20
Table 6: Vent valve screen........................................................................................................... 21
Table 7: Vent valve screen key actions.........................................................................................21
Table 8: Turbo setpoint screen key actions..................................................................................23
Table 9: Calibrate gauge screen key actions................................................................................ 24
Table 10: Units screen key actions...............................................................................................24
Table 11: Error numbers.............................................................................................................. 29
Table 12: TAV vent valve kits and adaptor................................................................................... 35
Table 13: Outlet mist filter...........................................................................................................35
Table 14: Operating and storage conditions................................................................................36
Table 15: Mechanical data........................................................................................................... 36
Table 16: Pump performance data - nEXT85H.............................................................................37
Table 17: Pump performance data - nEXT85D.............................................................................38
Table 18: Vent gas specification and vent control....................................................................... 39
Table 19: Electrical connections.................................................................................................. 40
Table 20: Turbo pump connector pin-out....................................................................................41
Table 21: Active gauge connector pin-out................................................................................... 42
Table 22: Electrical data...............................................................................................................42
D395-94-880A - List of Tables
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