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Edwards T-STATION 85, Инструкция по эксплуатации

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Connect to the vacuum system

WARNING:

Connect the turbo pump inlet to the vacuum system before applying power to the T-

Station 85. This will ensure that the pump cannot operate accidentally causing injury.

WARNING:

If installing the vacuum system directly onto the T-Station 85, the weight of the system

must be no more than 10 kg and the centre of gravity must be positioned laterally within

the bounds of the base plate. If this is not the case, the vacuum system must be supported

to ensure that the T-Station 85 does not topple.

1. The turbo pump can be securely fixed to the vacuum system via the inlet flange. Make

sure that the pump inlet and all components fitted to the pump inlet are clean and

dust-free. If the pump inlet is not kept clean, the pump down time may be increased.

2. If the pump has a CF flange, use the copper compression gasket supplied with the

pump and use a full complement of bolts to connect the inlet flange of the pump to

the vacuum system.

3. If the pump has an ISO flange, use a minimum of four claw clamps (each torqued to

10 Nm) to connect the inlet flange of the pump to the vacuum system. Alternatively,

use a rotatable collar and the combined inlet screen and trapped O-ring supplied with

the pump to connect the inlet flange of the pump to the vacuum system; use a full

complement of bolts with the rotatable collar.

4. If the pump has an NW flange, use the centring ring supplied with the pump and a

metal NW clamp to connect the inlet flange of the pump to the vacuum system.

5. All inlet flange bolts must be re-tightened once the system is under vacuum. Ensure

that no torques or other forces are transmitted to the pump from the vacuum system

or the associated pipelines.

Connect to the exhaust extraction system

WARNING:

Vent dangerous gases and gas mixtures safely. Do not expose people to these gases. If

pumping hazardous gases or vapours, observe the safety recommendations of the supplier

of the gas/vapour.

Note:

This section applies to E2M1.5 versions only.

The exhaust system must be configured so that the maximum pressure at the pump outlet

does not exceed 0.5 bar gauge (1.5 bar absolute, 1.5 x 10

5

 Pa) at full pump throughput.

1. Make sure that the exhaust pipeline cannot become blocked.
2. If using an exhaust isolation valve, make sure the pump cannot be operated with the

valve closed.

D395-94-880A - Installation

Page 13

Содержание T-STATION 85

Страница 1: ...T STATION 85 INSTRUCTION MANUAL Publication Number D395 94 880 Issue A Original Instructions edwardsvacuum com ...

Страница 2: ...d Trademark credits Edwards and the Edwards logo are trademarks of Edwards Limited Associated publications A746 02 885 Diaphragm Pump XDD1 A371 32 880 Rotary Vane Pump E2M0 7 E2M1 5 B8G0 00 880 Turbomolecular Pumps nEXT85 D395 94 880A Copyright notice Page 2 ...

Страница 3: ......

Страница 4: ......

Страница 5: ...nnect to the exhaust extraction system 13 Connect the electrical supply 14 Configure the T Station 85 14 Turbo pump delay 14 Connect a vacuum gauge 15 Commission the installation 15 Operation 16 Control panel description 16 Start up 17 Menu structure 17 Turbo screen 18 Gauge screen 19 Vent valve screen 20 Turbo setpoint screen 22 Calibrate gauge screen 23 Units screen 24 Gas ballast control E2M1 5...

Страница 6: ...torage 31 Disposal 32 Service 33 Spares 34 Accessories 35 TAV vent valve and vent port adaptor for nEXT85 turbo pump 35 Outlet mist filter for E2M1 5 rotary vacuum pump 35 Technical Reference 36 Operating and storage conditions 36 Mechanical data 36 Pump performance data 37 Pumped media 38 Venting gas specification and vent control data 39 Materials exposed to gases pumped 40 Electrical connection...

Страница 7: ...8 Turbo setpoint screen 22 Figure 9 Turbo setpoint number entry mode 23 Figure 10 Calibrate gauge screen 24 Figure 11 Units screen 24 Figure 12 Dimensions T Station 85 37 Figure 13 Max allowed rate of pressure rise during venting pressure against time pump initially at full speed 40 Figure 14 Pin connections for 15 way sub miniature D type socket 41 Figure 15 Pin connections for an 8 way RJ45 42 F...

Страница 8: ...y actions 24 Table 10 Units screen key actions 24 Table 11 Error numbers 29 Table 12 TAV vent valve kits and adaptor 35 Table 13 Outlet mist filter 35 Table 14 Operating and storage conditions 36 Table 15 Mechanical data 36 Table 16 Pump performance data nEXT85H 37 Table 17 Pump performance data nEXT85D 38 Table 18 Vent gas specification and vent control 39 Table 19 Electrical connections 40 Table...

Страница 9: ...erve the instruction could result in damage to the equipment associated equipment or process Safety symbols The safety symbols on the products denote areas where care and attention is required The following safety symbols may be used on the T Station 85 or throughout the product documentation Warning Caution An appropriate safety instruction should be followed or caution to a potential hazard exis...

Страница 10: ...touch pad control module A single gauge input included can be connected to a range of Edwards active gauges allowing for pressure measurement and or control management of the turbomolecular pump The compact size of the T Station 85 is ideal for use on bench tops or suitable mobile platforms The open system configuration allows easy maintenance of the main pump components Figure 1 General view of t...

Страница 11: ...ge Leak testing the system after installation is complete to ensure optimum vacuum performance is recommended Unpack and inspect 1 Remove the outer cover and all packing materials remove the protective covers from the inlet and outlet ports inspect the system for any damage 2 If the T Station 85 is damaged notify the supplier and the carrier in writing within three days state the item number of th...

Страница 12: ...Figure 1 on page 10 item 7 Using suitable brackets or straps not supplied securing the T Station 85 to the bench top is recommended to prevent excessive movement in the unlikely event of a pump failure Note Straps or brackets cannot be provided as the best type fixing for the customer bench top location cannot be determined Sourcing or fabricating these fixings locally is recommended Fill the pump...

Страница 13: ...flange of the pump to the vacuum system Alternatively use a rotatable collar and the combined inlet screen and trapped O ring supplied with the pump to connect the inlet flange of the pump to the vacuum system use a full complement of bolts with the rotatable collar 4 If the pump has an NW flange use the centring ring supplied with the pump and a metal NW clamp to connect the inlet flange of the p...

Страница 14: ...the system as follows System start is selected The TAV vent valve will close The backing pump will turn on The turbomolecular pump will start accelerating up to full rotational speed System off is selected The backing pump will turn off The turbomolecular pump drive will turn off and the pump will start to decelerate The TAV vent valve will open fully from 50 of full rotational speed Turbo pump de...

Страница 15: ...5 the system must be tested Use the following procedure to test the system 1 Make sure that all the electrical connections are secure 2 Switch on the electrical supply and the exhaust extraction system if available 3 To operate the system press the START STOP key Check that the equipment operates as described in 4 Check that the turbo pump reaches normal speed If the pump inlet is valved or capped...

Страница 16: ...er 3 Next Table 2 Front panel symbols and their functionsl Key pad symbol Name Function 1 START STOP Turns the pumps on and off Returns to turbo menu screen 2 ENTER Selects or confirms current menu option Controls active gauges 3 NEXT Moves to next menu Scrolls through menu options The LEDs along the top of the T Station 85 display indicate which menu screen is currently being shown on the numeric...

Страница 17: ...peration The software version will then be displayed for a further 2 seconds If you need to contact Edwards for support regarding the T Station 85 please have this software version number available Menu structure Figure 4 on page 18 shows the view screen shortcuts and menu structure for the T Station 85 control display They also give an indication as to where buttons will take you within the menu ...

Страница 18: ...urbo screen When the turbo screen is selected the turbo LED is lit and the speed of the turbomolecular pump is displayed in percentage of full speed If no turbo pump is connected the display shows D395 94 880A Operation Page 18 ...

Страница 19: ...y the display will show Stop for three seconds 2 Press the ENTER key within that time to stop the pumps If the ENTER key has not been pressed or the START STOP or NEXT keys are pressed the display shows the turbo pump speed and the pumps remain running When the turbo pump is decelerating the bottom right portion of the percentage sign flashes until the pump has completely stopped Turbo screen key ...

Страница 20: ...ON and OFF using the ENTER key When first connected the gauge is in the OFF state and the display shows OFF When the gauge is turned on the display will show Str whilst the gauge is starting up and will then display pressure Gauge screen key actions Table 5 Gauge screen key actions Keys Short press Long press START Go to turbo screen ENTER ON OFF control of supported gauge or acknowledge error NEX...

Страница 21: ...an air cooler for example ACX75 Off Normally closed vent valves The vent valve connection on the turbo pump is permanently disabled so the vent valve will remain closed 50 nc Normally closed vent valves The vent valve will open when the speed of the turbo pump has dropped below 50 during stop but not fail conditions Ctl nc Normally closed vent valves Controlled venting from 100 to 50 full rotation...

Страница 22: ...has fallen below the setpoint value When pressure is selected the display shows the setpoint pressure The default pressure is 5 00 mbar shown as an exponential To change the pressure setpoint press and hold the ENTER key to start number entry mode Note If the turbo setpoint is set to pressure but a gauge is not connected the turbo pump will not start Figure 8 Turbo setpoint screen Number entry mod...

Страница 23: ...LED are lit together The numeric display is blank The calibrate gauge menu is not available for gauges which do not support calibration When the ENTER key is pressed the action depends on gauge type WRG or APGX The calibration command is sent to the gauge and the display shows CALd for 3 seconds ASG The calibration functions as a zero offset adjustment The pressure currently displayed is saved as ...

Страница 24: ... and voltage Press the ENTER key again to confirm the selection Note that when voltage is selected the display shows 0 000 When the units are changed the setpoint values will be converted to the new units For example if a setpoint threshold is entered as 1 0 x 10 3 mbar and the units are changed to Torr then the value will be displayed as 7 5 x 10 4 Torr Figure 11 Units screen Units screen key act...

Страница 25: ...e will be an increased rate of oil loss from the pump Electrical supply failure WARNING Risk of injury or death If the power supply fails when the pump is running the impeller could continue to spin for approximately 10 minutes The control circuit may not give any indication that the impeller is still running If the electrical supply to the T Station 85 fails when the turbo pump is rotating the mo...

Страница 26: ...e of components grease and oil safely refer to Disposal on page 32 Protect sealing faces from damage Leak testing the system is recommended after maintenance Seal any leaks found if any vacuum or exhaust pipeline connections have been disconnected Maintenance plan WARNING If the turbo pump is removed from the T Station 85 platform it is important to retain and reuse the same fixing screws If any o...

Страница 27: ...y loose connections 4 Inspect all of the vacuum and exhaust pipelines and check that they are not corroded or damaged and that they do not leak Replace or repair any corroded or damaged component and seal any leaks found Factory default settings Procedure to return the T Station 85 to the factory default settings 1 Remove the mains power from the T Station 85 2 Press the NEXT key and hold it down ...

Страница 28: ... may be too high Check for backing pipeline leaks If the throughput is high a larger backing pump may be required Cause The high vacuum area of the system is contaminated Remedy Clean the high vacuum system Cause Check the rest of the system for leaks and contamination Remedy If found repair the leaks and clean the contamination Cause The inlet pressure is poor Remedy If inlet pressure is poor che...

Страница 29: ...The reference used for identifying gauges is incorrect Please remove all connected gauges turn the electrical supply off and on and wait for 30 seconds before reconnecting the gauges Gauge errors 11 Gauge voltage too high The voltage from a gauge is too high The gauge may be defective 12 Gauge voltage too low The voltage from a gauge is too low The gauge may be defective 21 WRG Pirani failure Erro...

Страница 30: ... detailed fault codes press and hold the ENTER key whilst Err41 is showing to display the turbo pump system status word The lower 16 bits of the status word are displayed in hexadecimal Press the START STOP key to clear the error message Refer to the instruction manual of the turbo pump for detailed fault finding D395 94 880A Fault finding Page 30 ...

Страница 31: ...oil from the backing pump only applicable to the E2M1 5 rotary vane pump as described in the instruction manual refer to General description on page 10 4 Place protective covers over the inlet and outlet flanges 5 For the fastest pump down after the T Station 85 is reinstalled seal the turbomolecular pump inside a plastic bag together with a suitable desiccant 6 Store the T Station 85 in cool dry ...

Страница 32: ...ety and environmental requirements Particular care must be taken with any components that have been contaminated with dangerous process substances For instruction on draining the oil from the E2M1 5 rotary vane pump refer to the instruction manual for the pump Refer to General description on page 10 D395 94 880A Disposal Page 32 ...

Страница 33: ...rs The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses Order spare parts and accessories from the nearest Edwards company or distributor When ordering state for each part required Model and Item Number of the equipment Serial number Item Number and description of part Edwards products are supported by a world wide network of Edwards Serv...

Страница 34: ...d reliability and performance and will invalidate product warranty The spares available for the turbo pump and backing pumps are listed in the CD instruction manuals supplied with your equipment Refer to General description on page 10 D395 94 880A Spares Page 34 ...

Страница 35: ...tem number nEXT85 TAV5 kit N C connector fitted 0 3 m B8G2 00 835 nEXT85 TAV5 kit N C bare wire 3 m B580 66 040 nEXT85 TAV5 kit N O connector fitted 0 3 m B8G2 00 834 nEXT85 TAV5 kit N O bare wire 3 m B580 66 010 Vent port adaptor NW10 1 8 inch BSP male B580 66 011 Outlet mist filter for E2M1 5 rotary vacuum pump The outlet mist filter separates and traps oil droplets in the pump outlet to prevent...

Страница 36: ... range 12 to 40 C Ambient storage temperature range 30 to 70 C Maximum operating humidity maximum 90 condensing at 40 RH and C Maximum operating altitude 2000 maximum m Sound level 56 dB A Pollution degree EN61010 2 Maximum outlet pressure XDD1 pump E2M1 5 pump 1 1 1 1 x 105 1 5 1 5 x 105 bar absolute Pa Maximum permitted external magnetic field nEXT85 turbo 5 mT Mechanical data Table 15 Mechanica...

Страница 37: ...49 ls 1 Argon 80 ls 1 80 ls 1 44 ls 1 Inlet compression ratio Nitrogen 1 E 11 1 E 11 1 E 11 Helium 2 E 07 2 E 07 2 E 07 Hydrogen 5 E 05 5 E 05 5 E 05 Argon 1 E 11 1 E 11 1 E 11 Ultimate pressure with rotary vane backing pump 5 E 09 mbar 5 E 10 mbar 5 E 09 mbar with diaphragm backing pump 5 E 08 mbar 5 E 09 mbar 5 E 08 mbar Ultimate pressure 48 hours after bakeout with 2 stage rotary vane backing p...

Страница 38: ...ing pump Ultimate pressure 48 hours after bakeout with backing pressure 5 mbar 500 Pa Pumped media WARNING Vent dangerous gases and gas mixtures safely Do not expose people to these gases If pumping hazardous gases or vapours observe the safety recommendations of the supplier of the gas vapour WARNING Do not use the pump to pump pyrophoric or explosive gas mixtures as it is not suitable for this p...

Страница 39: ... less than 20 by volume Water vapour Ensure that vapour does not condense inside the pump To pump a gas not in the list above contact the supplier for advice Failure to contact the supplier may invalidate the warranty on the pump The pump is not suitable for pumping aggressive or corrosive gases Venting gas specification and vent control data Although the pump may be vented to atmosphere high rela...

Страница 40: ...against time pump initially at full speed Materials exposed to gases pumped The following materials and component types are exposed to the gases pumped aluminium alloys stainless steels fluoroelastomer and nitrile O rings hydrocarbon lubricant felt rare earth magnets silicon nitride carbon fibre reinforced epoxy resin fire retardant polypropylene polyamide PVC Electrical connections Table 19 Elect...

Страница 41: ...0 item 6 Connector type RJ45 8 way Power supply 24 V d c nominal Maximum power rating 4 W Figure 14 Pin connections for 15 way sub miniature D type socket Table 20 Turbo pump connector pin out Pin Function 1 Power supply positive 2 Signal common 3 Start signal output 4 RS232 Tx 5 Serial enable output 6 Power supply positive 7 RS232 Rx 8 Power supply common 9 Speed signal input 10 Screen 11 Power s...

Страница 42: ...ess than one second so slow blow fuses must be used to prevent unnecessary fuse failure when the pump starts If using the pump at temperatures lower than 12 C 53 6 F the start up current will be drawn for longer this may cause the motor thermal overload device to open Table 22 Electrical data Supply Voltage 50 60 Hz Current A Power W Full load Start XDD1 nEXT85 100 3 1 310 120 2 6 310 200 1 6 310 ...

Страница 43: ...e laws governing the shipment of hazardous materials Note Some contaminated equipment may not be suitable for airfreight PROCEDURE 1 Contact Edwards and obtain a Return Authorisation Number for your equipment 2 Complete the Return of Edwards Equipment Declaration HS2 3 If the equipment is contaminated you must contact your transporter to ensure that you properly classify the hazard mark manifest a...

Страница 44: ... or sodium azide unless you Decontaminate the equipment Provide proof of decontamination YOU MUST CONTACT EDWARDS FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT Print your name _________________________________ Print your job title ____________________________________ Print your organisation ____________________________________________________________________________________ Print your address ______...

Страница 45: ......

Страница 46: ... Edwards Limited All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited edwardsvacuum com ...

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