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Dry Vacuum Pumps

nXR30i, nXR40i, nXR60i, nXR90i and

nXR120i

INSTRUCTION MANUAL

A90301880_C

Original instructions

edwardsvacuum.com

Содержание nXR120i

Страница 1: ...Dry Vacuum Pumps nXR30i nXR40i nXR60i nXR90i and nXR120i INSTRUCTION MANUAL A90301880_C Original instructions edwardsvacuum com ...

Страница 2: ...he content As far as practical we have ensured that the products have been designed and constructed to be safe and without risks when properly installed and used in accordance with their operating instructions We accept no liability for loss of profit loss of market or any other indirect or consequential loss whatsoever Product warranty and limit of liability are dealt with in our standard terms a...

Страница 3: ... 17 3 4 Electrical data 17 4 Installation 19 4 1 Installation safety 19 4 2 Unpack and inspect 19 4 3 Mechanical installation 20 4 4 Leak test the system 22 4 5 Electrical installation 22 4 5 1 Pump voltage setting 23 4 5 2 Connect the electrical supply 24 4 6 Connection for remote control and monitoring 24 5 Commission the pump 25 6 Operation 26 6 1 Operation safety 26 6 2 Operational modes 27 6 ...

Страница 4: ...rainer 39 7 4 Clean the external fan grill 40 7 5 Replace the pump bearings 40 7 6 Replace the pump controller 40 7 7 Electrical safety check 40 7 8 Service indicator codes 40 7 9 Service 41 7 9 1 Return the equipment or components for service 41 8 Fault finding 42 8 1 Alarm indicator codes 43 9 Storage 45 10 Disposal 46 11 Accessories 47 11 1 Electrical cables 47 11 2 Gas ballast adaptor 48 11 3 ...

Страница 5: ...rformance curve 16 Figure 8 nXR60i performance curve 16 Figure 9 nXR90i performance curve 17 Figure 10 nXR120i performance curve 17 Figure 11 Speed vs Power graph 18 Figure 12 Voltage selection plate 23 Figure 13 Logic interface connections parallel control 32 Figure 14 Logic interface connections analogue speed control 33 Figure 15 Analogue speed control 33 Figure 16 Gas ballast open close 36 05 ...

Страница 6: ... about safety operation or maintenance of the device please contact our nearest subsidiary Important safety information is highlighted as warning and caution instructions Obey these instructions WARNING If you do not obey a warning there is a risk of injury or death Different symbols are used according to the type of hazard CAUTION If you do not obey a caution there is a risk of minor injury damag...

Страница 7: ...ts Warning Heavy object Identifies a possible hazard from a heavy object Warning Dangerous voltage Identifies possible hazards from dangerous voltages Warning Protective earth ground Earth point for electrical equipment WEEE symbol The equipment must be discarded carefully Obey local and national reg ulations for disposal of this equipment Warning Use protective equipment Use appropriate protectiv...

Страница 8: ...umping system can be used in either transient or steady state gas load conditions The pump can sustain continuous operation with a maximum power consumption of 850 W When the load is more than 850 W motor power the speed temporarily reduces When high load passes the motor speed is increased or when the transient overload protection has recovered Refer to Table Performance data for information on m...

Страница 9: ...as ballast when water vapour is pumped The water vapour must not condense in the pump Refer to Performance data To use the pump for a gas that is not listed contact the supplier for advice Failure to contact the supplier can invalidate the warranty of the pump Do not use the pump for aggressive or corrosive gases Figure 1 nXRi pumps 05 2021 Edwards Limited Page 9 A90301880_C A90301880_C General de...

Страница 10: ...trol parallel through the 15 way D type interface connector Refer to Connection for remote control and monitoring on page 24 2 3 Interface control panel Figure 2 Interface panel 14 13 6 7 8 9 10 11 12 5 1 2 3 4 CS 3075 A 1 Start button 2 Sleep button 3 Standby increase button 4 Standby decrease button 5 Alarm indicator LED 6 Service indicator LED 7 Auto run indicator LED 8 Standby decrease indicat...

Страница 11: ...in number Signal Polarity 1 Valve 1 Control output Positive 2 Valve 2 Control output Positive 3 Valve 1 Return Negative 4 Valve 2 Return Negative Table 1 Auxiliary load currents Description Data Connector plug Phoenix part number SACC DSI M 8FS 4CON M12 0 5 Voltage output 24 V d c 25 10 18 V d c to 26 4 V d c Output power 2 Channels with 4 watts per channel Table 2 Recommended mating cable Mating ...

Страница 12: ...uto run setting The auto run LED displays the auto run setting The pump can be stopped by either manual parallel or serial control modes when in auto run mode Note Refer to Operation safety on page 26 for guidelines on how to configure different operational modes and any associated earnings to consider 2 6 Pump controller configuration The integral pump controller monitors the power and temperatur...

Страница 13: ... to IEC 60529 IP21 Enclosure protection tested according to UL50e and CSA C22 2 No 94 2 NEMA 1 Table 4 Environmental conditions Pollution Pollution degree 2 Installation Installation category II Altitude restriction Maximum 3000 m Area of use Indoor Table 5 Mechanical data Parameter nXR30i nXR40i nXR60i nXR90i nXR120i Mass 27 6 kg 29 6 kg 30 kg Inlet connection NW25 NW40 Overall dimensions L x W x...

Страница 14: ...aust pressure mbar g 200 Suck back protection Exhaust valve design Maximum pressure rise when stopped no inlet flow or gas ballast flow mbar 100 Maximum permitted gas ballast inlet pressure with gas ballast adaptor fitted bar g 0 5 Gas ballast flow l min 25 Maximum water vapor pumping rate with gas ballast applied kg hr 0 3 Typical ultimate pressure with gas ballast mbar 0 1 Leak tightness static ...

Страница 15: ...amber evacuation with the pump at rest than with the pump already operating at full rotational speed Figure 5 nXR120i application guidelines for chamber pump down 0 2 4 6 8 10 12 14 16 18 20 0 50 100 150 200 250 300 350 Gas flow slm Chamber volume litres GE 3806 A Table 8 Sound data Declared dual number noise emission values in accordance with ISO 4871 nXR30i nXR40i nXR60i nXR90i nXR120i Measured ...

Страница 16: ...ower consumption Watt 1 2 nXR40i 3 4 1 Pumping speed with gas ballast 2 Pumping speed without gas ballast 3 Power with gas ballast 4 Power without gas ballast 1 Pumping speed with gas ballast 2 Pumping speed without gas ballast 3 Power with gas ballast 4 Power without gas ballast Figure 8 nXR60i performance curve 0 01 0 1 1 10 100 1000 0 10 20 30 40 50 60 70 0 200 400 600 800 1000 1200 Pressure mb...

Страница 17: ... continuous speed with gas ballast 6 Non continuous speed without gas ballast 1 Pumping speed with gas ballast 2 Pumping speed without gas ballast 3 Power with gas ballast 4 Power without gas ballast 5 Non continuous speed with gas ballast 6 Non continuous speed without gas ballast 3 3 Materials exposed to gases pumped The materials and the components exposed to the gases in the pump are Iron Alum...

Страница 18: ...27 10 Single 50 or 60 14 0 Table 10 Recommended regional supply protection Area Voltage Protection rating UK 230 V 10 A 250 V a c rms Europe 230 V 10 A 250 V a c rms US 120 V 15 A 250 V a c rms Japan 100 V 15 A 250 V a c rms Figure 11 Speed vs Power graph 0 50 100 150 200 250 300 0 200 400 600 800 1000 1200 Pump rotational speed Hz Maximum power W 200V 100VRMS 190V 95VRMS 180V 90VRMS GE 3805 A 05 ...

Страница 19: ...pply to prevent accidental operation Electrical supplies are potentially hazardous energy sources Lockout and tagout before you do the maintenance Obey all national and local rules and safety regulations when you install the system Tighten the cables hoses and pipework during installation to prevent a trip hazard Make sure that the installation area is clean and free from debris and contamination ...

Страница 20: ...the pump if the pump is damaged 5 If the pump is not to be used immediately store the pump in the conditions given in Storage on page 45 6 The pump is supplied with sealed inlets and outlet to prevent the entry of dust and vapor Do not remove the seals until the pump is ready to be installed on the vacuum system 4 3 Mechanical installation WARNING HEAVY OBJECT Risk of physical injury Use suitable ...

Страница 21: ...CAUTION CONDENSATE DRAINAGE Risk of damage to equipment Use a catchpot to prevent the drainage of condensate back into the system Condensate that drains back into the system could damage the pump Obey the instructions that follow when you install the pump Make sure that there is no blockage to access the pump electrical supply cable or the other controls Make sure that there is a minimum air gap o...

Страница 22: ...the load on the coupling joints The pressure rating of the bellows must be higher than the highest pressure generated in the system We recommend that you use the manufacturer s bellows If you use an exhaust extraction system make sure that it is appropriate for use with all pumped process gases Make sure that the exhaust extraction system is not blocked or obstructed when the pump is in operation ...

Страница 23: ...protection WARNING ELECTRICAL CONNECTION Risk of electric shock Make sure that the pump is switched off and not connected to the electrical supply when you select the mains voltage 4 5 1 Pump voltage setting To set the correct voltage 1 Isolate the pump from electrical supply 2 Remove the screws on the voltage selection plate 3 Rotate the voltage selection plate to point towards the required volta...

Страница 24: ... to Table Recommended cord sets The pump must be grounded through the conductor of the mains input connector 4 6 Connection for remote control and monitoring To operate the pump with parallel or serial control the 15 way D type connector must be used Figure nXRi pumps 8 Refer to Figure Logic interface connections analogue speed control for details of the logic interface pins The pump is also equip...

Страница 25: ...nate contact us 5 Press the start button Figure Interface control panel 1 until the run indicator LED Figure Interface control panel 13 begins to flash 6 When the dry pumping system starts and continues to operate if an alarm condition is indicated A shut down the dry pumping system Refer to Shut down the pump on page 35 B refer to Fault finding on page 42 C if the problem has not been rectified c...

Страница 26: ...ically start the pump system once power is applied CAUTION CONDENSATE DEPOSITION Risk of damage to equipment Do not use the pump to pump particulates or condensate Deposition may occur within the pump which can degrade the pump performance and reduce the pump life CAUTION HIGH NOISE LEVEL Risk of hearing damage If the pump is operated with it s inlet open to atmospheric pressure the noise generate...

Страница 27: ...accelerate up to full running speed The run indicator will flash while the pump acceler ates The run indicator will remain on when the pump reaches full speed Select and de select the standby speed Standby mode select button When engaged the standby indicator will illuminate and the pump will run at the standby speed setting The pump is set by default at 70 of full speed Increase or de crease the ...

Страница 28: ...ts the product mechanism during the shutdown procedure by enabling the pump to relax back into its stopped state The soft stop mode is likely to be activated in ambient temperatures higher than 30 C During the soft stop mode the pump speed is halved and the cooling fan speed is increased to enable controlled cooling of the mechanism Once a pre defined temperature level has been met the pump will s...

Страница 29: ...the run indicator will flash at 50 duty while the rotational speed is changed Once steady state running speed has been reached both the run speed and standby indicators will be illuminated Service indicator Indicates that a service interval has been reached Alarm indicator Indicates an alarm has been triggered 6 3 Logic interface data The pumps have a 15 way D type logic interface connector locate...

Страница 30: ... voltage rating Open collector transistor plus pull up resistor OFF 4 7 k pull up diode to 12 V d c ON 0 8 V d c sinking 10 mA 10 mA 28 8 V d c FAIL status output Type Fail OK Maximum current rating Maximum voltage rating Open collector transistor plus pull up resistor OFF 4 7 k pull up diode to 12 V d c ON 0 8 V d c sinking 10 mA 10 mA 28 8 V d c Analogue 10 V reference 10 V d c analogue voltage ...

Страница 31: ...eed 10 V 100 speed 10 Chassis Screen Screen 11 10 V analogue refer ence Control output Positive 10 V analogue voltage reference output 5 mA unipolar output diode protected 12 Chassis Screen Screen 13 Not connected Unused control pin 14 Remote control input Connect to pin 2 0 V to enable remote control via parallel or serial control modes 15 Normal status output Logic low when the pump rotational s...

Страница 32: ...source must be referenced to the common control voltage of the pump control system i e pin 2 of the 15 Way D Type customer interface connector Alternatively if the FAIL output is connected to 10 V reference output of the control system i e pin 11 of the 15 Way D Type connector a 4 7 kOhm pull up resistor is recommended to be kept in the current rating of 10 V reference rail Figure 13 Logic interfa...

Страница 33: ...1 9 8 7 6 5 4 3 2 10 90 80 70 60 50 40 30 20 10 100 1 2 4 3 CS 1045 B 1 Upper speed clamp Maximum standby setting 250 Hz 2 Lower speed clamp Minimum standby speed setting 125 Hz 3 Active speed range 50 00 to 100 00 125Hz to 250 Hz 4 Active Voltage range 5 00 V to 10 00 V 1 Upper speed clamp Maximum standby setting 250 Hz 2 Lower speed clamp Minimum standby speed setting 125 Hz 3 Active speed range...

Страница 34: ...trol source is clamped at the minimum standby speed setting approximately 50 of the default run speed The maximum running speed provided by the analogue speed control source is clamped by the maximum standby speed setting 100 of the default run speed 6 8 Start the pump WARNING EXHAUST PIPELINE BLOCKAGE Risk of damage to equipment Do not operate the pump if the exhaust pipeline is restricted or blo...

Страница 35: ...riate control source use the stop button in manual control mode refer to Figure Interface control panel use the start stop control input in parallel control mode use stop command in serial control mode 4 Isolate the mains supply If the pump is to be stored we recommend you either keep the pump under vacuum or fill the pump with dry nitrogen to prevent condensation in the pump To keep the pump unde...

Страница 36: ...ontinue to be applied with the pump running for at least 1 hour after the water vapor source has been removed to enable the pump to dry Figure 16 Gas ballast open close 1 Position 0 gas ballast is closed 2 Position 1 gas ballast is open 1 Position 0 gas ballast is closed 2 Position 1 gas ballast is open 6 12 Gas ballast adaptor fit The manually operated gas ballast knob can be replaced by a gas ba...

Страница 37: ...ra silencer removal The pump is furnished by an additional removable silencer in the form of a drilled M12 plug that can be removed by allen key of size 10 Removal is advised when the exhaust of the pump is connected to additional exhaust pipeline to gain up to 2 m3 h in pumping speed from atmosphere 6 14 Mounting kit use A mounting frame is available as an accessory part number A90590000 This can...

Страница 38: ...on 2 Use suitable M8 screws to mount mounting frame at the target location 3 Lift or roll pump on the mounting frame with the pump back side aligned with the mounting frame 4 Use included screws and washers to fix pump to mounting frame 05 2021 Edwards Limited Page 38 A90301880_C A90301880_C Operation ...

Страница 39: ...and clean the inlet strainer on page 39 Inspect and clean the exter nal fan cover if required 12 No Clean the external fan grill on page 40 Replace the pump bearings 60 Yes Replace the pump bearings on page 40 Replace the pump controller 120 Yes Replace the pump controller on page 40 Electrical safety check 60 No Electrical safety check on page 40 Note The pump must be returned to the Service Tech...

Страница 40: ...e pump controller The service indicator flashing ON 3s OFF 3s is activated to indicate that the pump controller must be replaced Contact us for further details To reset the service indicator refer to Table Service indicator codes Controller replacement is not possible by the customer the pump must be returned to a Service Technology Centre for maintenance 7 7 Electrical safety check Test the earth...

Страница 41: ...ur employees and all other people involved in the service of your equipment The hazard information also lets us select the correct procedures to service your equipment We provide instructions for completing the form in the Declaration of Contamination of Vacuum equipment and Components Procedure HS1 If you are returning a vacuum pump note the following If a pump is configured to suit the applicati...

Страница 42: ...ormance against the performance curve shown in Technical data on page 13 Cause Blocked rotors Remedy When the pump gets hot and if debris may have been ingested or condensed within the pump the rotors may be stuck Let the pump cool down to room temperature then restart once operational run the pump with the gas ballast applied for at least 2 hours to try and clear any internal blockages If the pro...

Страница 43: ...ew flash sequence The duration of a long flash L is equal to 3 times the duration of a short flash 0 5 s Table 17 Flashing error codes Error flash position Error flash sequence Comment Actions 0 s s s s s s Overload timeout Check if the pump is not under constant high pressure or the inlet or outlet is not blocked 1 L s s s s s Controller software er ror Switch the power to the pump off and on and...

Страница 44: ...r flash sequence Comment Actions 6 s s s s s L Serial control mode in terlock Re activate the serial enable and send a serial command to clear the error code 05 2021 Edwards Limited Page 44 A90301880_C A90301880_C Fault finding ...

Страница 45: ...ntal configuration to prevent possible lubrication transfer To store the pump 1 Shut down the pump Refer to Shut down the pump on page 35 2 Disconnect the pump from the electrical supply 3 Place and secure protective covers over the inlet and outlet ports 4 Store the pump in a clean and dry condition until required for use 5 When necessary prepare and install the pump Refer to Installation on page...

Страница 46: ...ce Centres Each Service Centre offers a wide range of options including disposal Refer to Service on page 41 for more information Dry pump system materials suitable for recycling include cast iron steel PTFE stainless steel aluminium zinc alloy nickel mild steel ABS and polyamide Take particular care with Fluoroelastomers which may have decomposed as the result of being subjected to high temperatu...

Страница 47: ...ada 200 240 V Black SJT 3 x 14 AWG 300 V 90 C VW 1 fitted with an NEMA 6 15P plug and IEC60320 C19 cou pler with a maximum length of 2 m A50507006 North America 115 V Black SJT 3 x 18 AWG 0 75 mm2 250 VAC 25 C to 70 C V 2 fitted with a NEMA 5 15P plug A50507003 Cord set assem bly with no plug 20 A Black H05VV F 3 x 1 5 mm2 300 V 70 C fitted with an IEC 60320 C19 coupler and no plug with a minimum ...

Страница 48: ...n Item number Gas ballast blank adaptor A73501806 11 4 Valves Table 22 Valves Description Item number VIV40EKA 24 V d c Vacuum isolation valve with 24 V DC control A50637510 VIV LINK M8 Connector to valve Enables the connection be tween VIV valve and the pump through M8 connector A50637399 11 5 Mounting kit Table 23 Mounting kit Description Item number Mounting kit for cart floor A90590000 05 2021...

Страница 49: ...14 30 EU Electromagnetic compatibility EMC directive Class B Emissions Industrial Immunity 2011 65 EU Restriction of certain hazardous substances RoHS directive as amended by Delegated Directive EU 2015 863 Based on the relevant requirements of harmonised standards EN ISO 12100 2010 Safety of machinery General principles for design Risk assessment and risk reduction EN 1012 2 1996 A1 2009 Compress...

Страница 50: ...y Regulations 2016 Class B Emissions Industrial Immunity Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 2012 Relevant designated standards or technical specifications are as follows EN ISO 12100 2010 Safety of machinery General principles for design Risk assessment and risk reduction EN 1012 2 1996 A1 2009 Compressors and vacuum pumps Safe...

Страница 51: ... the product including any substance based requirements Article 33 1 Declaration EU UK This product contains Candidate List Substances of Very High Concern above 0 1 ww by article as clarified under the 2015 European Court of Justice ruling in case C 106 14 Lead Pb This substance is present in Brass pipe fitting and Brass connectors WASTE FRAMEWORK DIRECTIVE EU SCIP Number a55a7c71 7c7d 4b43 98f5 ...

Страница 52: ...ated diphenyl ethers PBDE 铜管管件 Brass pipe fitting X 0 0 0 0 0 铜接头 Brass connectors X 0 0 0 0 0 O 表示该有害物质在该部件的所有均质材料中的含量低于 GB T 26572 标准规定的限量要求 O Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit requirement in GB T 26572 X 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB T26572 标准规定的限量要求 X Indicates that the hazardous substance contained in at least...

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