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M561-00-880 Issue C

Page 22

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Technical data

Table 18 - Extraction rates required by system variant

System

Extraction rate required at top of enclosure
(m

/h)

Extraction rate required at exhaust cover
(m

/h)

iXH100

180

iXH200H

180

iXH450H

310

iXH500H

310

iXH610

180

iXH1210/H

180

iXH1220H/T

180

iXH1820/H/T

180

iXH3030/T

310

iXH3045H

310

iXH3050H

310

iXH4545HT

310

iXH4550HT

310

iXH6045H/T

310

iXH6050H/T

310

iXL250Q

180

iXL500Q

310

iXL500R

310

iXL750Q

310

iXL750R

310

Содержание iXH100

Страница 1: ...M561 00 880 Issue C Original Instruction Manual iXH iXL and pXH Dry Pumping Systems...

Страница 2: ...flow 5 Single Mode A Multi Mode 204 slm flow 44 slm flow B Multi Mode 96 slm flow C Multi Mode 133 slm flow D Multi Mode 204 slm flow Exhaust 0 r 1 Standard without check valve 2 r 3 Standard with che...

Страница 3: ...gh Voltage A None B r C r D r E 1800 F 3000 TMS System 0 Standard 1 r Exhaust 0 r 1 Standard without check valve 2 r 3 r Seals 0 r 1 r 2 Standard 3 EES Pump Motor 0 None 1 4 5 kW 2 7 5 kW 3 11 kW Boos...

Страница 4: ...asurement control and laboratory use EMC requirements Industrial Location Immunity Class A Emissions EN50581 2012 Technical Documentation for the Assessment of Electrical and Electronic Products with...

Страница 5: ...rt 1 General Requirements EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Industrial Location Immunity Class A Emissions EN50581 2012 Technical Documen...

Страница 6: ...rt 1 General Requirements EN 61326 1 2006 Electrical equipment for measurement control and laboratory Use EMC requirements Industrial Location Immunity Class A Emissions EN50581 2012 Technical Documen...

Страница 7: ...Electrical Equipment for Measurement Control and Laboratory Use Part 1 General Requirements EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Industrial...

Страница 8: ...ion manual Materials Content Declaration for all iXH iXL pXH models Product Product Label Meaning All iXH iXL500 and pXH models Indicates toxic or hazardous substance contained in at least one of the...

Страница 9: ...nnect the nitrogen supply 28 3 5 1 Flammable pyrophoric materials 28 3 5 2 Gas purges 29 3 6 Leak test the system 29 3 7 Electrical supply 29 3 7 1 Mains supply cable connection 31 3 8 Connect an addi...

Страница 10: ...ries 53 7 1 Introduction 53 7 2 Service 53 7 3 Ordering accessories 54 Appendix A1 Pump display terminal 57 A1 1 LEDs 57 A1 2 Pump start stop and control 57 A1 3 Warning Alarm display and acknowledgem...

Страница 11: ...ata 7 4 Loading data refer to Figure 5 8 5 Nitrogen purge data for iXH and iXL systems 9 6 Gas module types and flows 10 7 Electrical data iXH100 to iXH1820 H T 11 8 General electrical data 14 9 Elect...

Страница 12: ...A16 Alarms 68 A17 Hexadecimal to digital conversion 70 A18 Inverter alarm codes 71 A19 Inverter warnings codes 72 A20 Inverter diagnostic display text 73 Associated publications Publication title Pub...

Страница 13: ...TION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the e...

Страница 14: ...eet cyclic loadlock duty applications used in the flat panel and solar industries The pXH booster systems are not intended for use as stand alone units Each system must be backed using a suitable Edwa...

Страница 15: ...The front panel controls Figure 3 Front view of pumping system Note iXH 100 iXH 200H and iXH 610 variants have only two eyebolts provided for lifting Item Control connector identification 1 EMS butto...

Страница 16: ...Power LED green 5 System interface 6 Warning LED yellow 7 Running and Alarm LEDs 2 colours either green or red 8 Accessory interface 9 MicroTIM in control LED green 10 EMS interface 11 Micro TIM conne...

Страница 17: ...0 ISO63 NW40 105 iXH610 784 x 390 x 780 355 70 1 5 20 4 ISO100 NW40 105 iXH1210 H 784 x 390 x 780 413 430 70 1 5 20 4 ISO100 NW40 105 iXH1220H T 901 x 390 x 780 455 460 70 1 5 20 4 ISO100 NW40 105 iXH...

Страница 18: ...1 C decreasing linearly to 50 relative humidity at 40 C Maximum operating altitude 2000 m Pollution degree 2 IEC 61010 Materials in contact with process gas Pump shaft and rotors Cast Iron Steel Seals...

Страница 19: ...1210 H 1025 1065 5 x 10 3 1000 iXH1220H T 1200 1250 5 x 10 3 1000 iXH1820 H T 1700 1900 5 x 10 3 1000 iXH3030 T 2750 2900 5 x 10 3 1000 iXH3045H 3225 5 x 10 3 1000 iXH3050H 3200 5 x 10 3 1000 iXH4545H...

Страница 20: ...2 106 94 108 iXH1220H T 814 457 165 5 311 430 107 136 120 94 iXH1820 H T 814 400 165 5 311 433 134 127 112 118 iXH3030 T 829 395 230 436 545 183 147 131 164 iXH3045H 924 422 220 5 427 534 218 183 171...

Страница 21: ...5 Centre of gravity and levelling foot loads 2 4 Nitrogen purge data Note pXH systems do not have a nitrogen purge facility Table 5 Nitrogen purge data for iXH and iXL systems Characteristics Rating U...

Страница 22: ...6 Gas module types and flows For iXH systems Gas module type Description Module sizes available Total flow harsh setting Total flow medium setting Total flow with inlet purge Total flow with exhaust p...

Страница 23: ...20 A Recommended branch circuit fuse UL 200 230 V systems 25 45 55 55 35 35 45 45 45 A Recommended branch circuit fuse IEC 200 230 V systems 25 40 45 45 30 30 40 40 40 A Recommended branch circuit fu...

Страница 24: ...0 80 80 80 35 35 A Recommended branch circuit fuse IEC 200 230 V systems 45 65 65 65 65 65 65 30 30 A Recommended branch circuit fuse UL 380 460 V systems 30 40 40 40 40 40 40 20 20 A Recommended bran...

Страница 25: ...systems 20 40 32 78 74 A Recommended branch circuit fuse UL 200 230 V systems 50 100 80 170 160 A Recommended branch circuit fuse IEC 200 230 V systems 35 80 65 140 135 A Recommended branch circuit f...

Страница 26: ...tive earth ground conductor Must be fitted with cross sectional area at least equal to phase conductor size up to 16 mm2 Maximum permitted overcurrent protection for systems with the Han K 4 4 mains c...

Страница 27: ...35 mm2 fine stranded wire VDE 0295 class 5 refer to Table 10 Or Harting Han Axial Screw module 200A 3 off required part number of mating half suitable for 25 40 mm2 wire is 09 14 001 2763 or 09 14 00...

Страница 28: ...istor open collector Gate valve position sense Pin 7 Closed Pin 8 Open Power Supplies Pin 12 Accessory 24 V supply Pin 13 Accessory 24 V supply Pin 5 0 V supply common 24 V d c 0 75 A 24 V d c 0 2 A T...

Страница 29: ...5 bar Minimum required pressure differential across supply and return Refer to Table 13 Supply temperature range Refer to Table 12 Water type Treated or non corrosive industrial Maximum particle size...

Страница 30: ...Technical data Table 12 Cooling water supply temperature Cooling water supply temperature Units Applies to pump models 10 30 C iXH100 iXH200H iXH610 iXH1210 H iXH1220H T iXH1820 H T iXH3030 T iXL250Q...

Страница 31: ...valved system and the Rated Min Pressure Differential may not correlate with water flow rates stated in the table under all operating conditions The Rated Min Pressure Differential is required to main...

Страница 32: ...emperature 106 C Typical booster heater power consumption 1 kW Test Parameters Tracer gas SF6 Sulphur Hexafluoride Tracer gas concentration 100 Tracer gas release rate 2 slpm Tracer gas release points...

Страница 33: ...m Pass Fail Chlorine Cl2 1 0 5 0 125 2 0 079 0 04 Pass Ammonia NH3 10 25 6 25 2 0 079 0 40 Pass Arsine AsH3 0 1 0 05 0 0125 2 0 079 0 00 Pass Boron Trichloride BCl3 1 5 1 25 2 0 079 0 04 Pass Carbon M...

Страница 34: ...raction rate required at top of enclosure m3 h Extraction rate required at exhaust cover m3 h iXH100 180 0 iXH200H 180 0 iXH450H 310 60 iXH500H 310 60 iXH610 180 0 iXH1210 H 180 0 iXH1220H T 180 0 iXH...

Страница 35: ...product configurators at the start of this manual If in doubt consult Edwards Disconnect the other components in the process system from the electrical supply so that they cannot be operated accident...

Страница 36: ...3 Remove the lifting eyebolts and replace with the lifting eyebolt hole plugs supplied with the systems 4 Ensure that access is possible to the emergency stop button refer to Figure 2 item 1 if not u...

Страница 37: ...ping system to your vacuum exhaust system WARNING Pipe the exhaust to a suitable treatment plant to prevent the discharge of dangerous gases or vapours to the surrounding atmosphere WARNING Do not tou...

Страница 38: ...uge in the inlet pipeline so that you can determine that the dry pumping system operates correctly You must be able to isolate the dry pumping system inlet from the atmosphere and from your vacuum sys...

Страница 39: ...tion When connected the airflow operates continuously and will extract substances of concern that may be released during a failure Refer to Section 2 8 for extraction rates required for each pump mode...

Страница 40: ...sion or possibly friction If ignition occurs then the following may happen High pressures could occur within the pump and may not be contained A flame front could travel back up the foreline A flame f...

Страница 41: ...e if the flow rate falls below that required then the flow of flammable gases or vapours to the pump must be stopped 3 6 Leak test the system Note If you need further information on leak testing conta...

Страница 42: ...oad protection refer to Section 2 5 Pump rating information can be found on the label on the rear of the pump If you connect the electrical supply to your system through an ELCB or RCD depending on te...

Страница 43: ...riate figure Note The Protective Earth connection on the Han 100A connector is on the hinged frame It may be necessary to use one of the cable shoes provided in the connector kit to fit the protective...

Страница 44: ...in place Connect the other end of your electrical supply cable to your electrical supply through a suitable isolator Figure 8 The Harting Han K 4 4 cable mounted connector Low volt pin configuration...

Страница 45: ...on M561 00 880 Issue C Figure 9 The Harting 100A axial screw module cable mounted connector Low volt pin configuration High volt pin configuration Pin identification Pin A1 Phase 1 Pin A2 Phase 2 Pin...

Страница 46: ...ds Limited Installation Figure 10 Customer connection kit combination low volts iXL750 Item Identification 1 24 Frame hood 6 module A F 2 200A female insert 4 70 mm2 3 24 Hood M50 4 CONDUIT SLEEVE KIT...

Страница 47: ...hat can be connected into your own control equipment In this case the emergency stop control should be compliant with IEC 60947 5 1 a red self latching mushroom push button on a yellow background If y...

Страница 48: ...d outlet 3 Connect your water return hose to the cooling water outlet Figure 4 item 18 fit a water flow meter into the water supply line close to the pump and then connect your water supply hose to th...

Страница 49: ...tion system are open 4 Ensure that all openings to atmospheric pressure in the foreline vacuum system are closed 5 Press the LOCAL CONTROL button Figure 2 item 5 and check that the green LOCAL CONTROL...

Страница 50: ...therefore fit suitable measurement equipment in the nitrogen supply pipeline If you fit a rotameter ensure that it is suitable for use with nitrogen and that it is correctly calibrated If the nitrogen...

Страница 51: ...removed or damaged and do not touch any parts of the pump s when the system is on Surfaces of the pump s are very hot and can cause injury to people In accordance with Semi S2 hot surface warning labe...

Страница 52: ...h the PDT press Control button The message PDT1 IN CONTROL will be displayed if the front connection is used and the message PDT2 IN CONTROL will be displayed if the rear connection of the iXH iXL is...

Страница 53: ...king it difficult to restart the pump next time To prevent this problem a special ramped shut down can be performed Contact Edwards for more information 4 3 2 MicroTIM operation Use your control equip...

Страница 54: ...ll be ignored and the pump s will continue to operate For safety reasons some alarms cannot be overridden and the system will automatically shut down even if you have selected Run til crash Refer to T...

Страница 55: ...n remedied the system should be left for a minimum of 30 minutes before attempting to restart Table 20 Pump protection sensors Sensor Warning condition triggered Alarm condition triggered Exhaust pres...

Страница 56: ...mp after an emergency stop or automatic shut down Note If the system has automatically shut down because of high pump power check that the pump is free to rotate before you restart the system contact...

Страница 57: ...st the system after maintenance and seal any leaks found to prevent leakage of dangerous substances out of the system and leakage of air into the system WARNING Obey the safety instructions given belo...

Страница 58: ...eets for fluorinated materials used in the pump are available on request The system requires little user maintenance Pump protection sensors fitted to the system do not require routine maintenance The...

Страница 59: ...the vacuum and exhaust systems and fit blanking caps 5 If necessary disconnect the air extraction port from your factory extraction system 6 If necessary disconnect any accessories from the system 7 A...

Страница 60: ...aning materials containing abrasives The system is given a charge of oil before it leaves the factory You should not need to check or adjust oil levels between major overhauls We recommend that you ca...

Страница 61: ...1 Remove the left hand side panel of the pumping system 2 Identify the gas module Contact Edwards for guidance 3 Use a short flat blade screwdriver to turn the adjustment screw on the front of the gas...

Страница 62: ...ions Use the following procedure 1 Access the Config menu on the PDT requires an access code contact Edwards 2 Scroll to Temp Setpoints press ENTER 3 Scroll to Set DP Temp or Set MB Temp press ENTER 4...

Страница 63: ...Each Service Centre offers a wide range of options including disposal Refer to Section 7 2 for more information Pump system materials suitable for recycling include cast iron steel PTFE stainless ste...

Страница 65: ...equipment 2 Serial number if any 3 Item Number and description of the part 7 2 Service Edwards products are supported by a world wide network of Edwards Service Centres Each Service Centre offers a wi...

Страница 66: ...ems A50790000 Nitrogen flow switches Suitable for 0 60 slm A50784000 Suitable for 0 204 slm A50785000 Utilities kit contains mating half quick connectors for cooling water and electrical connector mat...

Страница 67: ...If you wish to use an exhaust check valve on a system with an NW40 exhaust you will need to order the correct kit for your particular system refer to Table 24 A50768000 M56930012 Pumping system model...

Страница 69: ...il it is acknowledged by pressing ENTER when it goes continuous until the warning clears Alarm Red illuminates to indicate that a pump alarm is present It flashes when a new alarm occurs until it is a...

Страница 70: ...wed in the Status menu see below Some Alarms such as 1 01 STOP ACTIVATED remain present until the pump is manually started from the PDT or front panel controls Once all warning alarm conditions have g...

Страница 71: ...ical Display Serial Number S N 1234567 Control Holder NONE IN CONTROL Dry Pump current DP CURRENT 1 1A Booster current MB CURRENT 1 1A pXH Booster current PB CURRENT 1 1A Green Mode state GREEN MODE S...

Страница 72: ...STOP 900 Active Alarms and Warnings if present The PDT returns the serial number of the system it is plugged directly into For example if an iXH is being used to control a pXH the PDT can be plugged i...

Страница 73: ...he Setup menu Each inverter fault history contains up to 32 entries each contains one alarm and one warning where 1 is the most recent Scroll by pressing up down keys Press CANCEL to exit back to the...

Страница 74: ...p menu Scroll by pressing up down keys Press ENTER to open a sub menu or CANCEL to exit back to the Setup menu Display only items press CANCEL to exit back to the IP Configuration menu Table A10 FIT A...

Страница 75: ...TER to select the parameter for display or CANCEL to exit back to the SELECT LINE menu UNITS Units to display Scroll by pressing up down keys Press ENTER to open a sub menu or CANCEL to exit back to t...

Страница 77: ...e handled by the PDT Table A15 lists the warning messages that might be displayed on the PDT with possible causes and actions you should take Table A15 Warnings Warning Message on PDT Action Message o...

Страница 78: ...sor is fitted and is correctly connected Warning 55 13 Sensor missing The dry pump temperature sensor may have become disconnected or failed Check that the sensor is fitted and is correctly connected...

Страница 79: ...k the wiring and air supply to the Gate valve Note This warning will only clear when the valve has successfully been closed and opened Warning 176 01 MB INV xxxx yyyy xxxx yyyy aaaaaaaaaaaaaaaa Booste...

Страница 80: ...to be displayed Refer to Appendix A1 3 for more information on how alarms are handled by the PDT Table A16 lists the alarm messages that might be displayed on the PDT with possible causes and actions...

Страница 81: ...Not Running See manual Booster Inverter will not start up when requested Check inverter fault history Alarm 176 13 No MB Inv Comms See manual The pump controller cannot communicate with the booster i...

Страница 82: ...gits from 0 to F To determine the cause of a warning or alarm you must first decode each hexadecimal number 0 indicates that there is no alert for that bit Normally you will only see codes of 1 2 4 or...

Страница 83: ...ead for address data rate un initialised analogue input channel 4 OSTEST _FAULT Internal fault contact Edwards 2 EEPROM_FAULT Inverter diagnostic registers also checked as per Table A20 and text outpu...

Страница 84: ...lve stuck closed or water pipe to inverter blocked 6 8 HIGHTC Controller temperature above upper limit Controller temperature sensor open circuit check water supply 4 HIGHTS Inverter heat sink tempera...

Страница 85: ...W_VCC__ 0x0400 0x0000 EEPROM_WRITEFAIL 0x0200 0x0000 EEPROM_TIMEOUT__ 0x0100 0x0000 EEPROM_BYTECOUNT 0x0080 0x0000 FLASH_BOOT_CRC__ 0x0040 0x0000 FLASH_WRITE_FAIL 0x0020 0x0000 FLASH_BLOCK_CRC_ 0x0010...

Страница 87: ...remain in the state that they were in prior to the communication failure and outputs to the MicroTIM are unaffected It is important to note however that control might be released from the device that...

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