Edwards A313-01-985, Инструкция по эксплуатации

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Installation
A313-01-880 Issue A
3.11 Connect the pump-inlet and outlet

Do not exceed the load limits on the pump-inlet and outlet flanges as specified in Figure 5 . If you do, there
will be a risk of leakage of process gases from the HV pump, or of damage to the HV pump.

If you fit an isolation valve between the HV pump and the backing pump, you must interlock the operation of
the valve with the operation of the HV pump, so that closure of the valve results in shut-down of the HV
pump.

Ensure that your backing pump and exhaust-extraction/abatement systems comply with the critical backing
pressure requirements of
Section 2.2 and 2.3 .
You must connect the inlet of the HV pump to your vacuum system, and connect the outlet of the HV pump to your
backing pump and exhaust-extraction/abatement systems, as required.
Refer to Section 2.8 for the inlet and outlet flange connection details.
Take note of the following when you connect your HV pump to the vacuum system.

Use suitable gaskets/seals to make the inlet and outlet connections.

Use the correct number and size of bolts to secure the inlet and outlet flanges: refer to Figure 3 .

For optimum pumping speeds, ensure that the pipeline connected to the pump-inlet is as short as possible
and has a bore size not less than the inlet port diameter.

Use a flexible connection in the pipeline from the vacuum system to the HV pump to reduce vibration and
stress in the system pipelines (see
Section 3.2 ).

On very dusty applications, use a low-impedance inlet-filter to minimise abrasion in the HV pump.
3.12 Commission the HV pump
After you have installed the HV pump, use the following procedure to commission it and prepare it for subsequent
operation:
1. Ensure that any isolation valves in the pump inlet and outlet pipelines are in the correct ‘open’ positions.
2. Ensure that any other components in the system pipelines (such as filters) have been correctly installed and
configured for operation.
3. Start up the HV pump: refer to Section 4.2 .
4. Operate the HV pump, with no gas load, for at least 15 minutes. During this time:

Monitor the external surfaces of the pump and check for ‘hot spots’ (that is, areas which are unusually hot).

If any hot spots persist at the end of the 15 minutes, contact your supplier or Edwards for advice.
5. Continue to operate the pump with a representative gas load, and check that the pump operates correctly and
provides the required performance.
If necessary, refer to Section 5.9 if any fault conditions occur.
6. Shut down the HV pump: refer to Section 4.3 .
The pump is now ready for normal operation when required.
WARNING
Obey the safety instructions given below. If you do not, you can cause injury to people or damage
to the pump.