EBARA ESA500W, Инструкция по эксплуатации, Страница: 13 / 81

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xi
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PM10U
EBARA
CORPORATION
6. LCD Controller .............................................................................................. 25
6.1 LCD Outline ................................................................................................ 25
6.2 LCD Indication ........................................................................................ 26
6.3 Setting the operational mode.................................................................. 30
6.3.1 Setting the pump operation control mode........................................ 32
6.3.2 Setting the DIP switch .....................................................................32
6.3.3 Setting the pump running mode ......................................................33
6.3.4 Setting the BP normal rotational speed.........................................33
6.3.5 Setting the rotational speed in the LOW SPEED mode................... 33
6.3.6 Setting the pump N2 flow ................................................................34
6.3.7 Setting the WARNING value for the back pressure (option)............ 35
6.4 Dip Switch............................................................................................... 36
6.5 Dip Switch setting display ....................................................................... 40
6.6 Starting/stopping the pump with the LCD controller................................ 41
7. Operation ...................................................................................................... 42
7.1 Before Starting........................................................................................ 42
7.2 START/STOP ......................................................................................... 44
7.2.1 LOCAL Start/Stop................................................................................ 45
7.2.2 REMOTE Start/Stop ............................................................................ 46
7.2.3 COMMUNICATION Start/Stop............................................................. 47
8. Maintenance and Inspection ......................................................................... 48
8.1 Internal energies..................................................................................... 48
8.1.1 Power source....................................................................................... 48
8.1.2 Cooling water....................................................................................... 48
8.1.3 N2 gas ................................................................................................. 48
8.2 Routine Inspection.................................................................................. 49
8.3 Vacuum and Exhaust Piping................................................................... 51
8.4 Lubricant Oil ........................................................................................... 52
8.5 Spare (Maintenance) Parts List .............................................................. 55
8.6 List of wastes during maintenance ......................................................... 56
8.7 Overhaul ................................................................................................. 57
9. Disconnection and Transportation ................................................................ 58
10. Troubleshooting .......................................................................................... 61
10.1 Troubleshooting (1) Basic trouble......................................................... 61
10.2 Troubleshooting (2) WARNING ............................................................ 63
10.3 Troubleshooting (3) ALARM ................................................................. 65
10.4 Troubleshooting (4) Option ................................................................... 68