Technical Newsletter
#tnl2019-0008e-rev1
# 5 / 5
Procedures to replace the brush/leveling stone of the T2 pad washing unit (Continued)
Step No.
Procedure
12
Install the new leveling stone and tighten the set screws on the holder lateral side (3 pcs).
・
Install it so that the leveling stone's lateral side and the holder's lateral side are flat.
【
OK
】
【
NG
】
When viewing the leveling stone from the top
Holder
13
Looking at the leveling stone from the lateral side, verify whether its lower surface is
touching the holder.
【
OK
】
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NG
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When viewing the leveling stone from the lateral side
Holder
If the leveling stone's lower surface is not touching the holder:
Remove the leveling stone from the holder and attach it again.
14
Install the holder of the leveling stone with the hexagon socket head cap screws (3 pcs).
15
Close the grinding section side cover at the Z1 side.
16
Effect initialization of the machine.
17
Perform the cleaning of the transfer arm 2 pad through the handy panel.
→
Refer to Section 2-3-4, [Operation Screens for Transfer Arm 2] of Chapter G in the
Maintenance Manual for operation details of the transfer arm 2.
18
Make sure that there is no problem with the transfer arm 2 pad cleaning result.
19
Disconnect the handy panel from its connector.