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Technical Newsletter 

#tnl2019-0008e-rev1  
# 4 / 5 

 

  

Procedures to replace the brush/leveling stone of the T2 pad washing unit (Continued) 

 

Step No. 

Procedure 

10 

Remove the hexagon socket head cap screws (3 pcs) and remove the leveling stone 
together with the holder. 

・

The size for the hexagon socket head cap screws is M5 for the DFG8540/DFP8140, and 
M4 for the DFG8560/DFP8160. 

・

Do not adjust the 3 set screws next to the hexagon socket head cap screws. The 3 set 
screws are for adjusting the level of the leveling stone. 

 

 

Leveling stone

Set screw 

Hexagon socket head cap 
screw 

Set screw 

Holder 

 

11 

Remove the leveling stone after loosening the set screws (3 pcs) at the lateral side of the 
holder. 

・

The size for the set screws is M5 for the DFG8540/DFP8140, and M4 for the 
DFG8560/DFP8160. 

 

Leveling stone 

 

Set screw 

Holder 

Содержание DFG8540

Страница 1: ... replacement Part No The part ID for each replacement part is different depending on the model Also some user specified specification machines are equipped with the sponge instead of the brush Please be careful For details regarding the sponge please contact DISCO DFG8540 DFP8140 Item DISCO Part ID Qty Brush BRUSH LJLH 910584 0 1 Leveling stone WASHING BOARD LJAH 010006 1 1 DFG8560 DFP8160 Item DI...

Страница 2: ...here is a risk that the leveling stone will not press against the T2 pad and it will not be possible to perform T2 pad cleaning appropriately Leveling stone Set screw Hexagon socket head cap screw Set screw Step No Procedure 1 Connect the handy panel at the Z1 side 2 Move the brush of the washing unit to the washing center position Refer to Section 2 3 8 Operation Screens for Washing Unit of Chapt...

Страница 3: ... BRUSHING STONE SET BRUSH SET WASH SEQ STONE WASH SEQ BRUSH 5 Press MOVE T ESCAPE key The transfer arm 2 pad moves to the chuck table side 6 Press BRUSH SET key The brush will rotate and the brush side will face upward 7 Open the grinding section side cover at the Z1 side 8 Remove the brush after removing the hexagon socket head cap screws M4 2 Brush Hexagon socket head cap screw Hexagon socket he...

Страница 4: ...ews is M5 for the DFG8540 DFP8140 and M4 for the DFG8560 DFP8160 Do not adjust the 3 set screws next to the hexagon socket head cap screws The 3 set screws are for adjusting the level of the leveling stone Leveling stone Set screw Hexagon socket head cap screw Set screw Holder 11 Remove the leveling stone after loosening the set screws 3 pcs at the lateral side of the holder The size for the set s...

Страница 5: ...iewing the leveling stone from the lateral side Holder If the leveling stone s lower surface is not touching the holder Remove the leveling stone from the holder and attach it again 14 Install the holder of the leveling stone with the hexagon socket head cap screws 3 pcs 15 Close the grinding section side cover at the Z1 side 16 Effect initialization of the machine 17 Perform the cleaning of the t...

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