DISCO DFG8540, Технический бюллетень, Страница: 3 / 5

Technical Newsletter
#tnl2019-0008e-rev1
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Procedures to replace the brush/leveling stone of the T2 pad washing unit (Continued)
Step No. Procedure
4
Press ">P" key twice.
・ The following screen appears.
R #305 T.ARM2 / P.WASH.OPT.2 <P N>
Z: ###.## mm
T: ###.##

VAC: ### kPa
MOVE
T SCRUBBING MOVE
T ESCAPE MOVE
T BRUSHING
STONE
SET BRUSH
SET
WASH SEQ
(STONE) WASH SEQ
(BRUSH)
5
Press "MOVE T ESCAPE" key.
・
The transfer arm 2 pad moves to the chuck table side.
6
Press "BRUSH SET" key.
・
The brush will rotate and the brush side will face upward.
7
Open the grinding section side cover at the Z1 side.
8
Remove the brush after removing the hexagon socket head cap screws (M4 × 2).
Brush Hexagon socket head cap screw
Hexagon socket
head cap screw
9
Install a new brush with the hexagon socket head cap screws (M4 × 2).