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READ CAREFULLY BEFORE USING THIS
MANUAL

Introduction

This machine is a dicing/cutting saw for cutting silicon wafers, glass, ceramics
and VTR heads (workpieces, hereafter).
It has the rotary sections which rotate at high speed, the high-voltage sections
which may cause electric shock hazards and the drive sections which may
catch the operator's body or clothing.
If the machine is not properly operated, safety hazards may cause serious
injury or death.

Read before using the machine

Before using the machine, thoroughly read this manual and follow the
instructions set forth in this manual.

To assure safety in the operation and maintenance of the machine, it is
important that you know the location of potential safety hazards. It is difficult
for DISCO to foresee each and every potential safety hazard. However, this
manual carries various precautionary notes and warnings to indicate the
presence of all foreseeable potential safety hazards. For increased safety
assurance, it is therefore essential that you observe all the precautions and
other relevant instructions set forth in this manual.

If you modify the machine without prior consent of DISCO or repair it in a
manner not stated in this manual, the safety assurance features of the machine
may be seriously affected.

Never attempt to modify or repair the machine in a manner not approved by
DISCO.

Sample

Содержание DAC552

Страница 1: ...d or reproduced in any form or by any means without the express written permission of Disco Also this document may not be disclosed or transferred to third parties This document is printed on recyclab...

Страница 2: ...nual To assure safety in the operation and maintenance of the machine it is important that you know the location of potential safety hazards It is difficult for DISCO to foresee each and every potenti...

Страница 3: ...critical situation in which either critical injury or death is very likely to result This symbol is used for the incident in which the injury is critical and there is high probability of occurrence WA...

Страница 4: ...ot place your hands or fingers near the blade or flange Ensure that the waterproof cover is kept closed Driving Section Label CAUTION CAUTION It is possible that yours hands and fingers may be caught...

Страница 5: ...al Be sure that the machine is installed and adjusted by a qualified person who has completed DISCO s education curriculum hereafter referred to as the maintenance personnel Definition of a manager an...

Страница 6: ...e performed by operators Data Maintenance Manual Data maintenance personnel Screen contents for data entry and data entry procedures Maintenance Manual Maintenance personnel Servicing inspection and a...

Страница 7: ...Cutting Section Cuts workpieces Operating Control Section Keys on the operation panel are used for data entries and operations Also the monitor displays operation related information in accordance wit...

Страница 8: ...huck table vacuum pressure to attract the workpiece to the chuck table Flowmeter Indicates the flow rate of the wheel coolant water Floppy disk drive Functions as an external storage device Optional a...

Страница 9: ...t Y axis Z axis axis Main body frame Front Name Function X axis Moves the chuck table to the right and the left Y axis Moves the spindle shaft and the microscope forward and backward Z axis Moves the...

Страница 10: ...axis Spindle shaft Y axis Z axis Main body frame Front Name Function X axis Moves the chuck table to the right and the left Y axis Moves the spindle shaft and the microscope forward and backward Z axi...

Страница 11: ...t Y axis Z axis axis Main body frame Front Name Function X axis Moves the chuck table to the right and the left Y axis Moves the spindle shaft and the microscope forward and backward Z axis Moves the...

Страница 12: ...tions to Be Observed During Operation A 5 4 Inherently Hazardous Areas and Ways to Avoid Hazards A 11 4 1 Inherently Hazardous Areas for Operation and Ways to Avoid Hazards A 12 4 2 Inherently Hazardo...

Страница 13: ...C 19 2 1 2 Hoisting and lowering the machine by a handlift C 23 2 2 Transferring the Machine C 26 2 3 Installing the Machine with Adjusters C 28 2 4 Removing Electrical Box Metal Fixtures C 30 2 5 Re...

Страница 14: ...ircuit breaker section cover C 62 3 2 3 Removing the circuit breaker section cover C 65 3 2 4 Removing the top cover C 67 3 3 Securing Drive Axes C 68 3 4 Fixing Main Base C 73 3 5 Disconnecting Pipin...

Страница 15: ...ety Precautions to Be Observed During Operation Safety precautions that operators should understand before operation Safety precautions that operators should observe during performing any work 4 Inher...

Страница 16: ...uct the workers who perform installation to read the safety precautions set forth in the Installation Manual before proceeding to work Also if the workers perform various tasks direct them to read the...

Страница 17: ...lfill legal requirements use the sampling port which is provided at the location indicated below connection port Rc1 4 Duct Sampling port Rc1 4 Facility side interlock connection terminal Special user...

Страница 18: ...inst the body of the personnel which results in death or serious injury When the machine is hoisted stay away from the area beneath the machine and from its surrounding area Lifting crane handlift and...

Страница 19: ...e of any moving parts When the machine interior or floor get wet with water If you operate the machine while its interior or floor get wet with water you may receive electric shock that could result i...

Страница 20: ...el While a maintenance task is being performed no one must touch the machine except the maintenance personnel for detailed interlock operation descriptions see section 7 of this chapter Interlock Mech...

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