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HYBRID Coater Service Manual ver1.1
Chapter 3
19
3.7
Detection of Exhausted Air
Detection if the exhaust capacity of the dome in the bottom of the working area is sufficient,
is done by an Differential Pressure Switch which is mounted on the right hand side inside the
front compartment. Its air lines are connected to the pipe underneath the bottom of the
working area. This pipe contains a constriction and the pressure difference is measured
before and after this constriction. The difference is then monitored by the Differential
Pressure Switch.
3.8
X and Y Movement
Both X and Y movement are done by means of the stepper motor which is connected via a
coupling to a spindle. One revolution of the spindle gives a movement of 10mm. On the
beam two vane switches are present for detecting the outer Y limits of the machine. The
vane switches will be interrupted when reaching a limit. In the middle also an interruption of
the vanes occurs over a small distance. This is used for guarding the position system. For
the X movement vane switches are present at the head. Also here guarding of the position
system is present. See wiring diagram HC-0200-0002 for more information.
Spare parts:
EL-07164
Vane switch of photo interrupter OPB815W
HC-100-SS-53
Stepper motor SECM-268-E3.0A with connector
Содержание HC-100
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