DH Instruments MOLSTIC-S, Руководство по эксплуатации и обслуживанию

Страница: 3 / 44

TABLE OF CONTENTS
Page I © 2004-2007 DH Instruments, a Fluke Company
T
T
A
A
B
B
L
L
E
E
O
O
F
F
C
C
O
O
N
N
T
T
E
E
N
N
T
T
S
S
T A B L E O F C O N T E N T S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I
T A B L E S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I I I
F I G U R E S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I I I
1 .
I N T R O D U C T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 PRODUCT OVERVIEW ...........................................................................................................................1
1.2 SPECIFICATIONS ...................................................................................................................................1
1.2.1 GENERAL SPECIFICATIONS.......................................................................................................................1
1.2.2 COMPONENT IDENTIFICATION OF THE AVAILABLE MOLSTIC-S CONFIGURATIONS........................2
1.2.2.1 MOLSTIC-S, SINGLE 1/4 IN., STANDARD CONFIGURATION ................................................................2
1.2.2.2 MOLSTIC-S, SINGLE 1/2 IN., STANDARD CONFIGURATION ................................................................3
1.2.2.3 MOLSTIC-S, DUAL 1/4 IN., STANDARD CONFIGURATION....................................................................4
1.2.2.4 MOLSTIC-S, DUAL 1/2 IN., STANDARD CONFIGURATION....................................................................5
1.2.2.5 MOLSTIC-S, SINGLE 1/4 IN., WITH REGULATION .................................................................................6
1.2.2.6 MOLSTIC-S, SINGLE 1/2 IN., WITH REGULATION .................................................................................7
1.2.2.7 MOLSTIC-S, DUAL 1/4 IN., WITH REGULATION .....................................................................................8
1.2.2.8 MOLSTIC-S, DUAL 1/2 IN., WITH REGULATION .....................................................................................9
1.2.2.9 MOLSTIC-S, SINGLE 1/4 IN., WITH LOW- OR MID- FLOW METERING VALVE ..................................10
1.2.2.10 MOLSTIC-S, DUAL 1/4 IN., WITH LOW- OR MID- FLOW METERING VALVE......................................11
1.2.2.11 MOLSTIC-S, SINGLE 1/4 IN., WITH LOW- OR MID- FLOW METERING
VALVE AND REGULATION.....................................................................................................................12
1.2.2.12 MOLSTIC-S, DUAL 1/4 IN., WITH LOW- OR MID- FLOW METERING VALVE AND REGULATION.....13
2 .
I N S T A L L A T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 5
2.1 UNPACKING AND INSPECTION .......................................................................................................... 15
2.1.1 REMOVING FROM PACKAGING ...............................................................................................................15
2.1.2 INSPECTING CONTENTS...........................................................................................................................15
2.1.2.1 ACCESSORIES INCLUDED WITH MOLSTIC-S SHIPMENTS ...............................................................15
2.2 SITE REQUIREMENTS.......................................................................................................................... 16
2.3 INITIAL SETUP......................................................................................................................................16
2.3.1 PREPARATION FOR OPERATION ............................................................................................................16
2.3.2 INSTALLATION AND SWAPPING OF MOLBLOC-S .................................................................................16
2.3.2.1 REPLACING VCR INLET FLANGES ON MOLBLOC-S (AS REQUIRED) ..............................................16
2.3.2.2 INSTALLATION OF MOLBLOC-S ONTO MOLSTIC-S............................................................................18
2.4 MOLSTIC-S INTERCONNECTIONS .....................................................................................................20
2.4.1 GAS SUPPLY CONNECTIONS TO MOLSTIC-S ........................................................................................20
2.4.1.1 MOLSTIC-S USE WITH DHI SUPPLIED REGULATORS .......................................................................21
2.4.1.2 MOLSTIC-S USE WITH REGULATORS NOT SUPPLIED BY DHI .........................................................22
2.4.2 INLET CONNECTION - MOLSTIC-S USE WITH DUT UPSTREAM...........................................................22
2.4.3 INLET CONNECTION - MOLSTIC-S USE WITH DUT DOWNSTREAM ....................................................24
2.4.4 OUTLET CONNECTION - MOLBLOC-S OUTLET CONNECTION ............................................................24
2.5 CONNECTING, DISCONNECTING AND MOUNTING MOLBLOC-S
™
WITH ISO-KF STYLE VACUUM FLANGE (MOLBLOC-S OUTLET FITTING) .....................................24
2.5.1 ISO-KF STYLE VACUUM FLANGE FITTINGS...........................................................................................24
2.5.2 MAKING AND BREAKING PROCEDURE FOR MOLBLOC-S ISO-KF
VACUUM FLANGE CONNECTION.............................................................................................................25
2.5.2.1 MOLSTIC-S USE WITH DUT UPSTREAM..............................................................................................25
2.5.2.2 MOLSTIC-S USE WITH DUT DOWNSTREAM .......................................................................................25