Cee® Apogee™ 300 Bake Plate Manual
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3.6. Start Up
*For detailed software information, please refer to the DataStream™ manual
1.
Install the tool as shown earlier in Section 4.
2.
Press the lighted power switch to turn the tool power on.
3.
The display should momentarily show boot screen and then show main screen.
4.
Enter the username and password.
(1)
The default username and password are “admin” and “admin2” respectively.
5.
The tool will login and display the Process page.
6.
Navigate to Tools- Manual Control to run system checks to ensure the tool is working properly.
(1)
Raise the lift pins down to 0 mm using the Set action.
(2)
Inset the supplied stop pins into the desired holes on the back plate surface. These
stop pins keep the wafer centered on the bake plate surface. The holes closest to the
center are for 2-inch wafers. From the center, the stop pin locations are for 2 in, 3in,
100m, 125 mm, 150 mm, and 200 mm wafers respectfully.
(3)
Set Bake Method to Vacuum. Place a substrate onto the center of the bake plate and
check that the vacuum holds the substrate.
(4)
Set the Bake Method to Proximity. This will turn off the vacuum and purge N
2
to float
the substrate above the bake plate surface.
(5)
Set the Bake Method to Contact. This will shut off N
2
and the vacuum. Remove the
substrate.
(6)
Ensure that the temperature/humidity sensor is reading on the parameter list.
(7)
Enable the Plate Temperature by selecting the Enable value and Apply.
(8)
Set the Plate Temperature to the desired temperature by changing the Action to Set.
(9)
Check that the Plate Temperature reaches the desire setting.
7.
If the tool passes these checks, the tool is ready to operate. Begin by creating a recipe.
