N62 Piezo Nanopositioning Scanner User Manual
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3. Product Overview
3.1 Product Introduction
N62 Piezo Nanopositioning Scanner has the following advantages:
High performance piezo stack:
N62 Piezo Nanopositioning Scanner is driven by a highly reliable ceramic actuator with
a fully insulated structure, so its performance and service life are far better than the
traditional actuator. The insulating layer can effectively prevent the piezoelectric ceramic
from being damaged when exposed to moisture. Therefore, the stability of piezoelectric
ceramics can be guaranteed under extreme circumstances. Compared with traditional
driving mechanism, there are no transmission parts and friction. Therefore, ceramic
actuator has the characteristics of no rebound, no maintenance, and no wear, etc.
Flexible hinge structure:
N62 Piezo Nanopositioning Scanner adopting flexible hinge mechanism has advantages
of no friction, high positioning accuracy. Flexible hinge is an element not affected by static
and dynamic friction, based on the elastic deformation of metal material (e.g., steel) ,
there is no rolling and sliding parts. Flexible unit has very high load capacity and stiffness.
Hinge guide needs no maintenance and no wear and tear. Suitable for a wide range of
temperatures, no lubricating oil is required.
Strain Sensor：
Strain sensor detects the position information by its own expansion. They are fixed in the
proper position of the transmission part and measure the displacement of the moving
part. This type of position measurement is made by contact and indirect measurement. So
the displacement of the moving platform is measured by measuring lever, guide hinge, or
piezoelectric ceramic stack.
N62 Piezo Nanopositioning Scanner has a travel range of up to 22μm/axis in X Y, and can
move in X Y at the same time, the high flexibility ensures that XY dimensional motion
is uncoupled ,and features fast response speed, no mechanical friction, high repeatable
