INST.No.INE-551-P1
- 21 -
9.3.5 Air-purge hood IR-VAAPFX1
9.3.6 Water-cooling plate IR-ZCWC
Unit: mm
53
Φ
43
4-
Φ
10
53
90
3
5
1
3
5
9
2
.5
9
4
2
2
11.0
22
Cooling
water
inlet
Purge air: Use clean air
Purge air flow: 0 to 200l/min
Unit: mm
Purge air inlet
Rc1/8(PT1/8)
Φ
3
5
4
0
5
0