2. Safety
PFC Operation Manual
Equipment Guidelines, Continued
Personnel Safety Guidelines
The PFC may provide several direct safety hazards to personnel if not properly installed or
operated. Adhere to the following safety guidelines:
Persons operating the PFC should be properly trained.
Know the location of the following:
Fire extinguisher
First Aid Station
Emergency eyewash and/or shower
Emergency exit
Use the following safety equipment (if necessary), according to the manufacturer’s
instructions, prior to installing, operating, or servicing the PFC:
Eye protection
Safety Shoes; shoes with protective toes should be worn to protect feet from dropping
tools or parts.
Observe the facility guidelines pertaining to loose clothing while working around or operating
the PFC.
Read and understand the Material Safety Data Sheets (MSDS) for the refrigerant used with
the PFC.
It may be recommended that the use of hazardous materials, such as cleaning fluids, be
used during routine maintenance procedures. Read and understand the facility’s MSDS
(provided by the manufacturer) for each substance.
Ergonomic hazards may exist with certain operations pertaining to the PFC.
SEMI S2-0200 Electrical Work Types
For the purpose of classifying the safety level of working on semiconductor electrical equipment,
SEMI safety standard S2-0200 defines the following four levels:
Type 1-
Equipment is fully de-energized.
Type 2-
Equipment is energized. Energized circuits are covered or protected.
Note:
Type 2 work includes tasks where the energized circuits are or can be measured by
placing probes through suitable openings in the covers or insulators.
Type 3-
Equipment is energized. Energized circuits are exposed and inadvertent contact with
uninsulated energized parts is possible. Potential exposures are no greater than 30 volts rms, 42.4
volts peak, 60 volts dc or 240 volt-amps in dry locations.
Type 4-
Equipment is energized. Energized circuits are exposed and inadvertent contact with
uninsulated energized parts is possible. Potential exposures are greater than 30 volts rms, 42.4
volts peak, 60 volts dc or 240 volt-amps in dry locations. Potential exposures to radio-frequency
currents exist; refer to SEMI S2-0200, Table A5-1 of Appendix 5 for a listing of these values.
18
825160-00, revision B
