6
3.
Introduction to the Cee
®
200X Precision Spin Coater
The Cee
®
200X precision spin coater delivers track-quality performance, with
revolutionary interface capabilities and the utmost in chemical compatibility, in an
efficient, space-saving design.
Fully programmable and user-friendly, the Brewer Science
®
Cee
®
200X precision spin
coater features the accuracy and repeatability needed to eliminate processing variability
from critical experiments. With its convenient, compact footprint, wide range of chemical
compatibility, and durability, this easy-to-use benchtop system will provide years of
high-performance operation, making the purchase of a Cee
®
200X tool a smart and
cost-effective decision.
3.1 Programmability
•
PC-controlled
•
PC-based touch screen interface and display
•
Full-color alphanumeric-capable graphical user interface (GUI)
•
250,000 process recipe programs onboard
•
A virtually unlimited number of user-defined recipe program steps
•
0.1-second resolution for step times (max. step time: 9,999.9 seconds)
•
Spin speed: 0 to 6,000 rpm (0 to 12,000 rpm option at no charge; 0 to 16,000 rpm
option available)
•
Spin speed acceleration:
o
0 to 30,000 rpm/s unloaded
o
0 to 23,000 rpm/s with a 200-mm substrate
o
0 to 3,000 rpm/s with a 6 in
×
6 in
×
0.250 in photomask recessed chuck
•
Connectivity: USB/Ethernet port for communications for uploading/downloading
process parameters with offline firmware standard (offline recipe number and steps
unlimited)
•
System capable of controlling third-party host software of high-end IDI-Cybor or
Mykrolis positive displacement pumps
•
Simultaneous dual automated dispense capability
•
Bi-directional speed control/oscillating chuck
•
Iteration software (recipe looping)
•
Dispense or component outputs: 50
•
Security: Password protection option available at no charge
•
In-process/dynamic speed/acceleration control
3.2 Precision
•
Spin speed repeatability: < 0.2 rpm
•
Spin speed resolution: < 0.2 rpm
•
Substrate sizes: < 1 cm to 200 mm round; 7 in
×
7 in square
