2
Contents
1. Products Covered in This Manual
.................................................
4
2. Confidentiality Statement, Warranty, and Instructions
for Returning Materials
...............................................................................
4
2.1 Confidentiality Statement..................................................................................... 4
2.2 Warranty .............................................................................................................. 4
2.3 Instructions for Returning Materials ..................................................................... 5
3. Introduction to the Cee
®
200X Precision Spin Coater
.......
6
3.1 Programmability................................................................................................... 6
3.2 Precision.............................................................................................................. 6
3.3 Reliability ............................................................................................................. 7
3.4 Bowl Design......................................................................................................... 7
3.5 Utilities ................................................................................................................. 7
3.6 Dimensions.......................................................................................................... 7
4. Spin Coater Overview
............................................................................
8
4.1 Model and Revisions ........................................................................................... 8
4.2 System Specifications.......................................................................................... 8
4.3 Safety Hazards/Precautions ................................................................................ 8
4.3.1 Overview of Equipment-Specific Hazards................................................. 8
4.3.2 Electrical................................................................................................... 8
4.3.3 Mechanical ............................................................................................... 9
4.3.4 Chemical................................................................................................... 9
4.3.5 Lockout/Tagout Procedures and Information............................................ 10
4.3.6 Intended Use of Machine.......................................................................... 10
4.4 Installation ........................................................................................................... 10
4.4.1 Facilities Requirements ............................................................................ 10
4.4.2 Environment ............................................................................................. 11
4.4.3 Unpacking and Inspection ........................................................................ 11
4.4.4 System Installation and Setup .................................................................. 11
5. Software
.........................................................................................................
12
5.1 Startup and Run Screen ...................................................................................... 12
5.1.1 Startup with Passwords Enabled .............................................................. 12
5.1.2 Run Screen............................................................................................... 13
5.2 Spin Process Screen ........................................................................................... 14
5.2.1 Running a Spin Process ........................................................................... 16
5.2.2 Centering a Substrate............................................................................... 17
5.2.3 Starting a Process .................................................................................... 18
5.2.4 Aborting a Process ................................................................................... 18
5.2.5 Process Complete .................................................................................... 19
5.2.6 Running Multiple Iterations ....................................................................... 19
