NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 14 of 14
4.6.4 Vent and unload the samples
1.
After venting to atmosphere, pull the knob and turn it in clockwise direction.
Open the chamber door and take out the quartz boats by metal fork.
Don’t
touch the quartz boats or chamber by hands because they might be still
hot.
2.
Exit and go to the main page. Click “Diagnostics” (see fig.10) to stop venting
and exit again to go back to the main page.
3.
Make sure the chamber and the working environment are clean after use.
Fig.10
Diagnostic menu
