NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 12 of 14
numbers and click “Enter”. To save the new settings, click “RECIPE
VALIDATE” first. Click “Yes” on Popup massage “Congratulation!
Validation Success!” and then click “Save”. After that, click “Exit” to exit this
page and click “START PROCESS” to start the process.
4.6.3 Pump down and start the process
1. Once click “START PROCESS”, the chamber pump down automatically to
reach its vacuum set point which is 0.01Torr. A popup message shows
“Waiting for Vacuum Pump down…” (see Fig.8).
2. After pressure reached 0.01Torr, process starts with real time process
information showing on another page (see Fig.9). Those process feedback
values are presented in formats of graphs and bars.
Fig8
. Popup message to show “Waiting for vacuum. Pump down….”
