
2020.07.24
•
REV. 2
• MASS FLOW METER OPERATING MANUAL
41
Gas List
#
Short
Name
Long
Name
0
Air
Air (Clean Dry)
1
Ar
Argon
2
CH4
Methane
3
CO
Carbon Monoxide
4
CO2
Carbon Dioxide
5
C2H6 Ethane
6
H2
Hydrogen
7
He
Helium
8
N2
Nitrogen
9
N2O
Nitrous Oxide
10
Ne
Neon
11
O2
Oxygen
12
C3H8 Propane
13
nC4H10 Normal Butane
14
C2H2 Acetylene
15
C2H4 Ethylene (Ethene)
16
iC4H10 Isobutane
2
17
Kr
Krypton
18
Xe
Xenon
19
SF6
Sulfur Hexafluoride
1
20
C-25
25% CO2, 75% Ar
21
C-10
10% CO2, 90% Ar
22
C-8
8% CO2, 92% Ar
23
C-2
2% CO2, 98% Ar
24
C-75
75% CO2, 25% Ar
25
He-25 25% He, 75% Ar
26
He-75 75% He, 25% Ar
27
A1025 90% He, 7.5% Ar, 2.5% CO2
28
Star29 Stargon CS (90% Ar, 8% CO2, 2% O2)
29
P-5
5% CH4, 95% Ar
30
NO
Nitric Oxide
2
31
NF3
Nitrogen Trifluoride
2
32
NH3
Ammonia
2
33
Cl2
Chlorine
2
#
Short
Name
Long
Name
34
H2S
Hydrogen Sulfide
2
35
SO2
Sulfur Dioxide
2
36
C3H6 Propylene
2
80
1Buten 1-Butylene
2
81
cButen Cis-Butene (cis-2-Butene)
2
82
iButen Isobutylene
83
tButen Trans-2-Butene
2
84
COS
Carbonyl Sulfide
2
85
DME
Dimethylether (C2H6O)
2
86
SiH4
Silane
2
100
R-11
Trichlorofluoromethane (CCl3F)
2
,
³
101
R-115
Chloropentafluoroethane (C2ClF5)
2
,
³
102
R-116
Hexafluoroethane (C2F6)
2
103
R-124 Chlorotetrafluoroethane (C2HClF4)
2
,
³
104
R-125 Pentafluoroethane (CF3CHF2)
2
,
³
105
R-134A Tetrafluoroethane (CH2FCF3)
2
,
³
106
R-14
Tetrafluoromethane (CF4)
2
107
R-142b Chlorodifluoroethane (CH3CClF2)
2
,
³
108
R-143a Trifluoroethane (C2H3F3)
2
,
³
109
R-152a Difluoroethane (C2H4F2)
2
110
R-22
Difluoromonochloromethane
(CHClF2)
2
111
R-23
Trifluoromethane (CHF3)
2
,
³
112
R-32
Difluoromethane (CH2F2)
2
,
³
113
R-318 Octafluorocyclobutane (C4F8)
2
114
R-404A 44% R-125, 4% R-134A,
52% R-143A
2
,
³
115
R-407C 23% R-32, 25% R-125,
52% R-143A
2
,
³
116
R-410A 50% R-32, 50% R-125
2
,
³
117
R-507A 50% R-125, 50% R-143A
2
,
³
140
C-15
15% CO2, 85% Ar
141
C-20
20% CO2, 80% Ar
142
C-50
50% CO2, 50% Ar
143
He-50 50% He, 50% Ar
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