IDP-15 Dry Scroll Vacuum Pump
33
DRAFT
12
/21/17
Mechanical Connections
Pump Inlet
Use NW25, or larger, clean vacuum hardware with as short a length as practical between
the pump and vacuum chamber.
Insert a bellows between the pump and vacuum chamber to provide both vibration
isolation and strain relief.
Pump Exhaust
An NW16 exhaust fitting is located on the side of the pump. To avoid overheating the
pump, do not restrict the exhaust flow with long lengths of small diameter tubing. Use as
short as practical lengths of 16 mm ID, or larger, diameter hardware.
Mechanical Support
The IDP-15 pump is designed for three different modes including:
1.) a bench top mode,
2.) a mode where the pump is bolted to a support structure, and
3.) a shipping mode.
Referring to Figure 3 on page 17, the bench top mode requires the shipping locks to be
disengaged with the L-brackets raised for maximum vibration isolation. Alternatively, the
pump can be attached to a support structure or another piece of equipment using the
L-brackets, which must be lowered in this configuration with the shipping locks
disengaged for vibration isolation. Depending on the shock and vibration experienced
during shipping, the pump may or may not be shipped on a support structure without
potential damage to the pump. Note that any time the pump is transported, the shipping
locks must be engaged and disengaged prior to operation. It is recommended that the
pump be shipped in the Agilent supplied shipping container, with the shipping locks
engaged to avoid the potential of any damage during transportation.
Содержание IDP-15
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