Aerotech PRO280LM Series, Руководство по оборудованию, Страница: 15 / 52

PRO280LM Hardware Manual Overview
Table 1-4: PRO280LM Series Specifications (-0800 to -1500)
PRO280LM -0800 -1000 -1200 -1500
Travel 800 mm 1000 mm 1200 mm 1500 mm
Accuracy
(1)
Standard ±17 μm ±18 μm ±21 μm ±22 μm
Calibrated ±1.5 μm ±1.5 μm ±2 μm ±2 μm
Resolution (Minimum Incremental
Motion) 5 nm (-E1 Encoder),
10 nm (-E3 Encoder)
Bidirectional Repeatability
(1)
±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm
Horizontal Straightness
(1)
±7 μm ±8 μm ±8.5 μm ±9.5 μm
Vertical Straightness
(1)
±7 μm ±8 μm ±8.5 μm ±9.5 μm
Pitch
90 μrad
(18.6 arc sec)
110 μrad
(22.7 arc sec)
120 μrad
(24.7 arc sec)
130 μrad
(26.8 arc sec)
Roll
90 μrad
(18.6 arc sec)
110 μrad
(22.7 arc sec)
120 μrad
(24.7 arc sec)
130 μrad
(26.8 arc sec)
Yaw
90 μrad
(18.6 arc sec)
110 μrad
(22.7 arc sec)
120 μrad
(24.7 arc sec)
130 μrad
(26.8 arc sec)
Maximum Speed
(2)
2 m/s
Maximum Acceleration
(2)
3 g
Maximum Force, Continuous
266.2 N – Standard
437.1 N – With Air Cooling (20 psig)
Load Capacity
(3)
Horizontal 150 kg
Side 150 kg
Moving Mass 13.8 kg
Stage Mass 78.0 kg 88.5 kg 99.0 kg 114.8 kg
Material Anodized Aluminum
Mean Time Between Failure 20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
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