Aerotech PRO280LM Series, Руководство по оборудованию, Страница: 14 / 52

Overview PRO280LM Hardware Manual
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: PRO280LM Series Specifications (-0300 to -0600)
PRO280LM -0300 -0400 -0500 -0600
Travel 300 mm 400 mm 500 mm 600 mm
Accuracy
(1)
Standard ±10 μm ±12 μm ±14 μm ±15.5 μm
Calibrated ±1 μm ±1 μm ±1 μm ±1 μm
Resolution (Minimum Incremental
Motion) 5 nm (-E1 Encoder),
10 nm (-E3 Encoder)
Bidirectional Repeatability
(1)
±0.4 μm ±0.4 μm ±0.4 μm ±0.4 μm
Horizontal Straightness
(1)
±3 μm ±4 μm ±5 μm ±6 μm
Vertical Straightness
(1)
±3 μm ±4 μm ±5 μm ±6 μm
Pitch
49 μrad
(10.1 arc sec)
60 μrad
(12.4 arc sec)
70 μrad
(14.4 arc sec)
78 μrad
(16.1 arc sec)
Roll
49 μrad
(10.1 arc sec)
60 μrad
(12.4 arc sec)
70 μrad
(14.4 arc sec)
78 μrad
(16.1 arc sec)
Yaw
49 μrad
(10.1 arc sec)
60 μrad
(12.4 arc sec)
70 μrad
(14.4 arc sec)
78 μrad
(16.1 arc sec)
Maximum Speed
(2)
2 m/s
Maximum Acceleration
(2)
3 g
Maximum Force, Continuous
266.2 N – Standard
437.1 N – With Air Cooling (20 psig)
Load Capacity
(3)
Horizontal 150 kg
Side 150 kg
Moving Mass 13.8 kg
Stage Mass 51.7 kg 56.9 kg 62.2 kg 67.4 kg
Material Anodized Aluminum
Mean Time Between Failure 20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
14 Chapter 1 www.aerotech.com