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Overview

ECO165LM Hardware Manual

ECO165LM Linear Motor Stage (continued)

Lifting Hardware (Optional)

-LF

Lifting hardware

NOTE:

Lifting option only available on travels 400 mm and greater. Lifting should never by ordered on the upper-axis of an XY set

(only order on lower-axis)

Metrology (Required)

-PL0

No metrology performance plots

-PL1

Metrology, uncalibrated with performance plots

-PL2

Metrology, calibrated (HALAR) with performance plots

Accessories (to be ordered as a separate line item)

ALIGN-NPA

Non-precision XY assembly

ALIGN-NPAZ

Non-precision XZ or YZ assembly

ALIGN-PA10

XY assembly; 10 arc sec orthogonality; alignment to within 7 µm orthogonality for
short travel stages

ALIGN-PA10Z

XZ or YZ assembly with L-bracket; 10 arc sec orthogonality; alignment to within 10
µm orthogonality for short travel stages

ALIGN-PA5

XY assembly; 5 arc sec orthogonality; alignment to within 3 µm orthogonality for
short travel stages

ALIGN-PA5Z

XZ or YZ assembly with L-bracket; 5 arc sec orthogonality; alignment to within 5
µm orthogonality for short travel stages

12

Chapter 1

www.aerotech.com

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Содержание ECO165LM

Страница 1: ...Revision 1 02 00 ECO165LM Hardware Manual ...

Страница 2: ...rvice aerotech com 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom Japan Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email service aerotech co uk Phone 81 0 50 5830 6814 Fax 81 0 43 306 3773 Email service aerotechkk co jp Germany China Phone 49 0 911 967 9370 Fax 49 0 911 967 93720 Email service aerotechgmbh de Phone 86 21 3319 7715 Email service aerotech com France Taiwan ...

Страница 3: ...npacking and Handling the Stage 17 2 2 Dimensions 20 2 3 Securing the Stage to the Mounting Surface 22 2 4 Attaching the Payload to the Stage 23 2 4 1 Speed Capability 24 Chapter 3 Electrical Specifications and Installation 25 3 1 Motor and Feedback Connectors 26 3 2 Motor and Feedback Wiring 31 3 3 Motor and Feedback Specifications 33 3 4 Limits Marker and Machine Direction 35 3 5 Feedback Phasin...

Страница 4: ...oad Capability of ECO165LM Series Stages 24 Figure 2 6 Stage Orientations 24 Figure 3 1 Ground Connection Points for the CMS0 Option 26 Figure 3 2 Motor and Feedback Wiring 31 Figure 3 3 Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage 32 Figure 3 4 Machine Direction 35 Figure 3 5 Analog Encoder Phasing Reference Diagram E1 Incremental Encoder 36 Figure 3 6 Encoder Phasing Ref...

Страница 5: ...ace Flatness Requirement 22 Table 2 2 Stage to Mounting Surface Hardware 22 Table 3 1 Linear Motor Connector Wiring 27 Table 3 2 Linear Motor Limit and Encoder Connector Wiring E1 and E2 Incremental Encoder Options 28 Table 3 3 General Motor Connector Wiring for Z or T Axes 29 Table 3 4 General Feedback Connector Wiring for Z or T axes 30 Table 3 5 Feedback Specifications 33 Table 3 6 ECO165LM Lin...

Страница 6: ...Table of Contents ECO165LM Hardware Manual 6 www aerotech com This page intentionally left blank ...

Страница 7: ...before servicing equipment 4 All components must be properly grounded in accordance with local electrical safety requirements 5 Operator safeguarding requirements must be addressed during final integration of the product W A R N I N G To minimize the possibility of electrical shock bodily injury or death the following precautions must be followed 1 Moving parts can cause crushing or shearing injur...

Страница 8: ...Safety ECO165LM Hardware Manual 8 www aerotech com This page intentionally left blank ...

Страница 9: ...ts and further more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration This is to c...

Страница 10: ...Declaration of Conformity ECO165LM Hardware Manual 10 www aerotech com This page intentionally left blank ...

Страница 11: ... dimension mounting pattern and holes TT2 Tabletop with English dimension mounting pattern and holes TT3 Accessory tabletop with mounting pattern for Aerotech rotary stages see drawings for the supported stage types Feedback Required E1 Incremental linear encoder 1 Vpp E2 Incremental linear encoder 0 1 μm digital TTL output Cable Management Required CMS0 No external cable management system connect...

Страница 12: ...ories to be ordered as a separate line item ALIGN NPA Non precision XY assembly ALIGN NPAZ Non precision XZ or YZ assembly ALIGN PA10 XY assembly 10 arc sec orthogonality alignment to within 7 µm orthogonality for short travel stages ALIGN PA10Z XZ or YZ assembly with L bracket 10 arc sec orthogonality alignment to within 10 µm orthogonality for short travel stages ALIGN PA5 XY assembly 5 arc sec ...

Страница 13: ... to 2 000 m 0 ft to 6 562 ft above sea level Contact Aerotech if your specific application involves use above 2 000 m or below sea level Vibration Use the system in a low vibration environment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating The ECO165LM stages have an ingress protection rat...

Страница 14: ... sec 50 μrad 10 3 arc sec 55 μrad 11 3 arc sec Roll 40 μrad 8 2 arc sec 40 μrad 8 2 arc sec 50 μrad 10 3 arc sec 55 μrad 11 3 arc sec Yaw 40 μrad 8 2 arc sec 40 μrad 8 2 arc sec 50 μrad 10 3 arc sec 55 μrad 11 3 arc sec Maximum Speed 2 2 m s Maximum Acceleration 2 1 5 g Maximum Force Continuous M1 36 5 N M2 77 7 N Load Capacity 3 Horizontal 45 kg Side 45 kg Moving Mass 2 1 kg Stage Mass M1 6 4 kg ...

Страница 15: ... μrad 13 4 arc sec 80 μrad 16 5 arc sec 95 μrad 19 6 arc sec 110 μrad 22 7 arc sec Maximum Speed 2 2 m s Maximum Acceleration 2 1 5 g Maximum Force Continuous M1 36 5 N M2 77 7 N Load Capacity 3 Horizontal 45 kg Side 45 kg Moving Mass 2 1 kg Stage Mass M1 9 0 kg 10 3 kg 11 6 kg 12 8 kg M2 10 4 kg 12 0 kg 13 6 kg 15 2 kg Material Anodized Aluminum Mean Time Between Failure 20 000 Hours 1 Certified ...

Страница 16: ...ethylene gloves to prevent any contaminants from adhering to the surface of the ECO165LM 3 During installation use cleaned vented stainless steel fasteners when securing the ECO165LM 4 Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vacuum compatible lubricants could result in excessive motor operating temperatures Because of this consider all con...

Страница 17: ...5LM it is important to let it stabilize at room temperature for at least 12 hours Allowing it to stabilize to room temperature will ensure that all of the alignments preloads and tolerances are the same as they were when tested at Aerotech Use compressed nitrogen or clean dry oil less air to remove any dust or debris that has collected during shipping Each ECO165LM has a label listing the system p...

Страница 18: ...is stack QTY 4 Red anodized brackets on the lower axis of a multi axis stack Figure 2 1 Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems N OTE After removing the lifting features or shipping brackets retain them for future use Do not transport or ship the ECO165LM without the lifting features or shipping brackets attached 18 Chapter 2 www aerotech com ...

Страница 19: ...se must be removed for the stage to operate Retain the lifting hardware for future use If the stage must be lifted in the future reattach the shipping brackets and the lifting hardware If the stage is part of a multi axis system attach the lifting features to the lower axis Eyebolt QTY 4 Standoff QTY 4 Figure 2 2 ECO165LM Series Stage with Lifting Features N OTE After removing the lifting features...

Страница 20: ...ONAL TABLETOP TT1 TT2 CMS1 CMS0 150 125 M6 100 126 M5 42 125 150 14X M6X1 0 HELICOIL 9 0 8X M5 X 0 8 HELICOIL 7 5 162 DETAIL A SCALE 1 6 DIMENSIONS MILLIMETERS BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D ECO165LM 0100 100 102 108 125 330 165 150 152 4 ECO165LM 0150 150 152 158 175 380 190 150 152 4 ECO165LM 0200 200 202 208 225 430 215 150 350 152 4 ECO165LM 0250 250 252...

Страница 21: ...150 75 100 75 100 8X M5x0 8 8 3 28X M6x1 0 7 0 10 25 75 25 50 75 165 162 16X 5 8 THRU ALL 10 6 50 DIMENSIONS MILLIMETERS SIDE MOUNT NOT AVAILABLE TT3 MOUNTS THE FOLLOWING ADRS ADRT AGR 100 75 150 150 100 Figure 2 4 ECO165LM Accessory Tabletop Dimensions TT3 Option www aerotech com Chapter 2 21 ...

Страница 22: ...ompletely dry Gently place the stage on the mounting surface N OTE The ECO165LM is precision machined and verified for flatness prior to product assembly at the factory If machining is required to achieve the desired flatness it should be performed on the mounting surface rather than the ECO165LM Shimming should be avoided if possible If shimming is required it should be minimized to retain maximu...

Страница 23: ... provided by Aerotech with the shipment may not be appropriate and servo instability can occur Refer to the controller help file for tuning assistance The payload must be flat rigid and comparable to the stage in quality to maintain optimum performance N OTE For valid system performance the mounting interface should be flat within 12 µm W A R N I N G Refer to the dimensions in Section 2 2 for maxi...

Страница 24: ...afety and prevent damage to the system speed limitations are required for the ECO165LM Achievable speeds are application dependent and determined by factors such as travel length payload amplifier sizing and duty cycle The Motor Sizer application supplied by Aerotech at https www aerotech com resources motor sizer aspx can be used to estimate allowable speeds and accelerations based on these param...

Страница 25: ...nents usually indicate the appropriate connections If system level integration was purchased an electrical drawing showing system interconnects has been supplied with the system separate from this documentation The electrical wiring from the motor and encoder are integrated at the factory Refer to the following sections for standard motor wiring and connector pin assignments W A R N I N G Applicat...

Страница 26: ...to the final application D A N G E R Remove power before connecting or disconnecting electrical components or cables Failure to do so may cause electric shock W A R N I N G The protective ground connection must be properly installed to minimize the possibility of electric shock W A R N I N G For stages with the CMS0 option Ground wire connection points are provided at the tabletop and stage base A...

Страница 27: ...e A A2 Motor Phase B A3 Motor Phase C 1 Motor Shield EMI shield 2 Reserved 3 Reserved 4 Reserved 5 Reserved A4 Frame ground motor protective ground Mating Connector Aerotech P N Third Party P N Backshell ECK00656 Amphenol 17E 1726 2 Sockets QTY 4 ECK00659 ITT Cannon DM53744 6 Connector ECK00657 ITT Cannon DBMM9W4SA197 www aerotech com Chapter 3 27 ...

Страница 28: ...evices 4 Reserved 5 Reserved 6 Marker N 7 Marker 8 Reserved 9 Reserved 10 Reserved 11 Reserved 12 Positive CW hardware limit 13 Reserved 14 Cosine 15 Cosine N 16 5 V power supply 17 Sine 18 Sine N 19 Reserved 20 Common ground to limit switch 21 Common ground to encoder power 22 Reserved 23 Reserved 24 Negative CCW hardware limit 25 Reserved Mating Connector Aerotech P N Third Party P N Backshell E...

Страница 29: ...tor Phase A A2 Motor Phase B A3 Motor Phase C 1 Motor Shield EMI shield 2 Reserved 3 Reserved 4 Reserved 5 Reserved A4 Frame ground motor protective ground Mating Connector Aerotech P N Third Party P N Backshell ECK00656 Amphenol 17E 1726 2 Sockets QTY 4 ECK00659 ITT Cannon DM53744 6 Connector ECK00657 ITT Cannon DBMM9W4SA197 www aerotech com Chapter 3 29 ...

Страница 30: ...ffect sensor phase A 26 0 129 11 Hall Effect sensor phase C 26 0 129 12 Positive CW hardware limit 26 0 129 13 Reserved Brake 1 26 0 129 14 Cosine 26 0 129 15 Cosine N 26 0 129 16 5 V power supply 26 0 129 17 Sine 26 0 129 18 Sine N 26 0 129 19 Reserved 20 Common ground to limit switch 26 0 129 21 Common ground to encoder power 26 0 129 22 Reserved 23 Reserved 24 Negative CCW hardware limit 26 0 1...

Страница 31: ...and feedback connections 1 A1 A2 A3 A4 3 20 21 17 16 2 14 15 18 7 6 STAGE COM COM 5V 5V THERMISTOR COSINE COSINE N SINE SINE N MARKER MARKER N CASE CASE MOTOR CONNECTIONS THIRD PARTY CONTROLLER 12 24 LIMIT LIMIT t 5V 10K Pull Up 10K Pull Up Pull Up 1K 5V 5V 120 Ω 120 Ω 120 Ω Figure 3 2 Motor and Feedback Wiring www aerotech com Chapter 3 31 ...

Страница 32: ... BRAKE CASE CASE SAFE SWITCH MOVE HALL A 26 AWG 16 AWG 16 AWG 16 AWG 16 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG MOTOR CONNECTIONS THIRD PARTY CONTROLLER 12 24 LIMIT LIMIT 1 t 5V 10K typ 10K typ 10K typ 5V 10K Pull Up 10K Pull Up Pull Up 1K 5V 5V 120 Ω 120 Ω 120 Ω Figure 3 3 Motor and Feedback Wiring for a Typical Ve...

Страница 33: ...ncremental Encoder RS422 485 compatible Limit Switch Specifications Supply Voltage 5 V Supply Current 25 mA Output Type Open Collector Output Voltage 5 V Output Current 10 mA sinking Output Polarity Normally Closed NC l Sinks current to ground Logic 0 when not in limit l High impedance Logic 1 when in limit l Requires external pull up to 5 V 10 kΩ recommended Notes l If the ECO165LM is driven beyo...

Страница 34: ...tage VDC 340 340 Magnetic Pole Pitch mm in 25 0 98 25 0 98 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peak force assumes correct rms current consult Aerotech 4 Force constant and motor constant specified at stall 5 All pe...

Страница 35: ...wiring refer to Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while machine direction is hardwired in the stage Figure 3 4 shows the machine direction of ECO165LM stages POSITIVE MACHINE DIRECTION Negative Limit CCW Limit Marker Near Cent...

Страница 36: ...0 540 630 720 810 0 90 180 270 360 450 540 630 315 675 720 810 Figure 3 5 Analog Encoder Phasing Reference Diagram E1 Incremental Encoder POSITIVE MACHINE DIRECTION MRK MRK N Positive MOVE Clockwise 0 90 180 270 360 450 540 630 720 810 SIN SIN N 0 90 180 270 360 450 540 630 720 810 COS COS N 0 90 180 270 360 450 540 630 720 810 Figure 3 6 Encoder Phasing Reference Diagram E2 Incremental Encoder 36...

Страница 37: ...le speed and environment In general stages operating in a clean environment should be cleaned and lubricated annually or every 500 km whichever comes first For stages operating under conditions involving excessive debris the stage should be cleaned every six months For high speed applications those near max speed at a duty cycle of 50 frequent maintenance with standard lubricants is required Month...

Страница 38: ...imator is required for post assembly verification to maintain warranties Contact Aerotech for more information D A N G E R To minimize the possibility of bodily injury or death disconnect all electrical power prior to performing any maintenance or making adjustments to the equipment Cleaning If a solvent is necessary for cleaning the stage Aerotech recommends using isopropyl alcohol Harsher solven...

Страница 39: ...d dust or debris from the inside of the assembly 4 Remove any dirty or dried lubricant from the linear bearing rails Use a clean lint free cloth with a side to side motion A swab soaked in Isopropyl Alcohol can be used carefully to remove stubborn debris 5 Apply a thin continuous film of lubricant to the linear bearing guides A good quality natural bristle artist s brush makes an excellent applica...

Страница 40: ...Maintenance ECO165LM Hardware Manual Figure 4 2 Hardcover Removal 40 Chapter 4 www aerotech com ...

Страница 41: ...or polarity and compatibility requirements Example voltage requirements Controller trap or fault refer to controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Chapter 3 and Controller documentation Motor Connections refer to Chapter 3 and Controller documentation Stage oscillates or squeals Gains misadjusted refer to the controller documentation E...

Страница 42: ...Maintenance ECO165LM Hardware Manual 42 Chapter 4 www aerotech com This page intentionally left blank ...

Страница 43: ... such approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerotech com Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than thir...

Страница 44: ...ms and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site Field Service Representative in a rea...

Страница 45: ... Revision Description 1 02 00 Product updates 1 01 00 The following sections have been updated l Section 1 1 Environmental Specifications l Section 3 1 Motor and Feedback Connectors l Section 3 2 Motor and Feedback Wiring 1 00 00 New manual www aerotech com Appendix B 45 ...

Страница 46: ...Revision History ECO165LM Hardware Manual 46 Appendix B www aerotech com This page intentionally left blank ...

Страница 47: ...ule 37 isopropyl alcohol 38 L label 17 Lifting Instructions 19 Limit Switch Specifications 33 lubricants vacuum operation 16 Lubrication 38 lubrication schedule 37 M Maximum Achievable Velocity 24 Motor Specifications 34 mounting surface 22 multiaxis combinations 38 P part number 17 Possible Cause 41 Protection Rating 13 protective ground connection 26 R red anodized aluminum 17 S serial number 17...

Страница 48: ...Index ECO165LM Hardware Manual T Technical Support 2 U Unpacking and Handling the Stage 17 V vacuum 16 vacuum guidelines 16 Vibration 13 W Warranty and Field Service 43 48 Index www aerotech com ...

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