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List of Tables

Table 1-1:

Model Numbers and Ordering Options

Table 1-2:

Environmental Specifications

Table 1-3:

ANT130XY-060 Series Specifications

Table 2-1:

Stage Mounting Surface Flatness Requirement

Table 2-2:

Stage to Mounting Surface Hardware

Table 2-3:

Payload to Stage Surface Hardware

Table 3-1:

25-Pin Motor and Feedback Connector Pinout (-CN1)

Table 3-2:

25-Pin Mating Connector Part Numbers

Table 3-3:

4-Pin Motor Connector Pinout (-CN2 Option)

Table 3-4:

4-Pin Motor Mating Connector Part Numbers

Table 3-5:

25-Pin Feedback Connector Pinout (-CN2 Option)

Table 3-6:

25-Pin Feedback Mating Connector Part Numbers

Table 3-7:

Hall-Effect Sensor Specifications

Table 3-8:

Thermistor Specifications

Table 3-9:

Encoder Specifications

Table 3-10:

Limit Switch Specifications

Table 3-11:

ANT130XY Motor Specifications

Table 3-12:

Encoder Resolution

ANT130XY Hardware Manual

List of Tables

www.aerotech.com

Содержание ANT130XY Series

Страница 1: ...Revision 2 00 ANT130XY Series Two Axis Direct Drive Nanopositioning Stage HARDWARE MANUAL...

Страница 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Страница 3: ...tions 19 1 4 Vacuum Operation 20 Chapter 2 Installation 21 2 1 Dimensions 21 2 2 Securing the Stage to the Mounting Surface 24 2 3 Attaching the Payload to the Stage 26 Chapter 3 Electrical Installati...

Страница 4: ...Orientations 27 Figure 2 6 Cantilevered Load Capabilities 27 Figure 3 1 ANT130XY Motor and Feedback Wiring CN1 Option 34 Figure 3 2 ANT130XY Motor and Feedback Wiring CN2 Option 35 Figure 3 3 Machine...

Страница 5: ...e 3 2 25 Pin Mating Connector Part Numbers 31 Table 3 3 4 Pin Motor Connector Pinout CN2 Option 32 Table 3 4 4 Pin Motor Mating Connector Part Numbers 32 Table 3 5 25 Pin Feedback Connector Pinout CN2...

Страница 6: ...the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national...

Страница 7: ...the product is used in a manner not specified by the manufacturer l The protection provided by the equipment could be impaired l The life expectancy of the product could be decreased Safety notes and...

Страница 8: ...t l All service and maintenance must be done by approved personnel l Use this product only in environments and operating conditions that are approved in this manual l Never install or operate equipmen...

Страница 9: ...connect or disconnect stage motor interconnections while connected to a live electrical power source l Before you set up or do maintenance disconnect electrical power l It is the responsibility of th...

Страница 10: ...ch environmental specifications DANGER Mechanical Hazard Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage l When the system is not electrically...

Страница 11: ...can cause crush shear or pinch injuries l Only trained operators should operate this equipment l Do not put yourself in the travel path of machinery l Restrict access to all motor and stage parts o wh...

Страница 12: ...magnet track components If you do so you will expose your self to mechanical crush pinch or impact hazards l Magnetic fields could interfere with external or internal medical devices pace makers for e...

Страница 13: ...rmation for later reference Unpacking and Handling It is the responsibility of the customer to safely and carefully lift and move the stage IMPORTANT All electronic equipment and instrumentation is wr...

Страница 14: ...prevent unwanted motion damage that could occur during shipment The brackets must be removed before the ANT130XY can be operated Retain the brackets and hardware for future use DANGER Mechanical Hazar...

Страница 15: ...ge in the original shipping container If the original packaging included ESD protective packaging make sure to store the stage in it The storage location must be dry free of dust free of vibrations an...

Страница 16: ...This page intentionally left blank Handling and Storage ANT130XY Hardware Manual 16 www aerotech com...

Страница 17: ...ental linear encoders digital RS422 output 5 nm electrical resolution E4 Incremental linear encoders 1 Vpp amplified sine output high performance Connectors Required CN1 Integral cable with a 25 pin D...

Страница 18: ...ibration environment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating These stages are not s...

Страница 19: ...pper Axis 1 4 kg 1 9 kg 2 3 kg Lower Axis 4 2 kg 5 6 kg 6 9 kg Stage Mass 5 7 kg 7 5 kg 9 2 kg Material Anodized Aluminum Mean Time Between Failure 30 000 Hours 1 Specifications for PL1 and PL2 option...

Страница 20: ...ean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the stage 3 During installation use cleaned vented stainless steel fasteners to secu...

Страница 21: ...th the instructions provided by this manual and any accompanying documentation Failure to follow these instructions could result in injury or damage to the equipment 2 1 Dimensions Figure 2 1 ANT130XY...

Страница 22: ...Figure 2 2 Mounting Plate MP Dimensions 2 1 Dimensions ANT130XY Hardware Manual 22 www aerotech com...

Страница 23: ...Figure 2 3 Cable Management Post CMS Dimensions ANT130XY Hardware Manual 2 1 Dimensions www aerotech com 23...

Страница 24: ...ll accuracy Adjustments to the mounting surface must be done before the stage is secured Inspect the mounting surface for dirt or unwanted residue and clean if necessary Use precision flatstones on th...

Страница 25: ...l values and may not be accurate for your mounting surface Refer to Section 2 1 for mounting locations and dimensions Table 2 2 Stage to Mounting Surface Hardware Mounting Hardware Typical Screw Torqu...

Страница 26: ...nd comparable to the stage in quality to maintain optimum performance IMPORTANT For valid system performance the mounting interface should be flat within 1 m per 50 mm WARNING General Hazard Warning B...

Страница 27: ...Figure 2 5 Load Orientations Figure 2 6 Cantilevered Load Capabilities ANT130XY Hardware Manual 2 3 Attaching the Payload to the Stage www aerotech com 27...

Страница 28: ...This page intentionally left blank 2 3 Attaching the Payload to the Stage ANT130XY Hardware Manual 28 www aerotech com...

Страница 29: ...ance requirements when they integrate the ANT130XY into a completed system Electrical installation requirements will depend on the ordered product options Installation instructions in this section are...

Страница 30: ...tion only Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized The System Integrator or qualified installer is responsible for...

Страница 31: ...or Phase C 14 COS Encoder Cosine 15 SIN Encoder Sine 16 MRK Encoder Marker 17 5V Power Supply Input 18 Reserved 19 CW LMT End of travel limit signal that indicates maximum permitted stage travel in th...

Страница 32: ...Reserved 4 Reserved 5 Reserved A4 Frame Ground motor protective ground Table 3 4 4 Pin Motor Mating Connector Part Numbers Mating Connector Aerotech P N Third Party P N Backshell ECK00656 Amphenol 17...

Страница 33: ...r machine clockwise direction 13 Reserved 14 COS Encoder Cosine 15 COS Encoder Cosine 16 5V Power Supply Input 17 SIN Encoder Sine 18 SIN Encoder Sine 19 Reserved 20 Common ground 21 Common ground 22...

Страница 34: ...eedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 ANT130XY Motor and Feedback Wiring CN1 Option 3 2 Motor and Feedback Wiring ANT130XY Hardware Manual 34 ww...

Страница 35: ...Figure 3 2 ANT130XY Motor and Feedback Wiring CN2 Option ANT130XY Hardware Manual 3 2 Motor and Feedback Wiring www aerotech com 35...

Страница 36: ...idal Type Differential Incremental Encoder l Analog SIN SIN COS COS 1V pk pk into 120 terminations l Digital RS422 MRK MRK signals into 120 terminations Digital Output Incremental Encoder RS422 485 co...

Страница 37: ...n system cooling conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peak force assumes correct rms c...

Страница 38: ...the stage wiring refer to Section 3 2 Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while ma...

Страница 39: ...tor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 4 Hall Phasing Diagram ANT130XY Hardware Manual 3 5 Motor and Feedback Phasing www aerotech c...

Страница 40: ...gure 3 5 Encoder Phasing Reference Diagram Standard Square Wave Figure 3 6 Encoder Phasing Reference Diagram Analog Sine Wave 3 5 Motor and Feedback Phasing ANT130XY Hardware Manual 40 www aerotech co...

Страница 41: ...longer or shorter inspection interval will depend on the application and conditions such as the duty cycle speed and environment Monthly inspections should include but not be limited to l Visually ins...

Страница 42: ...lubricants will be required When you clean and or lubricate components of the ANT130XY series stage 1 Be sure to use a clean dry soft lint free cloth for cleaning 2 Before you use a cleaning solvent...

Страница 43: ...e to side motion l Use a swab soaked in Isopropyl Alcohol to remove stubborn debris 4 Apply a thin continuous film of lubricant to the exposed v channels of the cross rollers on both ends of the stage...

Страница 44: ...compatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Ch...

Страница 45: ...ation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerote...

Страница 46: ...rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site N...

Страница 47: ...istory Revision Description 2 00 l Declaration of Conformity updated l Product update to Gen 2 version l Safety information updated 1 00 New manual ANT130XY Hardware Manual Appendix B Revision History...

Страница 48: ...This page intentionally left blank Appendix B Revision History ANT130XY Hardware Manual 48 www aerotech com...

Страница 49: ...0 2010 6 Encoder Specifications 36 EU 2015 863 6 F Flatness 19 G grease 20 H Hall Effect Sensors Specifications 36 Handling 13 Humidity 18 I In Position Stability 19 Inspection Schedule 41 isopropyl a...

Страница 50: ...ing stage 13 stage distortion 24 stabilizing 13 Stage Mass 19 Storage 13 Straightness 19 Symptom 44 T Table of Contents 3 Temperature Effects 18 Thermistor Specifications 36 Travel 19 Troubleshooting...

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