Aerotech ANT130XY Series, Руководство по оборудованию

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2.2. Securing the Stage to the Mounting Surface
DANGER: Mechanical Hazard!
Personnel must be made aware of the mechanical hazards during set up or when you
do service to the stage.
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Do not manually move the stage if it is connected to a power source.
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The stage must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
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When you move the tabletop manually to do maintenance, this could expose the
operator to internal pinch points. Refer to
Pinch Points on Page 11 .
DANGER : Magnetic Field Hazard! When you move the tabletop manually to do
maintenance, this could expose the operator to the magnet track. Refer to Magnetic
Hazards on Page 12 .
The mounting surface must be flat and have adequate stiffness to achieve the maximum
performance from the stage. When it is mounted to a non-flat surface, the stage can be distorted
while the mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments
to the mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision
flatstones on the mounting surface to remove any burrs or high spots. Clean the mounting surface
with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry. Gently place the stage on the mounting surface.
IMPORTANT : The stage is precision machined and verified for flatness prior to product
assembly at the factory. If machining is required to achieve the desired flatness, it
should be performed on the mounting surface rather than the stage. Shimming should
be avoided if possible. If shimming is required, it should be minimized to retain
maximum rigidity of the system.
Table 2-1: Stage Mounting Surface Flatness Requirement
Stage Travel Flatness Requirement
All Travels 7.6 µm
Access the mounting holes in the base of the stage by sliding the carriage all the way to either end of
travel (shown in
Figure 2-4 ).
2.2. Securing the Stage to the Mounting Surface ANT130XY Hardware Manual
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