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Aerotech ANT130L Series, Руководство по оборудованию

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Содержание ANT130L Series

Страница 1: ...Revision 2 00 ANT130L Series Single Axis Linear Direct Drive Nanopositioning Stage HARDWARE MANUAL...

Страница 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Страница 3: ...ifications 17 1 4 Vacuum Operation 18 Chapter 2 Installation 19 2 1 Dimensions 19 2 2 Securing the Stage to the Mounting Surface 21 2 3 Attaching the Payload to the Stage 23 Chapter 3 Electrical Insta...

Страница 4: ...5 Cantilevered Load Capabilities 25 Figure 3 1 ANT130L Motor and Feedback Wiring CN1 Option 32 Figure 3 2 ANT130L Motor and Feedback Wiring CN2 Option 33 Figure 3 3 Machine Direction 36 Figure 3 4 Hal...

Страница 5: ...3 2 25 Pin Mating Connector Part Numbers 29 Table 3 3 4 Pin Motor Connector Pinout CN2 Option 30 Table 3 4 4 Pin Motor Mating Connector Part Numbers 30 Table 3 5 25 Pin Feedback Connector Pinout CN2 O...

Страница 6: ...the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national...

Страница 7: ...the product is used in a manner not specified by the manufacturer l The protection provided by the equipment could be impaired l The life expectancy of the product could be decreased Safety notes and...

Страница 8: ...nt l All service and maintenance must be done by approved personnel l Use this product only in environments and operating conditions that are approved in this manual l Never install or operate equipme...

Страница 9: ...t connect or disconnect stage motor interconnections while connected to a live electrical power source l Before you set up or do maintenance disconnect electrical power l It is the responsibility of t...

Страница 10: ...ch environmental specifications DANGER Mechanical Hazard Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage l When the system is not electrically...

Страница 11: ...al Hazard l System travel can cause crush shear or pinch injuries l Only trained operators should operate this equipment l Do not put yourself in the travel path of machinery l Restrict access to all...

Страница 12: ...magnet track components If you do so you will expose your self to mechanical crush pinch or impact hazards l Magnetic fields could interfere with external or internal medical devices pace makers for...

Страница 13: ...ormation for later reference Unpacking and Handling It is the responsibility of the customer to safely and carefully lift and move the stage IMPORTANT All electronic equipment and instrumentation is w...

Страница 14: ...can be operated Retain the brackets and hardware for future use DANGER Mechanical Hazard l The product can move manually without electrical power connected l When the shipping brackets are removed the...

Страница 15: ...amplified sine output E2 Incremental linear encoders digital RS422 output 5 nm electrical resolution E4 Incremental linear encoders 1 Vpp amplified sine output high performance Connectors Required CN...

Страница 16: ...vibration environment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating These stages are not...

Страница 17: ...2 7 kg Stage Mass 2 6 kg 3 0 kg 3 8 kg 4 6 kg 5 5 kg Material Anodized Aluminum Mean Time Between Failure 30 000 Hours 1 Certified with each stage 2 Requires the selection of an applicable amplifier w...

Страница 18: ...ean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the stage 3 During installation use cleaned vented stainless steel fasteners to secu...

Страница 19: ...ith the instructions provided by this manual and any accompanying documentation Failure to follow these instructions could result in injury or damage to the equipment 2 1 Dimensions Figure 2 1 ANT130L...

Страница 20: ...Figure 2 2 Mounting Plate MP Dimensions 2 1 Dimensions ANT130L Hardware Manual 20 www aerotech com...

Страница 21: ...ll accuracy Adjustments to the mounting surface must be done before the stage is secured Inspect the mounting surface for dirt or unwanted residue and clean if necessary Use precision flatstones on th...

Страница 22: ...al values and may not be accurate for your mounting surface Refer to Section 2 1 for mounting locations and dimensions Table 2 2 Stage to Mounting Surface Hardware Mounting Hardware Typical Screw Torq...

Страница 23: ...d comparable to the stage in quality to maintain optimum performance IMPORTANT For valid system performance the mounting interface should be flat within 1 m per 50 mm WARNING General Hazard Warning Be...

Страница 24: ...Figure 2 4 Load Orientations 2 3 Attaching the Payload to the Stage ANT130L Hardware Manual 24 www aerotech com...

Страница 25: ...Figure 2 5 Cantilevered Load Capabilities ANT130L Hardware Manual 2 3 Attaching the Payload to the Stage www aerotech com 25...

Страница 26: ...This page intentionally left blank 2 3 Attaching the Payload to the Stage ANT130L Hardware Manual 26 www aerotech com...

Страница 27: ...iance requirements when they integrate the ANT130L into a completed system Electrical installation requirements will depend on the ordered product options Installation instructions in this section are...

Страница 28: ...tion only Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized The System Integrator or qualified installer is responsible for...

Страница 29: ...tor Phase C 14 COS Encoder Cosine 15 SIN Encoder Sine 16 MRK Encoder Marker 17 5V Power Supply Input 18 Reserved 19 CW LMT End of travel limit signal that indicates maximum permitted stage travel in t...

Страница 30: ...Reserved 4 Reserved 5 Reserved A4 Frame Ground motor protective ground Table 3 4 4 Pin Motor Mating Connector Part Numbers Mating Connector Aerotech P N Third Party P N Backshell ECK00656 Amphenol 17...

Страница 31: ...or machine clockwise direction 13 Reserved 14 COS Encoder Cosine 15 COS Encoder Cosine 16 5V Power Supply Input 17 SIN Encoder Sine 18 SIN Encoder Sine 19 Reserved 20 Common ground 21 Common ground 22...

Страница 32: ...Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 ANT130L Motor and Feedback Wiring CN1 Option 3 2 Motor and Feedback Wiring ANT130L Hardware Manual 32 www...

Страница 33: ...Figure 3 2 ANT130L Motor and Feedback Wiring CN2 Option ANT130L Hardware Manual 3 2 Motor and Feedback Wiring www aerotech com 33...

Страница 34: ...tial Incremental Encoder l Analog SIN SIN COS COS 1V pk pk into 120 terminations l Digital RS422 MRK MRK signals into 120 terminations Digital Output Incremental Encoder RS422 485 compatible Table 3 1...

Страница 35: ...system cooling conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peak force assumes correct rms cu...

Страница 36: ...y the stage wiring refer to Section 3 2 Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while m...

Страница 37: ...otor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 4 Hall Phasing Diagram ANT130L Hardware Manual 3 5 Motor and Feedback Phasing www aerotech c...

Страница 38: ...igure 3 5 Encoder Phasing Reference Diagram Standard Square Wave Figure 3 6 Encoder Phasing Reference Diagram Analog Sine Wave 3 5 Motor and Feedback Phasing ANT130L Hardware Manual 38 www aerotech co...

Страница 39: ...longer or shorter inspection interval will depend on the application and conditions such as the duty cycle speed and environment Monthly inspections should include but not be limited to l Visually in...

Страница 40: ...d lubricants will be required When you clean and or lubricate components of the ANT130L series stage 1 Be sure to use a clean dry soft lint free cloth for cleaning 2 Before you use a cleaning solvent...

Страница 41: ...nt free cloth with a side to side motion l Use a swab soaked in Isopropyl Alcohol to remove stubborn debris 4 Apply a thin continuous film of lubricant to the exposed v channels of the cross rollers o...

Страница 42: ...compatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Ch...

Страница 43: ...ation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerote...

Страница 44: ...l rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site...

Страница 45: ...d order information l Updated dimension drawings 1 02 l Added Declaration of Incorporation l Added Environmental Specifications section l Added safety information and warnings l Added note about curre...

Страница 46: ...This page intentionally left blank Appendix B Revision History ANT130L Hardware Manual 46 www aerotech com...

Страница 47: ...15 863 6 F Flatness 17 G grease 18 H Hall Effect Sensors Specifications 34 Handling 13 Humidity 16 I In Position Stability 17 Inspection Schedule 39 isopropyl alcohol 40 L label 13 14 Limit Switch Spe...

Страница 48: ...stage distortion 21 stabilizing 13 Stage Mass 17 Storage 13 Straightness 17 Symptom 42 T Table of Contents 3 Temperature Effects 16 Thermistor Specifications 34 Travel 17 Troubleshooting 42 V vacuum...

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