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Содержание ANT130L Series
Страница 1: ...Revision 2 00 ANT130L Series Single Axis Linear Direct Drive Nanopositioning Stage HARDWARE MANUAL...
Страница 20: ...Figure 2 2 Mounting Plate MP Dimensions 2 1 Dimensions ANT130L Hardware Manual 20 www aerotech com...
Страница 24: ...Figure 2 4 Load Orientations 2 3 Attaching the Payload to the Stage ANT130L Hardware Manual 24 www aerotech com...
Страница 46: ...This page intentionally left blank Appendix B Revision History ANT130L Hardware Manual 46 www aerotech com...